Semiconductor substrate processing system

Patent metadata

Field	Value
Publication number	US-9512520-B2
Application number	US-201213441382-A
Country	US
Kind code	B2
Filing date	Apr 6, 2012
Priority date	Apr 25, 2011
Publication date	Dec 6, 2016
Grant date	Dec 6, 2016

Abstract

Apparatus for processing substrates are provided. In some embodiments, a processing system may include a first transfer chamber and a first process chamber coupled to the transfer chamber, the process chamber further comprising a substrate support to support a processing surface of a substrate within the process chamber, an injector disposed to a first side of the substrate support and having a first flow path to provide a first process gas and a second flow path to provide a second process gas independent of the first process gas, wherein the injector provides the first and second process gases across the processing surface of the substrate, a showerhead disposed above the substrate support to provide the first process gas to the processing surface, and an exhaust port disposed to a second side of the substrate support, opposite the injector, to exhaust the first and second process gases from the process chamber.

First claim

The invention claimed is:

1. A processing system, comprising:
a first transfer chamber capable of transferring a substrate to or receiving a substrate from one or more process chambers coupled to the first transfer chamber; and
a first process chamber to deposit one or more III-V materials coupled to the first transfer chamber, the process chamber further comprising:
a substrate support disposed therein to support a processing surface of a substrate at a desired position within the process chamber;
an injector disposed to a first side of the substrate support and having a first flow path to provide a first process gas and a second flow path to provide a second process gas independent of the first process gas, wherein the injector is positioned to provide the first and second process gases across the processing surface of the substrate;
a Group III element gas source coupled to the injector to provide the first process gas;
a Group V element gas source coupled to the injector to provide the second process gas;
a showerhead disposed above the substrate support to provide the first process gas to the processing surface of the substrate; and
a heated exhaust manifold disposed to a second side of the substrate support, coplanar with and opposite the injector, to exhaust the first and second process gases from the process chamber.

2. The processing system of claim 1 , further comprising:
a second transfer chamber; and
one or more intermediate load lock chambers coupling the second transfer chamber to the first transfer chamber.

3. The processing system of claim 2 , further comprising:
a gas source coupled to the one or more intermediate load lock chambers to expose a substrate to a gas when the substrate is placed within the one or more intermediate load lock chambers.

4. The processing system of claim 2 , wherein the first and second transfer chambers have one or more independently controlled chamber parameters.

5. The processing system of claim 4 , wherein the one or more independently controlled chamber parameters include one or more of pressure, purge gas flow, moisture level, or residual gas level.

6. The processing system of claim 2 , further comprising:
a second process chamber to plasma clean a substrate; and
a third process chamber to deposit a high-k dielectric material, wherein the second and third process chambers are coupled to the second transfer chamber.

7. The processing system of claim 6 , further comprising:
a fourth process chamber to anneal a substrate, wherein the fourth process chamber is coupled to the first transfer chamber.

8. The processing system of claim 7 , further comprising:
a fifth process chamber to deposit one or more III-V materials coupled to the first transfer chamber.

9. The processing system of claim 8 , wherein the first process chamber deposits n-type III-V materials and the fifth process chamber deposits p-type III-V materials.

10. The processing system of claim 1 , wherein the first process chamber further comprises:
a first enclosure surrounding the first process chamber and ventilating to a house exhaust system; and
a second enclosure disposed adjacent to the first enclosure, wherein the first enclosure is selectively opened to the second enclosure via an access port between the first and second enclosure.

11. A processing system, comprising:
a first transfer chamber capable of transferring a substrate to or receiving a substrate from one or more process chambers coupled to the first transfer chamber; and
a first process chamber to deposit one or more III-V materials coupled to the first transfer chamber, the process chamber further comprising:
a substrate support disposed therein to support a processing surface of a substrate at a desired position within the process chamber;
an injector disposed to a first side of the substrate support and having a first flow path to provide a first process gas and a second flow path to provide a second process gas independent of the first process gas, wherein the injector is positioned to provide the first and second process gases across the processing surface of the substrate;
a first gas source coupled to the injector to provide the first process gas, wherein the first process gas comprises a Group III element;
a second gas source coupled to the injector to provide the second process gas, wherein the second process gas comprises a Group V element;
a showerhead disposed above the substrate support to provide the first process gas to the processing surface of the substrate; and
a heated exhaust manifold disposed to a second side of the substrate support, coplanar with and opposite the injector, to exhaust the first and second process gases from the process chamber.

12. The processing system of claim 11 , further comprising:
a second transfer chamber; and
one or more intermediate load lock chambers coupling the second transfer chamber to the first transfer chamber.

13. The processing system of claim 12 , further comprising:
a second process chamber to plasma clean a substrate; and
a third process chamber to deposit a high-k dielectric material, wherein the second and third process chambers are coupled to the second transfer chamber.

14. The processing system of claim 13 , further comprising:
a fourth process chamber to anneal a substrate, wherein the fourth process chamber is coupled to the first transfer chamber.

15. The processing system of claim 14 , wherein the first and second transfer chambers have one or more independently controlled chamber parameters including one or more of pressure, purge gas flow, moisture level, or residual gas level.

16. The processing system of claim 1 , wherein the second flow path is different than the first flow path.

17. The processing system of claim 11 , wherein the second flow path is different than the first flow path.

Assignees

• Sanchez Errol Antonio C
• Carlson David K
• Kuppurao Satheesh
• Applied Materials Inc

Inventors

• Sanchez Errol Antonio C
• Carlson David K
• Kuppurao Satheesh

Classifications

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0461

  characterised by the presence of two or more transfer chambers · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• C23C16/06

  characterised by the deposition of metallic material · CPC title