Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US9522967B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9522967-B2 |
| Application number | US-81113707-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 8, 2007 |
| Priority date | Jun 9, 2006 |
| Publication date | Dec 20, 2016 |
| Grant date | Dec 20, 2016 |
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A photopolymerization accelerator composition improving color stability and controlling polymerization shrinkage stress of cured resin and/or the resulting composite paste thereby feature by tertiary twisted biphenyldiamine with the general formula I: R2 and R3 are each independently alkyl having from 1 to 5 carbon atoms; R and R1 are each independently hydrogen or halogen; alkyl alkoxy, or alkylthio having from 1 to 18 carbon atoms; or phenyl and/or substituted phenyl alkoxy, or alkylthio having from 1 to 18 carbon atoms. It can be used in part with conventional photosensitizers and radically polymerizable monomers.
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What is claimed is: 1. A photopolymerizable composition comprising an aromatic tertiary diamine having a twisted biphenyl moiety, a photosensitizer, and at least one polymerizable resin; wherein the at least one polymerizable resin consists of at least one of a monofunctional (meth)acrylate monomer or a polyfunctional (meth)acrylate monomer; and wherein the aromatic tertiary diamine having the twisted biphenyl moiety is selected from the group consisting of: and combinations thereof. 2. A photopolymerizable composition comprising an aromatic tertiary diamine having a twisted biphenyl moiety, a photosensitizer, and at least one polymerizable resin; wherein the at least one polymerizable resin consists of at least one of a monofunctional (meth)acrylate monomer or a polyfunctional (meth)acrylate monomer; and wherein the aromatic tertiary diamine having the twisted biphenyl moiety comprises a trifluoromethyl substituent on each of the two phenyl groups in the twisted biphenyl moiety. 3. The composition of claim 2 , wherein the aromatic tertiary diamine having the twisted biphenyl moiety comprises
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