Integral preload mechanism for piezoelectric actuator

Patent metadata

Field	Value
Publication number	US-10389276-B2
Application number	US-201615209639-A
Country	US
Kind code	B2
Filing date	Jul 13, 2016
Priority date	Apr 15, 2014
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

A piezoelectric actuator that may include a monolithic frame having an integral bias band that provides a resilient restoring force between a first contact surface and a second contact surface of the actuator that may be used to rotate an adjustment shaft. In some cases, a preload mechanism may also be included with the frame. Such piezoelectric actuators may be used for adjustable optical mounting devices such as optical mounting devices.

First claim

What is claimed is:

1. A method of manufacturing a monolithic actuator frame for a piezoelectric actuator, comprising cutting an actuator frame from a piece of continuous high strength material, the cut actuator frame including (i) a monolithic configuration with all elements of the actuator frame being formed from a single piece of continuous uninterrupted material, (ii) a first support element including a first contact surface, (iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and opposed relation relative to the first contact surface, (iv) a bias band which extends distally from a distal portion of the first support element, which is disposed between the first support element and the second support element and which is configured to provide a resilient restoring force that resists perpendicular displacement of the first contact surface away from the second contact surface, and (v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame.

2. The method of claim 1 wherein the piece of continuous high strength material comprises stainless steel and cutting the actuator frame from the piece of continuous high strength material comprises cutting the stainless steel.

3. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by an EDM process.

4. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by a laser machining process.

5. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by a water jet machining process.

6. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by a CNC machining process.

Assignees

• Newport Corp

Inventors

• Li Hongqi

Classifications

• H02N2/006 Primary

  Elastic elements, e.g. springs (in general F16F1/00) · CPC title

• B23H7/02

  Wire-cutting · CPC title

• Y10T29/42

  Piezoelectric device making · CPC title

• H02N2/101

  using intermittent driving, e.g. step motors · CPC title

• H02N2/04

  Constructional details · CPC title