Packaging apparatus for deposition masks

Patent metadata

Field	Value
Publication number	US-9522764-B2
Application number	US-201514741245-A
Country	US
Kind code	B2
Filing date	Jun 16, 2015
Priority date	Oct 8, 2014
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

A packaging apparatus is provided for packaging one or more deposition masks. The apparatus comprises a base comprising a first surface and a first recess; a cover disposed over the base and comprising a second surface facing the first surface and a second recess; a first film placed over the first surface to cover the first recess; a second film placed over the second surface to cover the second recess; and a plurality of insertion sheets interposed between the first film and the second film. The one or more deposition masks comprise a first mask interposed between first and second insertion sheets, the first mask having a width defining a width direction. Each of the first and second insertion sheets comprises a plurality of openings, each extending along the width direction when viewed in a viewing direction perpendicular to the first surface.

First claim

What is claimed is:

1. A packaging apparatus for packaging one or more deposition masks having slits through which a deposition material passes, the apparatus comprising:
a base comprising a first surface and a first recess recessed from the first surface;
a cover disposed over the base and comprising a second surface facing the first surface and a second recess recessed from the second surface;
a first film placed over the first surface to cover the first recess;
a second film placed over the second surface to cover the second recess; and
a plurality of insertion sheets interposed between the first film and the second film,

wherein the one or more deposition masks comprises a first mask interposed between a first one and a second one of the plurality of insertion sheets, the first mask having a width defining a width direction,
wherein each of the first and second insertion sheets comprising a plurality of openings, each extending along the width direction when viewed in a viewing direction perpendicular to the first surface.

2. The apparatus of claim 1 , wherein the first film has a predetermined elastic force and supports the one or more masks to inhibit the one or more masks from being at least partly inserted in the first recess.

3. The apparatus of claim 1 , wherein the second film has a predetermined elastic force and supports the one or more masks to inhibit the one or more masks from being at least partly inserted in the second recess.

4. The apparatus of claim 1 , further comprising a connection member which connects the base and the cover, wherein the connection member is hingedly attached to the base and the cover such that the base, the connection member and the cover together form a folder.

5. The apparatus of claim 1 , wherein the plurality of insertion sheets are formed of polyethylene (PE), polypropylene (PP), or polyethylene terephthalate (PET).

6. The apparatus of claim 1 , wherein each of the plurality of openings of the first and second insertion sheets comprises one end that does not overlap the first mask when viewed in the viewing direction.

7. The apparatus of claim 1 , wherein the plurality of openings are arranged along a length of the first mask, and each of the plurality of openings has a width of about 0.1 mm to about 10 mm measured in a direction along the length of the first mask.

8. The apparatus of claim 1 , wherein each of the plurality of openings has a polygonal shape when viewed in the viewing direction.

9. The apparatus of claim 1 , wherein each of the plurality of openings has a round end when viewed in the viewing direction.

10. The apparatus of claim 1 , wherein each of the plurality of openings has an oval shape.

11. The apparatus of claim 1 , wherein the plurality of openings comprises a plurality of pairs of openings which are arranged along a length of the first mask, each pair comprises a first opening and a second opening aligned along an imaginary line extending along the width direction, wherein each of the plurality of openings comprises a first end overlapping the first mask when viewed in the viewing direction and a second end not overlapping the first mask when viewed in the viewing direction.

12. The apparatus of claim 11 , wherein the first opening and the second opening are separated by a partition part having a width of about 0.1 mm to about 10 mm.

13. The apparatus of claim 11 , wherein, when viewed in the viewing direction, the partition part comprises an edge slanted with respect to the width direction with an angle greater than 0° and less than 90°.

14. The apparatus of claim 1 , wherein a length of the plurality of openings is equal to or greater than the width of the first mask.

15. The apparatus of claim 1 , wherein the plurality of openings are arranged along a length of the first mask by a substantially constant distance.

16. The apparatus of claim 1 , wherein the first mask comprises a plurality of deposition patterns and at least one bridge disposed between immediately neighboring two of the plurality of deposition patterns, wherein the at least one bridge overlaps at least one of the plurality of openings when viewed in the viewing direction.

17. The apparatus of claim 1 , wherein the first mask comprises a plurality of deposition patterns and at least one bridge disposed between immediately neighboring two of the plurality of deposition patterns, wherein each deposition pattern overlaps at least one of the plurality of openings when viewed in the viewing direction.

18. The apparatus of claim 1 , wherein the first mask contacts the first and second insertion sheets.

19. A method of making an organic light emitting display device, the method comprising:
providing the packaging apparatus of claim 1 ;
retrieving the first mask from the packaging apparatus;
placing the first mask between a substrate and a deposition source containing a deposition material; and
depositing the deposition material over the substrate through the slits of the first mask, thereby making an organic light emitting display device.

20. The method of claim 19 , wherein each of the plurality of openings of the first and second insertion sheets comprises one end that does not overlap the first mask when viewed in the viewing direction.

Assignees

• Samsung Display Co Ltd

Inventors

• Baek Daewon

Classifications

• H01L51/0011

  Electricity · mapped topic

• B65D25/10 Primary

  Devices to locate articles in containers {(for protecting articles from mechanical damage B65D81/02)} · CPC title

• Y10S438/95

  Multilayer mask including nonradiation sensitive layer · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title