Capacitive acceleration sensor with an H-shaped beam and preparation method thereof

Patent metadata

Field	Value
Publication number	US-9476906-B2
Application number	US-201214387404-A
Country	US
Kind code	B2
Filing date	Dec 3, 2012
Priority date	Oct 26, 2012
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

A capacitive acceleration sensor with an “H”-shaped beam and a preparation method. The sensor at least includes: a first electrode structural layer, a middle structural layer and a second electrode structural layer; the first electrode structural layer and the second electrode structural layer are provided with electrode lead via holes, respectively; the middle structural layer includes: a frame formed at SOI silicon substrate having a double device layer, a seismic mass whose double sides are symmetrical, and an “H”-shaped elastic beam whose double sides are symmetrical, with one end connected to the frame and the other end connected to the seismic mass, there are anti-overloading bumps and damping grooves symmetrically provided on the two sides of the seismic mass, and the “H”-shaped elastic beam and a bulk silicon layer of the oxygen containing silicon substrate satisfy the requirements therebetween:

√{square root over (2)}( a+b+c )< h,

√{square root over (2)} d<h.

First claim

What is claimed is:

1. A method for preparing a capacitive acceleration sensor with an “H”-shaped beam, wherein said method for preparing the capacitive acceleration sensor of the “H”-shaped beam at least including:
1) performing etching at two surfaces of an SOI silicon substrate having a double device layer based on an anisotropic etching method, causing the two surfaces to be concave respectively;
2) forming a plurality of anti-overloading bumps at recesses on the two surfaces based on photolithography and the anisotropic etching method, respectively;
3) further forming damping grooves at the two surfaces of the structure where the anti-overloading bumps have been formed based on photolithography and the anisotropic etching method, respectively;
4) performing etching on the two surfaces of the structure where the damping grooves have been formed based on photolithography and dry etching, and etching self-stops at a buried oxide layer, respectively, whereby on the two surfaces is formed a structure where the frame and the seismic mass are connected to the “H”-shaped elastic beam, respectively, and the anti-overloading bumps and the damping grooves are caused to be located on the corresponding seismic mass, the “H”-shaped elastic beam and the bulk silicon layer of the oxygen containing silicon substrate satisfy the requirements therebetween:
√{square root over (2)}( a+b+c )< h,

√{square root over (2)} d<h;

a and c are width of the “H”-shaped elastic beam, respectively, b is a gap between the two beams, d is a connection width of the joint between the beams and the seismic mass, and his the thickness of the bulk silicon layer;
5) releasing the “H”-shaped elastic beam and the seismic mass based on photolithography, dry etching and the anisotropic etching method;
6) simultaneously bonding the first electrode structural layer, the structure comprising the released “H”-shaped elastic beam and the seismic mass and the second electrode structural layer based on a bonding process;
7) forming electrode lead via holes at the first electrode structural layer and the second electrode structural layer of the bonded structure based on infrared aligning;
8) preparing electrodes on the structure on which via holes have been formed.

2. The method for preparing a capacitive acceleration sensor with an “H”-shaped beam as in claim 1 , wherein the dry etching is inductive coupling plasma etching or deep reactive ion etching.

3. The method for preparing a capacitive acceleration sensor with an “H”-shaped beam as in claim 1 , wherein the photolithography is performed along <110> crystal orientation.

4. The method for preparing a capacitive acceleration sensor with an “H”-shaped beam as in claim 1 , wherein the depth of the recess formed in step 1) does not exceed 3 μm.

5. The method for preparing a capacitive acceleration sensor with an “H”-shaped beam as in claim 1 , wherein the height of the anti-overloading bumps does not exceed 1 μm.

6. The method for preparing a capacitive acceleration sensor with an “H”-shaped beam as in claim 1 , wherein there are “H”-shaped elastic beams connected at the four sides of the seismic mass.

7. A capacitive acceleration sensor with an “H”-shaped beam, wherein said capacitive acceleration sensor of the “H”-shaped beam at least including:
a first electrode structural layer, a middle structural layer and a second electrode structural layer;
therein the first electrode structural layer and the second electrode structural layer are provided with electrode lead via holes, respectively;
the middle structural layer includes: a frame formed based on an SOI silicon substrate having a double device layer, a seismic mass whose double sides are symmetrical, and an “H”-shaped elastic beam whose double sides are symmetrical, with one end connected to the frame and the other end connected to the seismic mass, therein there are anti-overloading bumps and damping grooves symmetrically provided on the two sides of the seismic mass, and the “H”-shaped elastic beam and a bulk silicon layer of the oxygen containing silicon substrate satisfy the requirements therebetween:
√{square root over (2)}( a+b+c )< h,

√{square root over (2)} d<h;

a and c are width of the “H”-shaped elastic beam, respectively, b is a gap between the two beams, d is a connection width of a joint between the beam and the mass block, and h is the thickness of the bulk silicon layer.

8. The capacitive acceleration sensor with an “H”-shaped beam as in claim 7 , wherein there are “H”-shaped elastic beams connected at all four sides of the seismic mass.

Assignees

• Shanghai Inst Microsystem & Information Tech Cas

Inventors

• Che Lufeng
• Zhou Xiaofeng
• Xiong Bin
• Wang Yuelin

Classifications

• G01P15/0802

  Details · CPC title

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• B32B2457/16

  Capacitors · CPC title

• B32B2310/14

  Corona, ionisation, electrical discharge, plasma treatment · CPC title

• B32B2307/202

  Conductive · CPC title