Integrated circuit package

Patent metadata

Field	Value
Publication number	US-9472515-B2
Application number	US-201414205093-A
Country	US
Kind code	B2
Filing date	Mar 11, 2014
Priority date	Mar 11, 2014
Publication date	Oct 18, 2016
Grant date	Oct 18, 2016

Abstract

Embodiments of the present disclosure are directed towards a method of assembling an integrated circuit package. In embodiments the method may include providing a wafer having an unpatterned passivation layer to prevent corrosion of metal conductors embedded in the wafer. The method may further include laminating a dielectric material on the passivation layer to form a dielectric layer and selectively removing dielectric material to form voids in the dielectric layer. These voids may reveal portions of the passivation layer disposed over the metal conductors. The method may then involve removing the portions of the passivation layer to reveal the metal conductors. Other embodiments may be described and/or claimed.

First claim

What is claimed is:

1. An integrated circuit (IC) package comprising:
a wafer having a plurality of metal pads embedded on a side of the wafer;
a passivation layer directly coupled to the side of the wafer and in direct contact with the metal pads and further including a plurality of voids completely through the passivation layer, each of the plurality of voids having a void edge disposed over one of the metal pads;
a dielectric layer directly coupled to the passivation layer and having a plurality of vias completely through the dielectric layer and disposed over the metal pads, wherein each of the plurality of vias has a via edge disposed over one of the metal pads, wherein the void edges of the passivation layer are aligned with the via edges of the dielectric layer.

2. The IC package of claim 1 , wherein the metal pads comprise copper.

3. The IC package of claim 2 , wherein the metal pads have an under etch sidewall extending radially under the passivation layer to form a space between the passivation layer and a surface of the metal pad, wherein the space corresponds to the void edge, wherein the passivation layer and the metal pads are in direct contact adjacent to the void edge.

4. The IC package of claim 1 , further comprising:
a barrier layer directly coupled to the metal pads and a surface of the dielectric layer.

5. The IC package of claim 4 , wherein the barrier layer comprises one or more of chrome or titanium.

6. The IC package of claim 4 , further comprising:
a seed layer directly coupled to the barrier layer.

7. The IC package of claim 6 , wherein the seed layer comprises one or more of copper, gold, or palladium.

8. The IC package of claim 7 , wherein the IC package is a fan-in wafer level package or a fan-out wafer level package.

9. A package assembly comprising:
an integrated circuit (IC) package including:
a wafer with a plurality of metal pads embedded on a side of the wafer;
a passivation layer directly coupled to the side of the wafer and with a plurality of voids completely through the passivation layer, wherein each void has a void edge disposed over one of the metal pads, wherein the passivation layer is in direct contact with the metal pads;
a dielectric layer directly coupled to the passivation layer and having a plurality of vias completely through the dielectric layer and disposed over the metal pads, wherein each of the vias has a via edge disposed over one of the metal pads, wherein the void edges of the passivation layer are aligned with the via edges of the dielectric layer;
a barrier layer directly coupled to the metal pads and a surface of the dielectric layer;
a seed layer directly coupled to the barrier layer;
a resist layer directly coupled to the seed layer and with holes through the resist layer disposed over the metal pads;
a metal layer directly coupled to the seed layer and disposed over the metal pads, wherein the metal layer comprises one or more of an under bump metallization layer or a redistribution layer;
a plurality of input/output (I/O) interconnect structures electrically coupled with the metal layer; and
a package substrate including a first side having one or more lands disposed thereon; and a second side disposed opposite to the first side, the second side having one or more electrical routing features disposed thereon, the electrical routing features electrically coupled with the plurality of I/O interconnect structures.

10. The package assembly of claim 9 , wherein the IC package is a processor.

11. The package assembly of claim 10 , further comprising one or more of an antenna, a display, a touchscreen display, a touchscreen controller, a battery, an audio codec, a video codec, a power amplifier, a global positioning system (GPS) device, a compass, a Geiger counter, an accelerometer, a gyroscope, a speaker, or a camera coupled with the package substrate, wherein the package assembly is part of a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder.

12. The IC package of claim 6 , further comprising:
a resist layer directly coupled to the seed layer and with holes through the resist layer disposed over the metal pads.

13. The IC package of claim 12 , further comprising:
a metal layer directly coupled to the seed layer and disposed over the metal pads, wherein the metal layer comprises one or more of an under bump metallization layer or a redistribution layer.

Assignees

• Intel Corp

Inventors

• Meyer Thorsten
• Ofner Gerald
• Ossiander Teodora
• Zudock Frank
• Geissler Christian

Classifications

• H10P50/283

  by chemical means · CPC title

• H10P50/28

  of insulating materials · CPC title

• H10P14/6516

  of treatments performed after formation of the materials · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title