Method for reproducing template and reproducing apparatus

Patent metadata

Field	Value
Publication number	US-9475213-B2
Application number	US-201213606199-A
Country	US
Kind code	B2
Filing date	Sep 7, 2012
Priority date	Sep 22, 2011
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

An aspect of the present disclosure, there is provided a method for reproducing a template. The template includes a transfer surface and a release layer. The transfer surface has a concavoconvex pattern. The release layer includes an inorganic functional group and an organic functional group, both being bonded to the transfer surface. The method for reproducing the template includes the following two steps: removing the organic functional group by oxidizing and decomposing the organic functional group included in the release layer; and removing the inorganic functional group; and forming the release layer by coupling a silane coupling agent with the transfer surface.

First claim

What is claimed is:

1. A method for reproducing a template, comprising:
forming a release layer on a transfer surface of the template, the release layer including Si—O bondings and an organic functional group, both being bonded to the transfer surface, the transfer surface having a concavoconvex pattern to be transferred;
oxidizing and decomposing the organic functional group included in the release layer to remove the organic functional group and to expose the Si—O bondings;
removing the Si—O bondings by a chemical solution including at least one selected from of ammonia, choline, sodium hydrate and hydrogen fluoride; and
forming the release layer by coupling a silane coupling agent with the transfer surface.

2. The method of claim 1 , wherein
etching is conducted by 0.15 nm or more in the removing of the Si—O bondings.

3. The method of claim 1 , wherein
the oxidizing and decomposing is conducted by treating with ultraviolet irradiation, plasma irradiation, or ozone treatment.

4. The method of claim 1 , wherein
the release layer contains an inorganic functional group containing silicon atoms of the silane coupling agent, the silicon atoms being covalently bound with the transfer surface via oxygen atoms, and an organic functional group being adjacent to the silicon atoms.

5. The method of claim 1 , wherein
the organic functional group contains an alkyl group or a fluoro group.

Assignees

• Kobayashi Masako
• Hirabayashi Hideaki
• Toshiba Kk

Inventors

• Kobayashi Masako
• Hirabayashi Hideaki

Classifications

• B29C33/58 Primary

  Applying the releasing agents · CPC title

• B29C33/3842 Primary

  Manufacturing moulds, e.g. shaping the mould surface by machining · CPC title