Amplified piezo actuator with motorized adjustment screw

Patent metadata

Field	Value
Publication number	US-9520548-B2
Application number	US-201514851985-A
Country	US
Kind code	B2
Filing date	Sep 11, 2015
Priority date	Aug 15, 2014
Publication date	Dec 13, 2016
Grant date	Dec 13, 2016

Abstract

A piezoelectric actuator with integrated features to provide linear displacement of a threaded rod is presented. One mechanism provides mechanically amplified piezo motion for high speed/short travel position scanning whereas the other provides a low speed/long travel piezo motorized position adjustment. Mechanical amplifier incorporates one or more piezo stacks in longitudinal axis with preload to translate an amplified motion in the order of a few times in the transverse axis, perpendicular to the piezo stack motion. The piezo amplified output travel is transmitted to the internally threaded features of the other mechanism where a screw with a ball at the end to push a desired surface for high speed scanning mode translation. The internally threaded feature of the other mechanism is also operated by a secondary piezo stack which produces slip-stick motion steps to rotate the screw in one direction or the other to produce a slow speed/long travel mode.

First claim

What is claimed is:

1. An actuator, comprising:
a threaded screw;
a piezo inertia driver; and
a piezo amplifier;
wherein the piezo inertia driver comprises:
a clamp having a first movable jaw for engagement with the threaded screw on a first side and a second jaw for engagement with the threaded screw on a second side opposite to said first side; and
a first piezo stack mounted in said clamp for parallel movement of said first jaw relative to said second jaw;
wherein when an alternating voltage is applied to the first piezo stack, the first piezo stack causes a parallel back-and-forth movement of the first movable jaw relative to the second jaw by expansion and contraction of the first piezo stack as a result of the applied alternating voltage;
wherein the alternating voltage has a ramp up rate that is different from its ramp down rate, which causes the threaded screw to slip in the clamp more in one direction than in another direction of the back-and-forth movement, resulting in a net rotation of the threaded screw, and the rotation results in a first translation movement of the threaded screw;
wherein the piezo amplifier comprises:
a top wall, a bottom wall, a first and second side walls, the walls being joined by flex hinges; and
a second piezo stack;
wherein one end of the second piezo stack is coupled to the first side wall and the other end of the second piezo stack is coupled to the second side wall;
wherein the piezo inertia driver is coupled to the top wall of the piezo amplifier such that the thread screw engaged by the clamp is offset by a distance from a plane containing the first piezo stack;
wherein when a second voltage is applied to the second piezo stack, the second piezo stack causes a horizontal movement of the side walls by expansion or contraction of the second piezo stack, the horizontal movement causes a perpendicular movement of the top wall via the flex hinges, and the perpendicular movement causes a second translation movement of the threaded screw by the top wall pulling or pushing the piezo inertia driver.

2. The actuator of claim 1 , wherein the tip of the screw comprises a steel ball.

3. The actuator of claim 1 , wherein each of the first and second side walls comprises an end cup for coupling with the second piezo stack, each of the first and second side walls being connected to its end cup via a flex hinge.

4. The actuator of claim 1 , wherein each of the first and second side walls comprises a coupling interface for coupling with the second piezo stack, and the coupling interface comprises a plurality of layers including one or more aluminum, steel and adhesive layers.

5. The actuator of claim 1 , further comprising a spring to pull the first and second jaws together in order to preload the threaded screw.

6. The actuator of claim 1 , further comprising a circuit for providing the alternating voltage.

7. The actuator of claim 1 , wherein the jaws are partially threaded.

8. The actuator of claim 1 , wherein the piezo inertia driver and the piezo amplifier are parts of a monolithic structure.

Assignees

• Thorlabs Inc

Inventors

• Fathi Saeed
• Robson Mark
• Dhese Keith

Classifications

• H02N2/101 Primary

  using intermittent driving, e.g. step motors · CPC title

• H02N2/043 Primary

  Mechanical transmission means, e.g. for stroke amplification · CPC title

• H01L41/083 Primary

  Electricity · mapped topic