Crystalline multiple-nanosheet III-V channel FETs

Patent metadata

Field	Value
Publication number	US-9484423-B2
Application number	US-201414270690-A
Country	US
Kind code	B2
Filing date	May 6, 2014
Priority date	Nov 1, 2013
Publication date	Nov 1, 2016
Grant date	Nov 1, 2016

Abstract

A field effect transistor includes a body layer comprising a crystalline semiconductor channel region therein, and a gate stack on the channel region. The gate stack includes a crystalline semiconductor gate layer, and a crystalline semiconductor gate dielectric layer between the gate layer and the channel region. Related devices and fabrication methods are also discussed.

First claim

That which is claimed:

1. A field effect transistor, comprising:
a body layer comprising a crystalline semiconductor channel region therein; and
a gate stack on the channel region, the gate stack comprising a crystalline semiconductor gate layer and a crystalline semiconductor gate dielectric layer between the crystalline semiconductor gate layer and the crystalline semiconductor channel region,
wherein respective crystal structures of the crystalline semiconductor gate dielectric layer and the crystalline semiconductor channel region are lattice-matched, and wherein the crystalline semiconductor gate dielectric layer is not configured to supply free charge carriers to the crystalline semiconductor channel region.

2. The transistor of claim 1 , wherein the gate dielectric layer comprises a high-k crystalline semiconductor layer directly on the channel region.

3. The transistor of claim 2 , wherein the channel region, the gate dielectric layer, and the gate layer comprise respective heteroepitaxial semiconductor layers.

4. The transistor of claim 2 , wherein the channel region has a thickness of less than about 10 nanometers, and wherein the channel region is separated from the gate layer by less than about 3 nanometers.

5. The transistor of claim 4 , wherein the gate layer comprises respective crystalline semiconductor gate layers on opposing surfaces of the channel region, and wherein the gate dielectric layer comprises respective gate dielectric layers between the respective gate layers and the opposing surfaces of the channel region.

6. The transistor of claim 5 , wherein the respective gate layers on the opposing surfaces of the channel region comprise primary gate layers, and further comprising:
a secondary gate layer on sidewalls of the channel region between the opposing surfaces thereof,
wherein the secondary gate layer comprises a metal or doped polycrystalline material.

7. The transistor of claim 6 , wherein a structure comprising the gate stack and the body layer is repeatedly stacked to define a plurality of individually-gated channel regions.

8. The transistor of claim 7 , wherein the plurality of individually-gated channel regions define a fin protruding from a substrate, and wherein the secondary gate layer extends on opposing sidewalls of the fin and on a surface therebetween.

9. The transistor of claim 6 , further comprising:
amorphous insulating layers separating the sidewalls of the channel region from the secondary gate layer.

10. The transistor of claim 1 , further comprising:
source/drain regions on opposite ends of the channel region and adjacent the gate stack thereon; and
amorphous insulating layers in recessed regions of opposing sidewalls of the gate layer and separating the opposing sidewalls of the gate layer from the source/drain regions.

11. The transistor of claim 1 , wherein an interface between the channel region and the gate stack is free of low-k crystalline buffer layers.

12. The transistor of claim 1 , wherein an interface between the channel region and the gate stack is free of amorphous materials.

13. The transistor of claim 1 , wherein the channel region, the gate dielectric layer, and/or the gate layer comprise III-V or II-VI semiconductor materials.

14. The transistor of claim 13 , wherein the gate dielectric layer comprises a wide bandgap II-VI semiconductor material, and wherein the gate layer comprises a moderate bandgap III-V semiconductor material.

15. The transistor of claim 13 , wherein the channel region comprises indium arsenide (InAs), the gate dielectric layer comprises zinc telluride (ZnTe), and the gate layer comprises aluminum antimonide (AlSb).

16. The transistor of claim 13 , wherein the gate layer comprises gallium antimonide (GaSb), the gate dielectric layer comprises zinc telluride (ZnTe), and the channel region comprises indium antimonide (InSb).

17. A field effect transistor, comprising:
a nanosheet stack comprising a plurality of individually gated conduction channels, the individually gated conduction channels respectively comprising a crystalline semiconductor channel region, a crystalline semiconductor gate dielectric layer on the crystalline semiconductor channel region, and a crystalline semiconductor gate layer on the crystalline semiconductor gate dielectric layer opposite the crystalline semiconductor channel region,
wherein a portion of the crystalline semiconductor gate dielectric layer that extends from a source region to a drain region on opposite sides of the crystalline semiconductor channel region is not configured to supply free charge carriers to the crystalline semiconductor channel region, and
wherein the crystalline semiconductor channel region, the crystalline semiconductor gate dielectric layer, and the crystalline semiconductor gate layer comprise lattice-matched heteroepitaxial layers.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Obradovic Borna J
• Kittl Jorge A
• Rodder Mark S

Classifications

• H10D30/611

  having multiple independently-addressable gate electrodes influencing the same channel (FinFETs having multiple distinct gate electrodes H10D30/6215; multi-gate TFT H10D30/6733) · CPC title

• H10D30/62 Primary

  Fin field-effect transistors [FinFET] · CPC title

• H10D30/6757

  characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile (TFTs having channel structures for preventing kink or snapback effects H10D30/6708; TFTs having lightly-doped source or drain extensions H10D30/6715) · CPC title

• H10D30/675

  Group III-V materials, Group II-VI materials, Group IV-VI materials, selenium or tellurium · CPC title

• H10D30/6735 Primary

  having gates fully surrounding the channels, e.g. gate-all-around · CPC title