Dynamic optical head layer and lithography method using the same

Patent metadata

Field	Value
Publication number	US-9519222-B2
Application number	US-201514635336-A
Country	US
Kind code	B2
Filing date	Mar 2, 2015
Priority date	Feb 28, 2014
Publication date	Dec 13, 2016
Grant date	Dec 13, 2016

Abstract

The present invention relates to a dynamic optical head layer in an optical lithography system forming patterns on a substrate, the dynamic optical head layer being detachably mounted on the substrate, and the dynamic optical head layer includes a first dielectric layer formed on a top portion thereof, a second dielectric layer formed on a bottom portion thereof, and an dynamic nano aperture layer formed between the first dielectric layer and the second dielectric layer, wherein the dynamic nano aperture layer is made of a material having optical anisotropy, and the first dielectric layer and the second dielectric layer are made of oxide-based materials, nitride-based materials, and carbide-based materials.

First claim

What is claimed is:

1. A dynamic optical head layer in an optical lithography system forming patterns on a substrate, the dynamic optical head layer being detachably mounted on the substrate, the dynamic optical head layer comprising:
a first dielectric layer formed on a top portion thereof;
a second dielectric layer formed on a bottom portion thereof; and
an dynamic nano aperture layer formed between the first dielectric layer and the second dielectric layer,
wherein the dynamic nano aperture layer is made of a material having optical anisotropy, and the first dielectric layer and the second dielectric layer are made of oxide-based materials, nitride-based materials, and carbide-based materials, and
wherein the material having optical anisotropy is Sb 65 Se 35 .

2. The dynamic optical head layer according to claim 1 , wherein the oxide-based materials comprise SiO 2 , ZnS—SiO 2 , GeO 2 , BeO 2 , ZrO 2 , BaTiO 3 , SrTiO 3 , and TaO.

3. The dynamic optical head layer according to claim 1 , wherein the nitride-based materials comprise SiN 4 , BN, and AIN.

4. The dynamic optical head layer according to claim 1 , wherein the carbide-based materials comprise SiC.

5. The dynamic optical head layer according to claim 1 , further comprising a substrate layer located on the top of the first dielectric layer to support the laminated structure of the first dielectric layer, the dynamic nano aperture layer, and the second dielectric layer.

6. The dynamic optical head layer according to claim 5 , wherein if the deposited surface of the substrate layer is curved, the substrate layer is made of a soft elastic material, and if the deposited surface thereof is flat, the substrate layer is made of a material like hard glass.

7. The dynamic optical head layer according to claim 6 , wherein the substrate layer comprises any one of films, such as PC, COP, PI, PET, OPP, PE, PP, PMMA, and acrylic films, and glass, such as sodalime glass, borosilicate glass, fused silica glass, and quartz glass.

8. The dynamic optical head layer according to claim 1 , further comprising a hydrophobic coating layer coated on the underside surface of the second dielectric layer to allow the second dielectric layer to be easily detached from a photoresist.

9. The dynamic optical head layer according to claim 8 , wherein the hydrophobic coating layer is formed by using a self-assembled oligomer of PDMS or by depositing a self-assembled monolayer.

10. The dynamic optical head layer according to claim 9 , wherein the self-assembled monolayer comprises a slime or thiol-based self-assembled monolayer.

11. A lithography method using a dynamic optical head layer, comprising:
the substrate preparation step of placing a substrate on a stage;
the photoresist coating step of coating a photoresist onto the substrate;
the dynamic optical head layer coupling step of coupling the dynamic optical head layer to the photoresist;
the pattern formation step of irradiating laser beams, moving the stage, and forming patterns on the substrate; and
the super resolution separation step of separating the dynamic optical head layer from the photoresist,
wherein the dynamic optical head layer comprises a first dielectric layer formed on a top portion thereof, a second dielectric layer formed on a bottom portion thereof, and an dynamic nano aperture layer formed between the first dielectric layer and the second dielectric layer, the dynamic nano aperture layer being made of a material having optical anisotropy, and the first dielectric layer and the second dielectric layer being made of oxide-based materials, nitride-based materials, and carbide-based materials, and if the laser beams are irradiated in the pattern formation step, dynamic optical nano apertures are formed on the dynamic nano aperture layer to allow the laser beams to be transmitted therethrough to form patterns on the substrate, and
wherein the material having optical anisotropy is Sb 5 Se 35 .

12. The lithography method according to claim 11 , wherein in the pattern formation step the patterns are formed in such a way that the laser beams are incident through modulation and the incident laser beams are focused through a microlens array and or in such a maskless way using a DMD (digital micro mirror device).

13. A lithography system using a dynamic optical head layer, comprising:
a pattern part having a substrate on which patterns are formed;
the dynamic optical head layer detachably mounted on the substrate; and
a microlens array adapted to allow laser beams incident to the dynamic optical head layer and the pattern part to be focused,
wherein the dynamic optical head layer comprises a first dielectric layer formed on a top portion thereof, a second dielectric layer formed on a bottom portion thereof, and an dynamic nano aperture layer formed between the first dielectric layer and the second dielectric layer, the dynamic nano aperture layer being made of a material having optical anisotropy, the first dielectric layer and the second dielectric layer being made of oxide-based materials, nitride-based materials, and carbide-based materials, and the material having optical anisotropy being Sb 65 Se 35 .

Assignees

• Industry-Academic Cooperation Foundation Yonsei Univ

Inventors

• Kang Shinill
• Han Jungjin
• Cho Eikhyun
• Cho Younggeol
• Choi Se-Young

Classifications

• G03F7/7015 Primary

  Details of optical elements · CPC title