Vacuum pump
US-9217439-B2 · Dec 22, 2015 · US
Vacuum pump
US9470235B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9470235-B2 |
| Application number | US-201414197523-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 5, 2014 |
| Priority date | Mar 13, 2013 |
| Publication date | Oct 18, 2016 |
| Grant date | Oct 18, 2016 |
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- Title
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Abstract
Official abstract text for this publication.
A vacuum pump comprises an exhaust portion having a plurality of rotating blade portions arranged in multiple stages, each of the rotating blade portions having a plurality of rotor blades, and a plurality of stationary blade portions arranged between the rotating blade portions, in which outer circumferential rims are supported via spacers, each of the stationary blade portions having a plurality of stator blades. In at least one stationary blade portion among the plurality of stationary blade portions, a blade height on the inner circumferential side of the plurality of stator blades provided in the stationary blade portion is set to be smaller than a blade height on the outer circumferential side, and the stationary blade portion is supported by the spacers in such a manner that the inner circumferential side of the stationary blade portion is floated up toward an intake port side.
First claim
Opening claim text (preview).
What is claimed is: 1. A vacuum pump comprising: an exhaust portion having a plurality of rotating blade portions arranged in multiple stages, each of the rotating blade portions having a plurality of rotor blades, and a plurality of stationary blade portions arranged between the rotating blade portions, in which outer circumferential rims are supported via spacers, each of the stationary blade portions having a plurality of stator blades, wherein in at least one stationary blade portion among the plurality of stationary blade portions, a blade height on the inner circumferential side of the plurality of stator blades provided in the stationary blade portion is set to be smaller than a blade height on the outer circumferential side of the plurality of stator blades, and in the at least one stationary blade portion the gap between the upper surface of the stationary blade portion on the inner circumferential side and the lower surface of the rotating blade portion on the upper stage side is larger than the gap between the lower surface of the stationary blade portion on the inner circumferential side and the upper surface of the rotating blade portion on the lower stage side, the stationary blade portion is supported by the spacers in such a manner that the inner circumferential side of the stationary blade portion is floated up toward an intake port side. 2. The vacuum pump according to claim 1 , wherein the stationary blade portion includes an inner circumferential rim and the outer circumferential rim, the stator blades are provided between the inner circumferential rim and the outer circumferential rim, and by bending an outer circumferential edge of the outer circumferential rim, by a predetermined inclination angle, in the direction of upper surfaces of the stator blades from the outer circumferential rim, the inner circumferential rim is floated up to the intake port side. 3. The vacuum pump according to claim 1 , wherein a floating height s of a front end of the inner circumferential rim from the outer circumferential edge satisfies a relationship of: ( ho−hi )> s in a case where the blade height on the outer circumferential side of the stator blades is ho and the blade height on the inner circumferential side of the stator blades is hi. 4. A vacuum pump comprising: an exhaust portion having a plurality of rotating blade portions arranged in multiple stages, each of the rotating blade portions having a plurality of rotor blades, and a plurality of stationary blade portions arranged between the rotating blade portions, in which outer circumferential rims are supported via spacers, each of the stationary blade portions having a plurality of stator blades, wherein in at least one stationary blade portion among the plurality of stationary blade portions, a blade height on the inner circumferential side of the plurality of stator blades provided in the stationary blade portion is set to be smaller than a blade height on the outer circumferential side of the plurality of stator blades, and in the at least one stationary blade portion the gap between the upper surface of the stationary blade portion on the inner circumferential side and the lower surface of the rotating blade portion on the upper stage side is larger than the gap between the lower surface of the stationary blade portion on the inner circumferential side and the upper surface of the rotating blade portion on the lower stage side, the stationary blade portion is supported by the spacers in such a manner that the inner circumferential side of the stationary blade portion is floated up toward a side of the rotating blade portion on an upper stage side.
Assignees
Inventors
Classifications
- F04D19/042Primary
Turbomolecular vacuum pumps · CPC title
Blade shapes · CPC title
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Frequently asked questions
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- What does patent US9470235B2 cover?
- A vacuum pump comprises an exhaust portion having a plurality of rotating blade portions arranged in multiple stages, each of the rotating blade portions having a plurality of rotor blades, and a plurality of stationary blade portions arranged between the rotating blade portions, in which outer circumferential rims are supported via spacers, each of the stationary blade portions having a plural…
- Who is the assignee on this patent?
- Shimadzu Corp
- What technology area does this patent fall under?
- Primary CPC classification F04D19/042. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Oct 18 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).