Cam actuated filament clamp

Patent metadata

Field	Value
Publication number	US-9502207-B1
Application number	US-201514835780-A
Country	US
Kind code	B1
Filing date	Aug 26, 2015
Priority date	Aug 26, 2015
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

An ion source filament clamp has a clamp member having first and second ends. The first end has one of a cam surface and a cam follower, and has first and second portions that are opposed to one another and separated by a slot having a lead opening defined therein to receive a lead of an ion source filament. An actuator pin extends along an actuator pin axis and has first and second sections. The first section is coupled to the first portion of the clamp member. The actuator pin extends through, and is in sliding engagement with, a thru-hole in the second portion of the clamp member. A cam member is operably coupled to the second section of the actuator pin. The cam member has a handle and the other of the cam surface and cam follower and is configured to rotate between a clamped position and an unclamped position. The cam follower slidingly contacts the cam surface. In the clamped position, the cam follower engages the cam surface in a first predetermined manner, thus selectively compressing the first and second portions of the clamp member toward one another and exerting a clamping pressure on the lead within the lead opening while inducing a spring tension between the first and second portions of the clamp member. In the unclamped position, the cam follower engages the cam surface in a second predetermined manner, wherein the spring tension extends the first and second portions of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.

First claim

The invention claimed is:

1. An ion source filament clamp, comprising:
a clamp member having a first end and a second end, wherein the first end comprises one of a cam surface and a cam follower, and wherein the clamp member comprises first and second portions associated with the first end thereof that are opposed to one another and separated by a slot, wherein a lead opening is further defined in the slot and configured to receive a lead of an ion source filament;
an actuator pin extending along an actuator pin axis, wherein a first section of the actuator pin is coupled to the first portion of the clamp member, and wherein the actuator pin extends through a thru-hole in the second portion of the clamp member and is in sliding engagement with the thru-hole; and
a cam member operably coupled to a second section of the actuator pin, wherein the cam member comprises a handle and the other of the cam surface and cam follower, wherein the cam member is configured to rotate between a clamped position and an unclamped position, wherein the cam follower is configured to slidingly contact the cam surface, and wherein in the clamped position, the cam follower is configured to engage the cam surface in a first predetermined manner, and wherein in the unclamped position, the cam follower is configured to engage the cam surface in a second predetermined manner, wherein in the clamped position, the first and second portions of the clamp member are forced toward one another, therein exerting a clamping pressure on the lead within the lead opening, and wherein in the unclamped position, the first and second portions of the clamp member are forced apart from one another, therein releasing the clamping pressure on the lead within the lead opening, wherein one of the first predetermined manner and second predetermined manner comprises inducing a spring tension between the first and second portions of the clamp member, and wherein the other of the first predetermined manner and second predetermined manner comprises releasing the spring tension between the first and second portions of the clamp member.

2. The ion source filament clamp of claim 1 , wherein the actuator pin comprises a connection hole extending radially through the second section of the actuator pin, and wherein the cam member is operably coupled to the actuator pin along a connection axis via a connection pin extending through the connection hole.

3. The ion source filament clamp of claim 2 , wherein the cam member is rotationally coupled to the actuator pin via the connection pin, and wherein the first predetermined manner in which the cam follower engages the cam surface is a rotational sliding engagement about the connection axis.

4. The ion source filament clamp of claim 3 , wherein the cam member comprises the cam surface and the first end of the clamp member defines the cam follower.

5. The ion source filament clamp of claim 4 , wherein the cam surface is defined by a radiused portion of the cam member opposite the handle.

6. The ion source filament clamp of claim 5 , wherein the radiused portion of the cam member is radiused about the connection axis.

7. The ion source filament clamp of claim 2 , wherein the cam member is fixedly coupled to the actuator pin via the connection pin, and wherein the first predetermined manner in which the cam follower engages the cam surface is a rotational sliding engagement about the actuator pin axis.

8. The ion source filament clamp of claim 7 , wherein the cam member comprises the cam follower and the first end of the clamp member defines the cam surface.

9. The ion source filament clamp of claim 8 , wherein the cam surface comprises a wedge defined on the first end of the clamp member, wherein the first predetermined manner in which the cam follower engages the cam surface is a rotational sliding engagement of the cam follower along an angled portion of the wedge upon rotation of the cam member about the actuator pin axis.

10. The ion source filament clamp of claim 2 , wherein the cam member is fixedly coupled to the actuator pin via the connection pin, and wherein the cam follower is defined by a follower pin extending radially from the actuator pin, and wherein the cam surface is defined by a cam slot defined in a sidewall of the first end of the clamp member, wherein the first predetermined manner in which the cam follower engages the cam surface is a sliding engagement between the cam follower and cam slot upon rotation of the actuator pin about the actuator pin axis.

11. The ion source filament clamp of claim 2 , wherein the second end of the clamp member comprises a mounting region configured to mount to an ion source chamber.

12. The ion source filament clamp of claim 2 , wherein the clamp member comprises a heat treated metal configured to provide a predetermined spring constant.

13. An ion source filament clamp, comprising:
a clamp member having a first end and a second end, wherein the first end comprises one of a cam surface and a cam follower, and wherein the first end has first and second portions that are opposed to one another and separated by a slot, wherein a lead opening is further defined in the slot and configured to receive a lead of an ion source filament;
an actuator pin extending along an actuator pin axis, wherein a first section of the actuator pin is coupled to the first portion of the clamp member, and wherein the actuator pin extends through a thru-hole in the second portion of the clamp member and is in sliding engagement with the thru-hole; and
a cam member operably coupled to a second section of the actuator pin, wherein the cam member comprises a handle and the other of the cam surface and cam follower, wherein the cam member is configured to rotate between a clamped position and an unclamped position, wherein the cam follower is configured to slidingly contact the cam surface, and wherein in the clamped position, the cam follower engages the cam surface in a first predetermined manner, and wherein in the unclamped position, the cam follower engages the cam surface in a second predetermined manner, wherein one of the first predetermined manner and second predetermined manner compresses the first and second portions of the clamp member toward one another and exerts a clamping pressure on the lead within the lead opening while inducing a spring tension between the first and second portions of the clamp, and wherein the spring tension extends the first and second portions of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.

14. The ion source filament clamp of claim 13 , wherein the actuator pin comprises a connection hole extending radially through the second section of the actuator pin, and wherein the cam member is operably coupled to the actuator pin along a connection axis via a connection pin extending through the connection hole.

15. The ion source filament clamp of claim 14 , wherein the cam member is rotationally coupled to the actuator pin via the connection pin, and wherein the first predetermined manner in which the cam follower engages the cam surface is a rotational sliding engagement about the connection axis.

16. The ion source filament clamp of claim 15 , wherein the cam member comprises the cam surface and the first end of the clamp member defines the cam follower.

17. The ion source filament clamp of claim 16 , wherein the cam surface is defined by a radiused portion of the cam member opposite the handle.

18. The ion source filament clamp of claim 14 , wherein the cam

Assignees

• Axcelis Tech Inc

Inventors

• Baggett John F
• Beringer Jason R

Classifications

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title

• H01J2237/31701

  Ion implantation · CPC title

• H01J2237/061

  Construction · CPC title

• H01J3/04

  Ion guns · CPC title