Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US9517486B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9517486-B2 |
| Application number | US-201514599795-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 19, 2015 |
| Priority date | May 24, 2012 |
| Publication date | Dec 13, 2016 |
| Grant date | Dec 13, 2016 |
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A dispensing pump, and more particularly, a valve impact type dispensing pump that may be used in a process of manufacturing an electronic product and may dispense an accurate amount of a liquid, such as a liquid synthetic resin, at high speed. The valve impact type dispensing pump can descend a valve rod at high speed and thus can dispense a liquid with high viscosity at high speed. The valve impact type dispensing pump can dispense an accurate amount of a liquid at high speed. Also, the valve impact type dispensing pump can dispense a liquid having high viscosity at high speed due to a fast descending speed of a valve rod.
Opening claim text (preview).
What is claimed is: 1. A method of dispensing liquid, the method comprising: providing a liquid dispensing pump which comprises: a cam rotatable about a rotational axis and comprising a cam surface around the rotational axis, a cam follower biased toward the cam surface and configured to travel along the cam surface for reciprocating movement along a first direction, an operation rod coupled to the cam follower and configured to generate a stroke along the first direction based on the reciprocating movement of the cam follower, a valve assembly comprising a valve and a nozzle, and a gap member integrated with the operation rod and coupled to the valve with a gap therebetween such that during a first part of the stroke the gap member is movable relative to the valve that does not transfer the stroke of the operation rod to the valve and that during a second part of the stroke following the first part the gap member contacts the valve to transfer the stroke of the operation rod to move the valve toward the nozzle; supplying liquid to the valve assembly; and rotating the cam about the rotational axis to cause the cam follower to travel along the cam surface for reciprocating movement thereof along the first direction, wherein as the gap member moves in the first direction toward the nozzle, the gap member first moves relative to the valve within a distance of the gap along the first direction such that the movement of the gap member does not transfer any force to the valve and subsequently the gap member contacts the valve and pushes the valve toward the nozzle. 2. The method of claim 1 , wherein the gap member comprises a gap member surface and the valve comprises a valve surface, and the gap member surface moves toward the valve surface during the first part of the stroke until the gap member surface contacts the valve surface. 3. The method of claim 2 , wherein during the second part of the stroke the gap member surface and the valve surface maintain contacting each other such that the gap member pushes the valve toward the nozzle. 4. The method of claim 2 , wherein the operation rod is secured to the gap member with no relative motion of the operation rod relative to the gap member. 5. The method of claim 2 , wherein the gap member comprises a second gap member surface and the valve comprises a second valve surface, wherein during the second part of the stroke, the second gap member surface does not contact the second valve surface. 6. The method of claim 5 , wherein the second valve surface faces away from the valve surface. 7. The method of claim 5 , wherein the second gap member surface contacts the second valve surface while the valve moves away from the nozzle. 8. The method of claim 5 , wherein the distance of the gap between the gap member surface and the valve surface along the first direction has its maximum value when the second gap member surface contacts the second valve surface. 9. The method of claim 8 , further comprising adjusting the maximum value. 10. The method of claim 2 , wherein the cam surface comprises an ascending portion and a descending portion, wherein the gap member moves toward the nozzle along the first direction as the cam follower travels over the descending portion, wherein during the cam follower's traveling over the descending portion the gap member surface moves toward the valve surface and then contacts the valve surface to push the valve toward the nozzle. 11. The method of claim 2 , wherein the cam surface comprises an ascending portion and a descending portion, wherein the gap member moves away from the nozzle along the first direction as the cam follower travels on the ascending portion, wherein the cam follower's traveling on the ascending portion the gap member surface does not contact the valve surface. 12. The method of claim 1 , wherein the distance of the gap along the first direction is smaller than the stroke of the cam follower along the first direction. 13. A method of dispensing liquid, the method comprising: providing a liquid dispensing pump which comprises: a cam rotatable about a rotational axis and comprising a cam surface around the rotational axis, a cam follower biased toward the cam surface and configured to travel along the cam surface for reciprocating movement along a first direction, an operation rod coupled to the cam follower and configured to generate a stroke along the first direction based on the reciprocating movement of the cam follower, a valve assembly comprising a valve and a nozzle, and a gap member interconnecting the operation rod and the valve with a gap between the operation rod and the valve such that during a first part of the stroke the operation rod is movable relative to the valve that does not transfer the stroke of the operation rod to the valve and that during a second part of the stroke following the first part the operation rod contacts the valve to transfer the stroke of the operation rod to move the valve toward the nozzle, wherein the operation rod the operation rod surface at its one end and the valve comprises a valve surface, and the operation rod surface moves toward the valve surface during the first part of the stroke until the operation rod surface contacts the valve surface; supplying liquid to the valve assembly; and rotating the cam about the rotational axis to cause the cam follower to travel along the cam surface for reciprocating movement thereof along the first direction, wherein as the operation rod moves in the first direction toward the nozzle, the operation rod first moves relative to the valve within a distance of the gap along the first direction such that the movement of the operation rod does not transfer any force to the valve and subsequently the operation rod contacts the valve and pushes the valve toward the nozzle. 14. A method of making an electronic device, the method comprising: providing an intermediate electronic device comprising a surface on which to mount an electronic component; dispensing liquid on the surface of the intermediate electronic device, wherein dispensing liquid is performed using the method of claim 1 ; and placing the electronic component over the surface, wherein the liquid is disposed between the electronic component and the surface. 15. The method of claim 14 , further comprising curing the liquid, thereby filling space between the surface and the electronic component by the cured liquid and bonding the surface and the electronic component. 16. The method of claim 14 , wherein the gap member comprises a gap member surface and the valve comprises a valve surface, and the gap member surface moves toward the valve surface during the first part of the stroke until the gap member surface contacts the valve surface. 17. The method of claim 16 , wherein the gap member comprises a second gap member surface and the valve comprises a second valve surface, wherein during the second part of the stroke, the second gap member surface does not contact the second valve surface. 18. The method of claim 17 , wherein the second gap member surface contacts the second valve surface while the valve moves away from the nozzle. 19. The method of claim 16 , wherein the cam surface comprises an ascending portion and a descending portion, wherein the gap member moves toward the nozzle along the first direction as the cam follower travels over the descending portion, wherein during the cam follower's traveling over the descending portion the gap member surface moves toward the valve surface and the
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Methods of surface bonding and/or assembly therefor · CPC title
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
by applying a glue or viscous material · CPC title
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