Lithographic projection objective

Patent metadata

Field	Value
Publication number	US-9494868-B2
Application number	US-201314074312-A
Country	US
Kind code	B2
Filing date	Nov 7, 2013
Priority date	Jul 3, 2006
Publication date	Nov 15, 2016
Grant date	Nov 15, 2016

Abstract

Projection objectives, such as projection objectives of lithography projection exposure apparatuses, as well as related systems, components and methods, such as methods of revising and/or repairing such objectives, are disclosed.

First claim

What is claimed is:

1. A method, comprising:
providing a projection objective of a lithography projection exposure apparatus, the projection objective comprising a plurality of optical elements between an object plane of the projection objective and an image plane of the projection objective, the plurality of optical elements comprising a first optical element having a refractive power, the first optical element being disposed in the projection objective at a first location;
removing the first optical element from the projection objective;
inserting a first spare optical element into the projection objective at the first location to compensate for degradation of one or more optical elements in the projection objective;
after inserting the first spare optical element into the projection objective, adjusting an image quality of the projection objective to a desired image quality by a process which comprises:
selecting a second optical element from the plurality of optical elements, the second optical element being disposed in the projection objective at a second location different from the first location;
removing the second optical element from the projection objective; and
inserting a second spare optical element into the projection objective at the second location,

wherein a surface of the second spare optical element comprises an aspherical shape or a non-rotationally symmetric shape configured to adjust the image quality of the projection objective to the desired image quality of the projection objective.

2. The method of claim 1 , wherein the surface of the second spare optical element comprises an aspherical shape.

3. The method of claim 1 , wherein the surface of the second spare optical element comprises a non-rotationally symmetric shape.

4. The method of claim 1 , further comprising, prior to inserting the second spare optical element into the projection objective, working the second spare optical element, wherein working the second spare optical component comprises providing the surface of the second spare optical element with its shape.

5. The method of claim 4 , wherein working the second spare optical element comprises altering a material thickness of the second spare optical element.

6. The method of claim 1 , further comprising, prior to adjusting the image quality of the projection objective, measuring the image quality of the projection objective.

7. The method of claim 1 , wherein adjusting the image quality of the projection objective further comprises moving at least one optical element of the plurality of optical elements.

8. The method of claim 1 , wherein adjusting the image quality of the projection objective further comprises deforming at least one optical element of the plurality of optical elements.

9. The method of claim 1 , wherein at least one optical element of the plurality of optical elements is a refractive optical element, and adjusting the image quality of the protection objective further comprises changing an index distribution of the at least one optical element.

10. The method of claim 1 , wherein adjusting the image quality further comprises adjusting a parameter selected from the group consisting of a position of at least one of the plurality of optical elements and a shape of at least one of the plurality of optical elements.

11. The method of claim 1 , wherein the method is performed without exchanging all of the optical elements of the projection objective.

12. The method of claim 1 , further comprising working the first spare optical element before inserting the first spare optical element into the projection objective.

13. The method of claim 12 , wherein working the first spare optical element comprises machining the first spare optical element.

14. The method of claim 12 , wherein working the first spare optical element comprises providing a surface of the first spare optical element with an aspherical shape or a non-rotationally symmetric shape.

15. The method of claim 1 , wherein the first spare optical element is essentially identical to an original state of the first optical element.

16. The method of claim 1 , wherein the projection objective is an immersion projection objective.

17. The method of claim 1 , wherein the projection objective is a double immersion type projection objective.

18. The method of claim 1 , wherein the first optical element comprises a material selected from the group consisting of BaF 2 , LiF, BaLiF 3 , LUAG and Spinel.

19. The method of claim 1 , wherein a design of the second spare optical element depends on a difference between the image quality of the projection objective and the desired image quality of the projection objective.

20. The method of claim 1 , further comprising:
after inserting the first spare optical element and before inserting the second spare optical element, measuring the image quality of the projection objective in the field; and
after measuring the image quality of the projection objective, inserting the second spare optical element into the projection objective.

21. The method of claim 20 , further comprising, after measuring the image quality of the projection objective, calculating a correction profile for the second spare optical element depending on the measured imaged quality.

22. The method of claim 21 , wherein the second spare optical element is worked based on the calculated correction profile.

23. The method of claim 1 , wherein the second spare optical element is worked based on the desired image quality, and the desired image quality is based on a simulation of the optical effect of the first spare optical element.

24. The method of claim 23 , further comprising, after working the second spare optical element, inserting the first and second spare optical elements into the projection objective.

25. The method of claim 1 , wherein the second optical element comprises a material selected from the group consisting of BaF 2 , LiF, BaLiF 3 , LuAG or Spinel.

26. The method of claim 1 , wherein:
the projection objective has an initial image quality;
the projection objective has a second image quality after at least one of the optical elements degrades, the second image quality being different from the initial image quality;
the projection objective has a third image quality after the first and second spare optical elements are inserted therein; and
the third image quality is at least approximately the same as the initial image quality.

27. The method of claim 1 , wherein:
the projection objective has an initial image quality;
the projection objective has a second image quality after at least one of the optical elements degrades, the second image quality being different from the initial image quality;
the projection objective has a third image quality after the first and second spare optical elements are inserted therein; and
the third image quality is altered relative to the initial image quality.

28. The method of claim 27 , wherein altering the image quality of the projection objective comprises increasing a specific image defect according to an operational parameter of the projection objective and/or decreasing at least one specific image defect according to an operational parameter of the projection objective.

29. The method of claim 28 , wherein the operational parameter comprises a parameter selected fro

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Rogalsky Olaf
• Bittner Boris
• Petasch Thomas
• Haeussler Jochen

Classifications

• G03F7/70975

  Assembly, maintenance, transport or storage of apparatus · CPC title

• G03F7/70258 Primary

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title

• G03F7/70191 Primary

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title