Magnetic annealing apparatus

Patent metadata

Field	Value
Publication number	US-9508914-B2
Application number	US-201414211619-A
Country	US
Kind code	B2
Filing date	Mar 14, 2014
Priority date	Mar 21, 2013
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

Disclosed is a magnetic annealing apparatus including a carrier conveyance region and a workpiece conveyance region. The carrier conveyance region includes: a first mounting table where a carrier is disposed; second mounting tables where carriers convey workpieces from the carrier conveyance region to the workpiece conveyance region; a storage unit; and a carrier conveyance mechanism that performs carrying-out/carrying-in of the carriers. The workpiece conveyance region includes: an aligner device; a workpiece boat; a workpiece conveyance mechanism that conveys the workpieces from the carriers disposed on the second mounting tables to the workpiece boat via the aligner device; a heating unit; a magnetic field generating unit; and a transfer mechanism that transfers the workpieces held by the workpiece boat into the magnetic field generating unit.

First claim

What is claimed is:

1. A magnetic annealing apparatus comprising:
a carrier conveyance region where one or more carriers that accommodate a group of workpieces to be processed are conveyed;
a workpiece conveyance region where the workpieces are conveyed;
an opening/closing door interposed between the carrier conveyance region and the workpiece conveyance region; and
a control unit,
wherein the carrier conveyance region includes:
a first mounting table on which a carrier…

Assignees

• Tokyo Electron Ltd

Inventors

• Ono Yuji
• Ishii Toru
• Saito Makoto
• Obara Mitsuru
• Takeuchi Yasushi

Classifications

• C21D2281/00

  Chemistry & Metallurgy · mapped topic

• F27D3/0024

  Mechanical Engineering · mapped topic

• F27D11/12

  Mechanical Engineering · mapped topic

• C21D1/04

  Chemistry & Metallurgy · mapped topic

• H01L43/12

  Electricity · mapped topic