Cleaning an object within a non-vacuumed environment

Patent metadata

Field	Value
Publication number	US-9488924-B2
Application number	US-201414149677-A
Country	US
Kind code	B2
Filing date	Jan 7, 2014
Priority date	Jan 7, 2014
Publication date	Nov 8, 2016
Grant date	Nov 8, 2016

Abstract

A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.

First claim

What is claimed is:

1. A system, comprising:
a structural support element arranged to support at least a part of an optical bench comprising an optical evaluation module;
a mechanical stage configured to support an object being evaluated by the optical evaluation module and configured to move the object along a predetermined path in relation to the optical evaluation module; and
a gas flow module positioned below the optical bench in a fixed relationship with the structural support and positioned between the structural support and the mechanical stage, the gas flow module including an aperture through which the optical module can illuminate the object and a plurality of gas flow openings surrounding the aperture and defining a coverage area that is larger than the object, wherein the gas flow module is configured to direct clean gas in the coverage area towards the object while the object is illuminated by the optical module;
wherein the mechanical stage is further configured to move the object along a predetermined path in relation to the aperture and wherein the coverage area is positioned directly above at least a majority of the object at all times regardless of where the object is positioned along the predetermined path.

2. The system according to claim 1 wherein the coverage area is positioned directly above at least seventy percent of the object when the object is positioned anywhere along the predetermined path.

3. The system according to claim 1 wherein the coverage area is positioned directly above at least eighty percent of the object when the object is positioned anywhere along the predetermined path.

4. The system according to claim 1 wherein the gas flow module comprises at least one gas inlet for receiving either gas or clean gas.

5. The system according to claim 1 further comprising:
a gas inlet for receiving gas;
a gas conduit that extends between the gas inlet and the gas flow module;
a pump spaced apart from the gas flow module and configured to direct the gas from the gas inlet and through the conduit towards the gas flow module; and
a filter positioned within the conduit or within the gas flow module and configured to filter the gas to provide a clean gas.

6. The system according to claim 5 wherein the gas inlet is positioned above an optical element of the optical module.

7. The system according to claim 5 wherein a distance between the pump and the gas flow module is smaller than a distance between the gas inlet and the pump.

8. The system according to claim 1 wherein the gas flow module is arranged to direct gas flows towards contaminating elements positioned at a vicinity of the object and thereby reject contaminants from reaching the object.

9. The system according to claim 1 wherein the mechanical stage is arranged to move the object at a fixed velocity in the range of 0.1-2 meters per second.

10. The system according to claim 1 wherein the gas flow module is arranged to direct the clean gas in a velocity in the range of 0.1-0.5 meters per second.

11. The system according to claim 1 wherein a distance between the optical module and the object is in the range of 10-50 millimeters.

12. The system according to claim 1 wherein:
the structural support supports at least first and second optical modules;
the gas module includes first and second apertures aligned with the first and second optical modules, respectively, with gas flow holes surrounding each of the first and second apertures; and
the mechanical stage is configured to move the object along a predetermined path that results in the object passing under each of the first and second apertures.

13. The system according to claim 1 wherein the aperture has a diameter that is smaller than a diameter of the object being evaluated.

14. The system according to claim 13 wherein the plurality of gas flow openings completely surround the aperture.

15. The system according to claim 1 wherein the gas flow module includes a single main body that includes the plurality of gas flow openings.

16. The system according to claim 15 wherein the plurality of gas flow openings includes a first plurality of gas flow openings that are directly above the object being evaluated, and a second plurality of gas flow openings that are positioned around the object being evaluated; wherein the first and second plurality of gas flow openings lie in the same plane.

17. A system, comprising:
an optical bench comprising optics arranged to direct electromagnetic radiation of nanometric wavelength towards an object;
a structural support member that supports the optics;
a mechanical stage configured to support the object while electromagnetic radiation is directed towards the object by the optics; and configured to move the object along a predetermined path in relation to the optical evaluation module; and
a gas flow module positioned below the optical bench in a fixed relationship with the structural support member below the optics and below the object, the gas flow module including an aperture through which the electromagnetic radiation from the optics can irradiate the object and a plurality of gas flow openings surrounding the aperture to define a coverage area that is larger than the object, the gas flow module being arranged to direct clean gas through the plurality of gas flow openings towards at least one out of the object and a vicinity of the object.

18. The system according to claim 17 wherein:
the structural support supports optics for at least first and second optical modules;
the gas module includes first and second apertures aligned with the first and second optical modules, respectively, with gas flow holes surrounding each of the first and second apertures; and
the mechanical stage is configured to move the object along a predetermined path that results in the object passing under each of the first and second apertures.

19. A method for directing clean gas towards an object, the method comprising:
moving an object by a mechanical stage and along a predetermined path in relation to an optical module included within an optical bench during an illumination of the object by the optical module; and
while supporting the at least a part of the optical module by a structural support element, directing by a gas flow module, attached in a fixed relationship to the structural support below the optical bench, clean gas towards the object through one or more gas flow module openings that define a coverage area larger than the object and positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.

20. The Method according to claim 19 wherein the coverage area is positioned directly above at least seventy percent of the object when the object is positioned anywhere along the predetermined path.

21. The Method according to claim 19 wherein the coverage area is positioned directly above at least eighty percent of the object when the object is positioned anywhere along the predetermined path.

22. The method according to claim 19 wherein the moving an object by a mechanical stage comprises moving the mechanical stage at a fixed velocity in the range of 0.1-2 meters per second.

23. The method according to claim 19 wherein said directing comprises directing by a gas flow module direct clean gas in a velocity in the range of 0.1-0.5meters per second, towards the object through one or more gas flow module openings that

Assignees

• Applied Materials Israel Ltd
• Applied Materials Israel Ltd

Inventors

• Abramson Mariano
• Mazaki Hadar
• Admoni Erez
• Avneri Israel

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• G03F7/70916 Primary

  Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps · CPC title

• H01L21/67028

  Electricity · mapped topic

• H01L21/6776

  Electricity · mapped topic