Carbon nanotube neuron device and method for making the same

Patent metadata

Field	Value
Publication number	US-9502674-B2
Application number	US-201514980531-A
Country	US
Kind code	B2
Filing date	Dec 28, 2015
Priority date	Dec 29, 2014
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

A carbon nanotube neuron device and a method of making the same are provided. The carbon nanotube neuron device includes a substrate, an insulating layer formed on the substrate, and a carbon nanotube formed above the insulating layer. The carbon nanotube includes a source region, a drain region, and a channel region between the source region and the drain region. The carbon nanotube neuron device further includes a laminate structure surrounding the channel region. The laminate structure includes a first dielectric layer, a conductive layer, and a second dielectric layer. The carbon nanotube neuron device further includes a source electrode and a drain electrode disposed above the insulating layer and surrounding the source region and the drain region, respectively, and a plurality of gate electrodes spaced apart from each other and disposed above the insulating layer. Each gate electrode surrounds the laminate structure that surrounds the channel region.

First claim

What is claimed is:

1. A carbon nanotube neuron device comprising:
a substrate;
an insulating layer formed on the substrate;
a carbon nanotube formed above the insulating layer, the carbon nanotube including a source region on one end thereof, a drain region on another end thereof, and a channel region between the source region and the drain region, wherein the source region and the drain region are doped to a same conductivity type;
a laminate structure surrounding the channel region, the laminate structure including, from inside to outside, a first dielectric layer, a conductive layer, and a second dielectric layer;
a source electrode and a drain electrode disposed above the insulating layer, and surrounding the source region and the drain region, respectively; and
a plurality of gate electrodes spaced apart from each other and disposed above the insulating layer, each gate electrode surrounding the laminate structure that surrounds the channel region;
wherein the carbon nanotube is disposed above the insulating layer and supported by the source electrode, the drain electrode, or the plurality of gate electrodes.

2. The carbon nanotube neuron device of claim 1 , wherein:
the channel region is of intrinsic type, and the source region and the drain region are both lightly doped n-type, or both lightly doped p-type, or both heavily doped n+ type, or both heavily doped p+ type; or
the channel region is lightly doped n-type, and the source region and the drain region are both heavily doped n+ type, or both lightly doped p-type, or both heavily doped p+ type; or
the channel region is lightly doped p-type, and the source region and the drain region are both heavily doped p+ type, or both lightly doped n-type, or both heavily doped n+ type.

3. The carbon nanotube neuron device of claim 1 , further comprising: disposed between each gate electrode and the insulating layer, from bottom to top, a third dielectric layer, a second conductive layer, and a fourth dielectric layer.

4. The carbon nanotube neuron device of claim 1 , wherein the carbon nanotube has a length ranging from about 50 nm to about 500 nm, and a spacing between adjacent gate electrodes ranges from about 10 nm to about 50 nm.

5. The carbon nanotube neuron device of claim 1 , wherein each of the first dielectric layer and the second dielectric layer has a thickness ranging from about 1 nm to about 3 nm, and the conductive layer has a thickness ranging from about 2 nm to about 10 nm.

6. The carbon nanotube neuron device of claim 1 , wherein the carbon nanotube has a diameter ranging from about 1 nm to about 3 nm.

7. The carbon nanotube neuron device of claim 1 , wherein the first dielectric layer and the second dielectric layer comprises a high-k dielectric material, and the conductive layer comprises polycrystalline silicon or a metal material.

8. A method of forming a carbon nanotube neuron device, the method comprising:
providing a substrate;
forming an insulating layer on the substrate;
forming a carbon nanotube above the insulating layer;
forming a laminate structure surrounding the carbon nanotube, the laminate structure including, from inside to outside, a first dielectric layer, a conductive layer, and a second dielectric layer;
forming a plurality of gate electrodes spaced apart from each other and disposed above the insulating layer, each gate electrode surrounding the laminate structure;
removing a portion of the laminate structure surrounding each end of the carbon nanotube to form a source region and a drain region in each end of the carbon nanotube, respectively;
forming a source electrode surrounding the source region and located above the insulating layer; and
forming a drain electrode surrounding the drain region and located above the insulating layer;
wherein the carbon nanotube is disposed above the insulating layer and supported by the source electrode, the drain electrode, or the plurality of gate electrodes.

9. The method of claim 8 , wherein forming the laminate structure surrounding the carbon nanotube comprises:
forming the first dielectric layer surrounding the carbon nanotube using atomic layer deposition;
forming the conductive layer surrounding the first dielectric layer using low pressure chemical vapor deposition; and
forming the second dielectric layer surrounding the conductive layer using atomic layer deposition.

10. The method of claim 8 , wherein the first dielectric layer and the second dielectric layer comprises a high-k dielectric material, and the conductive layer comprises polycrystalline silicon or a metal material.

11. The method of claim 8 , further comprising: before forming the source electrode and the drain electrode, doping the source region and the drain region to a same conductivity type.

12. The method of claim 8 , wherein forming the carbon nanotube above the insulating layer comprises:
forming a porous silicon layer on the insulating layer;
forming a photoresist layer with an opening on the porous silicon layer;
applying a metal catalyst solution through the opening;
baking the metal catalyst solution to form metal nanoparticles on the porous silicon layer;
removing the photoresist layer;
causing a chemical reaction between the metal nanoparticles and a carbon-based compound to form the carbon nanotube on the porous silicon layer; and
removing a portion of the porous silicon layer to expose a portion of the insulating layer, such that the carbon nanotube is supported by a remaining portion of the porous silicon layer.

13. The method of claim 12 , wherein the porous silicon layer has a thickness ranging from about 2 nm to about 10 nm.

14. The method of claim 12 , wherein removing the portion of the laminate structure surrounding each end of the carbon nanotube includes removing the remaining portion of the porous silicon layer.

15. The method of claim 12 , wherein causing a chemical reaction between the metal nanoparticles and a carbon-based compound to form the carbon nanotube includes adding ammonia to the carbon nanotube being formed to perform n-type doping, or adding borane to the carbon nanotube being formed to perform p-type doping.

16. The method of claim 12 , wherein forming the laminate structure includes: forming a second laminate structure on the exposed portion of the insulating layer and the remaining portion of the porous silicon layer by:
forming a third dielectric layer on the exposed portion of the insulating layer and the remaining portion of the porous silicon layer;
forming a second conductive layer on the third dielectric layer; and
forming a fourth dielectric layer on the second conductive layer.

17. The method of claim 16 , wherein the plurality of gate electrodes spaced apart from each other are formed above the second laminate structure formed on the exposed portion of the insulating layer.

18. The method of claim 8 , wherein forming the source electrode or the drain electrode comprises:
forming a contact surrounding the carbon nanotube in the source region or the drain region using a first metal material by an evaporation and lift-off process, thereby forming the source electrode or the drain electrode, wherein the first metallic material is in contact with the carbon nanotube such that the source region or the drain region of the carbon nanotube is lightly doped n-type or heavily doped n+ type; or
forming a contact surrounding the carbon nanotube in the source region or the drain region using a second metal material by an evaporation and lift-off process, thereby forming the sourc

Assignees

• Semiconductor Mfg Int Shanghai Corp

Inventors

• Xiao Deyuan

Classifications

• H10P14/3462

  Nanowires · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• H10D62/119

  Nanowire, nanosheet or nanotube semiconductor bodies · CPC title

• H01L51/0048

  Electricity · mapped topic

• H01L51/0541

  Electricity · mapped topic