Susceptor support shaft with uniformity tuning lenses for EPI process

Patent metadata

Field	Value
Publication number	US-9532401-B2
Application number	US-201414181035-A
Country	US
Kind code	B2
Filing date	Feb 14, 2014
Priority date	Mar 15, 2013
Publication date	Dec 27, 2016
Grant date	Dec 27, 2016

Abstract

Embodiments of the invention generally relate to susceptor support shafts and process chambers containing the same. A susceptor support shaft supports a susceptor thereon, which in turn, supports a substrate during processing. The susceptor support shaft reduces variations in temperature measurement of the susceptor and/or substrate by providing a consistent path for a pyrometer focal beam directed towards the susceptor and/or substrate, even when the susceptor support shaft is rotated. The susceptor support shafts also have a relatively low thermal mass which increases the ramp up and ramp down rates of a process chamber. In some embodiments, a custom made refractive element can be removably placed on the top of the solid disc to redistribute secondary heat distributions across the susceptor and/or substrate for optimum thickness uniformity of epitaxy process.

First claim

We claim:

1. A susceptor support shaft for a process chamber, comprising:
a support shaft; and
a support body coupled to the support shaft, the support body comprising:
a solid disc;
a plurality of bases extending outwardly from the solid disc;
at least three support arms extending from some of the plurality of bases, wherein each of the support arms includes an elbow bending upward to a distal end of the support arm; and
at least three dummy arms extending from some of the plurality of bases, wherein each of the dummy arms is a linear arm.

2. The susceptor support shaft of claim 1 , wherein the support arms are spaced at equal intervals from one another.

3. The susceptor support shaft of claim 1 , wherein a thickness of each of the bases increases as a width of each of the bases decreases.

4. The susceptor support shaft of claim 1 , wherein each of the support arms includes an opening therethrough for accepting a lift pin.

5. The susceptor support shaft of claim 1 , further comprising:
a refractive lens removably positioned on the solid disc, wherein the refractive lens is formed of a light transparent material.

6. The susceptor support shaft of claim 5 , wherein the refractive lens has a constant thickness, and the refractive lens has a convex or concave surface on a first side and convex or concave surface on a second side opposing the first side.

7. The susceptor support shaft of claim 6 , wherein the concave surface of the refractive lens has a radius of curvature of about 200 mm to about 1200 mm.

8. A process chamber for heating a substrate, comprising:
a substrate support disposed within the process chamber;
a lower dome disposed below the substrate support;
an upper dome disposed opposing the lower dome, the upper dome comprising:
a central window portion; and
a peripheral flange engaging the central window portion around a circumference of the central window portion, wherein the central window portion and the peripheral flange are formed of a light transparent material; and

a support shaft coupled to the substrate support, comprising:
a shaft; and
a support body coupled to the shaft, the support body comprising:
a solid disc;
a plurality of bases extending outwardly from the solid disc;
a plurality of support arms extending from some of the plurality of bases, wherein each of the support arms includes an elbow bending upward to a distal end of the support arm; and
a plurality of dummy arms extending from some of the plurality of bases, wherein each of the dummy arms is a linear arm.

9. The process chamber of claim 8 , wherein the solid disc has a surface area (one side) about 30% to 80% less than the surface area (one side) of the substrate.

10. The process chamber of claim 8 , wherein the support shaft further comprises:
a refractive lens removably positioned on the solid disc, wherein the refractive lens is formed of clear quartz, glass or transparent plastic, and wherein the refractive lens is sized to match an outer circumference of the solid disc.

11. The process chamber of claim 10 , wherein the refractive lens has a convex or concave surface on a first side facing a backside of the substrate support, and wherein the refractive lens has a convex or concave surface on a second side facing away the backside of the substrate support.

12. The process chamber of claim 8 , further comprising:
a reflector disposed above the upper dome, the reflector has one or more threaded features on its outside surface, and the one or more threaded features extend around a circumference of the reflector.

13. A susceptor support shaft for a process chamber, comprising:
a support shaft;
a support body coupled the support shaft, the support body comprising:
a solid disc;
a plurality of bases extending outwardly at even intervals from an outer circumference of the solid disc;
a plurality of support arms extending from some of the plurality of bases, wherein each of the support arms includes an elbow bending upward to a distal end of the support arm; and
a plurality of dummy arms extending from some of the plurality of bases, wherein each of the dummy arms is a linear arm; and

a refractive lens removably supported by the solid disc and sized to match a circumference of the solid disc.

14. The susceptor support shaft of claim 13 , wherein the plurality of support arms are spaced at equal intervals from one another.

15. The susceptor support shaft of claim 14 , wherein the plurality of dummy arms are spaced at equal intervals from one another, and the at least three support arms and the at least three dummy arms are alternately located around the solid disc.

16. The susceptor support shaft of claim 13 , wherein the refractive lens has a convex or concave surface on a first side and convex or concave surface on a second side opposing the first side.

17. The susceptor support shaft of claim 16 , wherein the concave surface of the refractive lens has a radius of curvature of about 200 mm to about 1200 mm.

Assignees

• Applied Materials Inc

Inventors

• Cong Zhepeng
• Ramachandran Balasubramanian
• Ishii Masato
• Li Xuebin
• Samir Mehmet Tugrul
• Lau Shu-Kwan
• Brillhart Paul

Classifications

• H05B2203/032

  Heaters specially adapted for heating by radiation heating · CPC title

• H05B1/0227 Primary

  Applications · CPC title