Method for transferring objects onto a substrate by means of a compact film of particles

Patent metadata

Field	Value
Publication number	US-9533838-B2
Application number	US-201214369752-A
Country	US
Kind code	B2
Filing date	Dec 28, 2012
Priority date	Jan 2, 2012
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A method of transferring objects onto a substrate, or a moving substrate, the objects to be transferred being placed in a transfer area including an inlet and an outlet spaced apart from one another by two lateral edges opposite one another, and holding a carrier liquid forming a conveyor, the objects being held by a compact film of particles floating on the carrier liquid of the transfer area, in which the objects are moved with the particle film to be transferred onto the substrate when they reach the outlet.

First claim

The invention claimed is:

1. A method for transferring objects onto a substrate, or a moving substrate,
implemented by a transfer area comprising an inlet and an outlet spaced apart from one another by two lateral edges opposite one another, and holding a carrier liquid forming a conveyor,
the objects being held by a compact film of particles floating on the carrier liquid of the transfer area,
wherein the objects are moved with the particle film to be transferred onto the substrate when the objects reach the outlet.

2. A method according to claim 1 , wherein at least one of the objects to be transferred is placed in the transfer area, floating on the carrier liquid forming a conveyor, to be surrounded by the particle film.

3. A method according to claim 1 , wherein at least one of the objects to be transferred is placed in the transfer area on the compact particle film previously formed, to create, in the carrier liquid, a compression of particles supporting it.

4. A method according to claim 1 , wherein a ratio between a large dimension of the particles and that of the objects to be transferred is between 10 4 and 10 8 .

5. A method according to claim 1 , wherein the particles are silica beads around 1 μm in diameter.

6. A method according to claim 1 , wherein each object to be transferred has a large dimension greater than 0.2 cm.

7. A method according to claim 1 , wherein each object includes at least one hydrophobic portion.

8. A method according to claim 1 , wherein each object to be transferred is an element from the group of silicon chips, microbatteries, organic electronic components, metal elements, photovoltaic cells, cells, and microcells.

9. A method according to claim 1 , wherein the film of ordered particles floating on the carrier liquid is obtained by compression, and/or dipole-dipole interaction, and/or by a magnetic field.

10. A method according to claim 1 , implemented by an inclined ramp for particle circulation, attached to the inlet of the transfer area, and on which the carrier liquid is also intended to circulate.

11. A method according to claim 1 , wherein, after the particles and objects have been transferred onto the substrate, comprising a thermal annealing for facilitating deposition and adhesion of the particles and objects on the substrate.

12. A method according to claim 1 , wherein a deposition of objects in the transfer area is performed by one or more conveyors.

Assignees

• Commissariat A L'Energie Atomique Et Aux Ene Alt
• Commissariat L Energie Atomique Et Aux Energies Alternatives

Inventors

• Dellea Olivier
• Coronel Philippe
• Fugier Pascal

Classifications

• H10P72/3212 Primary

  the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames · CPC title

• H10P72/36

  using air tracks · CPC title

• B65G53/00 Primary

  Conveying materials in bulk through troughs, pipes or tubes by floating the materials or by flow of gas, liquid or foam · CPC title

• B05D2401/32

  applied as powders · CPC title

• B05D3/0254

  After-treatment · CPC title