Low temperature poly-silicon thin film preparation apparatus and method for preparing the same

Patent metadata

Field	Value
Publication number	US-9522844-B2
Application number	US-201414408337-A
Country	US
Kind code	B2
Filing date	Sep 23, 2014
Priority date	Sep 3, 2014
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

A low temperature poly-silicon thin film preparation apparatus and a method for preparing the same are disclosed, the preparation apparatus comprises a substrate cleaning tank and an ozone generating device connected thereto, such that not only can blow off residual liquid on a surface of a glass substrate, but can also allow the glass substrate to directly contact the ozone, such that a silicon film on the surface of the glass substrate is more smooth and less impure, and an oxide film formed on the surface is more uniform since it contacts with the ozone at the first time after being cleaned by hydrofluoric acid, therefore the crystalline effect is more excellent.

First claim

What is claimed is:

1. A low temperature poly-silicon thin film preparation apparatus, comprising:
a substrate cleaning tank for cleaning a glass substrate, a conveying means for conveying the glass substrate being disposed within the substrate cleaning tank;
an ozone generating means for generating ozone;
a gas delivery tube, comprising an input terminal and an output terminal, the input terminal being connected to the ozone generating means, the output terminal being connected to the substrate cleaning tank at an upper portion of the glass substrate within the substrate cleaning tank;
the output terminal of the gas delivery tube being provided with an air knife, the air knife comprising an air knife gas inlet port and an air knife gas outlet port, the air knife gas outlet port being disposed parallel to the glass substrate, in order to blow the ozone onto a surface of the glass substrate uniformly;
wherein, after the glass substrate is cleaned in the substrate cleaning tank, the gas delivery tube delivers the ozone generated by the ozone generating means to the substrate cleaning tank, in order to the blow the ozone onto the surface of the cleaned glass substrate;
a laser annealing means for processing a laser annealing treatment to the glass substrate, in order to form a low temperature poly-silicon thin film on the surface of the glass substrate.

2. The low temperature poly-silicon thin film preparation apparatus according to claim 1 , wherein a width of the air knife gas outlet port is greater than a width of the glass substrate.

3. The low temperature poly-silicon thin film preparation apparatus according to claim 1 , wherein the air knife gas outlet port has more than two uniformly disposed gas outlet ports.

4. The low temperature poly-silicon thin film preparation apparatus according to claim 3 , wherein a gap between two gas outlet ports is 0.3 mm to 0.8 mm.

5. A low temperature poly-silicon thin film preparation apparatus, comprising:
a substrate cleaning tank for cleaning a glass substrate;
an ozone generating means for generating ozone;
a gas delivery tube, comprising an input terminal and an output terminal, the input terminal being connected to the ozone generating means, the output terminal being connected to the substrate cleaning tank and connected to an upper portion of the glass substrate within the substrate cleaning tank;
wherein, after the glass substrate is cleaned in the substrate cleaning tank, the gas delivery tube delivers the ozone generated by the ozone generating means to the substrate cleaning tank, in order to the blow the ozone onto the surface of the cleaned glass substrate;
a laser annealing means for processing a laser annealing treatment to the glass substrate, in order to form a low temperature poly-silicon thin film on the surface of the glass substrate.

6. The low temperature poly-silicon thin film preparation apparatus according to claim 5 , wherein the output terminal of the gas delivery tube is provided with an air knife, the air knife comprises an air knife gas inlet port and an air knife gas outlet port, the air knife gas outlet port being disposed parallel to the glass substrate, in order to blow the ozone onto the surface of the glass substrate uniformly.

7. The low temperature poly-silicon thin film preparation apparatus according to claim 6 , wherein a width of the air knife gas outlet port is greater than a width of the glass substrate.

8. The low temperature poly-silicon thin film preparation apparatus according to claim 6 , wherein the air knife gas outlet port has more than two uniformly disposed gas outlet ports.

9. The low temperature poly-silicon thin film preparation apparatus according to claim 8 , wherein a gap between two gas outlet ports is 0.3 mm to 0.8 mm.

10. The low temperature poly-silicon thin film preparation apparatus according to claim 8 , wherein a conveying means for conveying the glass substrate is disposed within the substrate cleaning tank.

Assignees

• Shenzhen China Star Optoelect

Inventors

• Li Jia

Classifications

• C03C23/0025

  by a laser beam · CPC title

• C03C2218/31

  Pre-treatment · CPC title

• C03C23/0075

  Cleaning of glass (specially adapted to plate glass B08B11/00) · CPC title

• C03C17/245 Primary

  by deposition from the vapour phase · CPC title

• C03C2217/262

  Light metals other than Al · CPC title