Vaporizer, ion source, ion beam irradiation apparatus, and an operating method for a vaporizer
US-2024186101-A1 · Jun 6, 2024 · US
US9514909B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9514909-B2 |
| Application number | US-201214116242-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 18, 2012 |
| Priority date | May 18, 2011 |
| Publication date | Dec 6, 2016 |
| Grant date | Dec 6, 2016 |
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In this ion generation apparatus, tip end portions of needle electrodes are aligned in an X direction with being oriented in a Z direction, and protrude from a casing. A protective cover covers the tip end portions of the needle electrodes. The protective cover is provided with holes opened to allow tip ends of the needle electrodes to be seen from the Z direction, and an opening opened to allow the needle electrodes to be seen from a Y direction. Therefore, ions generated at the tip end portions of the needle electrodes can be emitted efficiently out of the casing. Further, a user can be prevented from touching the tip end portion of the needle electrode and injuring his or her finger or the like.
Opening claim text (preview).
The invention claimed is: 1. An ion generation apparatus generating ions including a plurality of needle electrodes, comprising: a substrate having said plurality of needle electrodes mounted thereon; a casing accommodating said substrate, said plurality of needle electrodes having tip end portions aligned in an X direction and being oriented in a Z direction, and protruding from said casing; and a protective cover covering the tip end portions of said plurality of needle electrodes, said protective cover being provided with a plurality of first holes opened to allow tip ends of said plurality of needle electrodes to be seen from the Z direction, respectively, and a first opening opened to allow said plurality of needle electrodes to be seen from a Y direction; said protective cover includes a top plate provided to face a lid member of the casing and having said plurality of first holes opened therein, and support members provided between said top plate and said lid member and having said first opening opened therein. 2. The ion generation apparatus according to claim 1 , further comprising a lid member closing said casing so as to cover said substrate, wherein said lid member is provided with a second hole opened at a position corresponding to each needle electrode, and the tip end portion of each needle electrode penetrates through the corresponding second hole and is arranged between said lid member and said top plate. 3. The ion generation apparatus according to claim 2 , wherein said support members support said top plate on both sides of said plurality of needle electrodes as viewed from the Y direction. 4. The ion generation apparatus according to claim 2 , wherein, as viewed from the X direction, said support members have a width smaller than that of said top plate. 5. The ion generation apparatus according to claim 4 , wherein, as viewed from the X direction, said support members support a central portion of said top plate. 6. The ion generation apparatus according to claim 4 , wherein, as viewed from the X direction, said support members support one end portion of said top plate. 7. The ion generation apparatus according to claim 2 , further comprising a rib provided between each two adjacent needle electrodes and connected between said top plate and said lid member. 8. The ion generation apparatus according to claim 7 , wherein said rib is formed in a shape of a flat plate, and provided parallel to a YZ plane. 9. The ion generation apparatus according to claim 7 , wherein said rib is formed in a shape of a column, and extends in the Z direction. 10. The ion generation apparatus according to claim 1 , wherein each two adjacent needle electrodes generate ions having polarities different from each other. 11. Electric equipment, comprising: the ion generation apparatus according to claim 1 ; and a duct blowing air in a predetermined direction, said plurality of needle electrodes of said ion generation apparatus being provided inside said duct. 12. The electric equipment according to claim 11 , wherein said predetermined direction intersects with the X direction. 13. The electric equipment according to claim 11 , wherein said predetermined direction obliquely intersects with the X direction. 14. The electric equipment according to claim 11 , wherein said predetermined direction is identical to the X direction. 15. An ion generation apparatus generating ions including a plurality of needle electrodes, comprising: a substrate having said plurality of needle electrodes mounted thereon; a casing accommodating said substrate, said plurality of needle electrodes shaving tip end portions aligned in an X direction and being oriented in a Z direction, and protruding from said casing; and a protective cover covering the tip end portions of said plurality of needle electrodes, said protective cover being provided with a plurality of first holes opened to allow tip ends of said plurality of needle electrodes to be seen from the Z direction, respectively, and a first opening opened to allow said plurality of needle electrodes to be seen from a Y direction said protective cover includes a top plate provided to face a lid member of the casing and having said plurality of first holes opened therein, and support members provided between said top plate and said lid member and having said first opening and a second opening opened therein, wherein said protective cover is further provided with said second opening opened to allow at least one of said plurality of needle electrodes to be seen from the X direction. 16. The ion generation apparatus according to claim 15 , further comprising a lid member closing said casing so as to cover said substrate, wherein said lid member is provided with a second hole opened at a position corresponding to each needle electrode, and the tip end portion of each needle electrode penetrates through the corresponding second hole and is arranged between said lid member and said top plate. 17. The ion generation apparatus according to claim 16 , wherein said support members support said top plate on both sides of said plurality of needle electrodes as viewed from the Y direction, and support said top plate on both sides of said plurality of needle electrodes as viewed from the X direction.
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