Temperature controlled showerhead

Patent metadata

Field	Value
Publication number	US-9476120-B2
Application number	US-201414169325-A
Country	US
Kind code	B2
Filing date	Jan 31, 2014
Priority date	Oct 16, 2007
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.

First claim

What is claimed is:

1. A temperature controlled, chandelier-type showerhead for chemical vapor deposition (CVD), the showerhead comprising:
(a) a stem comprising a convective cooling fluid passageway and configured for attachment to a chamber;
(b) a back plate thermally coupled to the stem; and
(c) a face plate thermally coupled to the back plate, wherein the convective cooling fluid passageway is configured such that the temperature of cooling fluid exiting the convective cooling fluid passageway is the same as the temperature of the stem.

2. The showerhead of claim 1 , further comprising a temperature sensor configured to measure the temperature of the cooling fluid exiting the convective cooling fluid passageway.

3. The showerhead of claim 2 , wherein the temperature sensor is a thermocouple.

4. The showerhead of claim 1 , wherein an external surface of the back plate comprises a coating to increase emissivity.

5. The showerhead of claim 4 , wherein the coating is anodized aluminum.

6. The showerhead of claim 1 , further comprising a heater physically attached to the back plate.

7. The showerhead of claim 1 , wherein the convective cooling fluid passageway is configured to flow one or more fluids selected from the group consisting of: clean dry air (CDA), argon, helium, nitrogen, hydrogen, and combinations thereof.

8. The showerhead of claim 7 , wherein an inlet opening to the convective cooling fluid passageway in the stem is fluidly connected to a facilities CDA source at a pressure of about 50 psi to 100 psi.

9. The showerhead of claim 1 , wherein the face plate is removably attached to the back plate.

10. The showerhead of claim 1 , wherein the stem has a diameter of between about 1.5 inches to 2.5 inches.

11. The showerhead of claim 1 , wherein the face plate and the back plate each have a thickness of about 0.25 inches to 0.5 inches.

12. The showerhead of claim 1 , wherein the face plate and the back plate are offset from one another by a gap of about 0.5 inches to 1 inch in an interior portion of the showerhead.

13. The showerhead of claim 1 , wherein the face plate has a diameter of about 13 inches.

14. A temperature control system for controlling showerhead temperatures in a CVD chamber, the system comprising:
(a) a CVD chamber comprising a plurality of chandelier-type, temperature-controlled showerheads, each showerhead comprising;
i. a stem comprising a convective cooling fluid passageway, wherein each stem is attached to the CVD chamber,
ii. a back plate thermally coupled to the stem, and
iii. a face plate thermally coupled to the back plate;

(b) a cooling system fluidly coupled to the convective cooling fluid passageways, the cooling system comprising:
i. inlets and outlets to the convective cooling fluid passageways,
ii. a liquid-cooled heat exchanger configured to remove heat from a convective cooling fluid flowed serially through the convective cooling fluid passageways of the showerheads and cooled by the heat exchanger in between each serial pair of the showerheads,
iii. flow modulators to control the flow rate of the convective cooling fluid to each showerhead, and
iv. temperature sensors thermally coupled to the outlets of the convective cooling passageways; and

(c) a controller coupled to the flow modulators and the temperature sensors for determining and controlling the temperatures of the face plates of the showerheads.

15. The system of claim 14 , wherein the CVD chamber further comprises a heater attached to the back plate and communicatively coupled with the controller.

16. The system of claim 14 , wherein the temperature sensors are mounted outside of a plasma RF interference zone.

17. The system of claim 14 , wherein the convective cooling fluid is discharged from the cooling system at ambient pressure.

18. The system of claim 14 , wherein the convective cooling fluid includes one or more gases selected from the group consisting of: clean dry air (CDA), argon, helium, nitrogen, hydrogen, and combinations thereof.

19. The system of claim 14 , wherein the CVD chamber further comprises a chamber top with an inside surface coated with a high-emissivity material.

20. The system of claim 14 , wherein the liquid cooled heat exchanger comprises a cast metal block having embedded therein a cooling liquid line and a plurality of convective cooling fluid lines.

Assignees

• Novellus Systems Inc

Inventors

• Meinhold Henner
• Doble Dan M
• Lau Stephen
• Wilson Vince
• Srinivasan Easwar

Classifications

• C23C16/4557

  Heated nozzles · CPC title

• C23C16/5096

  Flat-bed apparatus · CPC title

• C23C16/45565 Primary

  Shower nozzles · CPC title

• H01J37/3244

  Gas supply means · CPC title

• C23C16/45572 Primary

  Cooled nozzles · CPC title