Apparatus and method for treating substrate

Patent metadata

Field	Value
Publication number	US-9508541-B2
Application number	US-201414146314-A
Country	US
Kind code	B2
Filing date	Jan 2, 2014
Priority date	Jan 4, 2013
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

Provided is a substrate treatment apparatus. The substrate treatment apparatus includes a load port on which a carrier accommodating a plurality of substrates to which a back-ground wafer is attached to a mounting tape fixed to a frame ring is placed, a plasma treatment unit supplying plasma to treat a top surface of the wafer, and a substrate transfer unit transferring the substrate between the carrier and the plasma treatment unit.

First claim

What is claimed is:

1. A substrate treatment apparatus comprising:
a frame ring having an opening formed in a middle of the frame ring, and including a mounting tape fixedly attached to the frame ring across the opening, wherein a back-ground wafer is placed on the mounting tape;
a load port on which a carrier accommodating a plurality of substrates to which the back-ground wafer is attached is placed;
a plasma treatment unit supplying plasma to treat a top surface of the back-ground wafer; and
a substrate transfer unit transferring a substrate between the load port and the plasma treatment unit,
wherein the plasma treatment unit comprises:
a process chamber having an inner space;
a susceptor disposed within the process chamber to support each of the substrates;
a plasma supply part supplying plasma into the process chamber; and
a blocking member covering the mounting tape to prevent the mounting tape from being exposed to the plasma,

wherein the blocking member comprises:
a blocking ring covering a region between the wafer and the frame ring, the blocking ring non-contacting the mounting tape; and
an elevation member elevating the blocking ring,

wherein the elevation member comprises:
a first rod supporting the blocking ring;
a second rod disposed on a lower portion of the first rod to support the first rod, the second rod having an inner space in which the first rod is elevatable;
a third rod disposed on a lower portion of the second rod to support the second rod, the third rod having an inner space in which the second rod is elevatable; and
a driver individually driving the first and second rods,
wherein a support piece for seating the substrate on the susceptor in a state where the support piece supports the frame ring is disposed on the second rod, and
an accommodation space in which the support piece is vertically movable is defined in an edge of the susceptor.

2. The substrate treatment apparatus of claim 1 , wherein the blocking ring comprises:
a body having a ring shape to face the mounting tape;
an inner portion extending downward from an inside of the body, the inner portion having an end contacting an edge of the back-ground wafer; and
an outer portion extending downward from the outside of the body, the outer portion having an end contacting the frame ring.

3. The substrate treatment apparatus of claim 1 , wherein the blocking ring comprises:
a body having a ring shape to face the mounting tape;
an inner portion extending downward from the inside of the body, the inner portion being spaced a predetermined distance from the top surface of the wafer; and
an outer portion extending downward from the outside of the body, the outer portion having an end contacting the frame ring.

4. The substrate treatment apparatus of claim 2 , wherein the blocking ring has a width that covers a region from the edge of the back-ground wafer to an outer edge of the frame ring.

5. The substrate treatment apparatus of claim 1 , wherein the blocking ring is formed of a ceramic material.

6. The substrate treatment apparatus of claim 1 , wherein the accommodation space is defined inward from an outer surface of the susceptor up to a point at which an edge of the back-ground wafer is disposed.

7. The substrate treatment apparatus of claim 1 , wherein the substrate transfer unit comprises a transfer robot comprising a hand part for grasping a portion of the frame ring in a tong manner, the transfer robot transferring the substrate.

8. The substrate treatment apparatus of claim 7 , wherein the hand part comprises:
a lower hand on which a portion of the frame ring is placed;
an upper hand disposed above the lower hand, the upper hand pressing the frame ring placed on the lower hand to fix the frame ring; and
a driver moving the upper hand so that the upper hand is spread or folded with respect to the lower hand.

9. The substrate treatment apparatus of claim 8 , wherein a front end of the lower hand has an arc shape having the same curvature as the frame ring.

Assignees

• Psk Inc

Inventors

• Lee Jongjin
• Park Bum Joon
• Kim Tae Hoon
• Lee Chang Weon
• Yim Sunwoong
• Lee Han Kyu

Classifications

• H10P72/7422

  used to protect an active side of a device or wafer · CPC title

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/7402

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title