Turbo-molecular pump
US-2015354577-A1 · Dec 10, 2015 · US
US9217439B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9217439-B2 |
| Application number | US-201113698008-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 20, 2011 |
| Priority date | Jul 2, 2010 |
| Publication date | Dec 22, 2015 |
| Grant date | Dec 22, 2015 |
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Disclosed is a low-cost composite-type vacuum pump having a strength capable of withstanding high loads and using a cylindrical rotor formed from a fiber-reinforced plastic material. Having a turbo-molecular pump section ( 14 ) and a thread groove pump section ( 15 ), the composite vacuum pump is formed by press-fitting a joint portion ( 20 a ) of a rotor ( 17 ) of the turbo-molecular pump section ( 14 ) into the upper end section of a cylindrical rotor ( 21 ) formed from the fiber-reinforced plastic material of the thread groove pump section ( 15 ). The joint portion ( 20 a ) of the rotor ( 17 ) is formed on the lower end side of the rotor ( 17 ) integrally with said rotor ( 17 ) and in the shape of a cylinder with an L shaped cross section, and is provided with: a contact portion ( 28 ) having an outer diameter enable press-fitting into the inner peripheral face of the cylindrical rotor ( 21 ); and a small-diameter section ( 29 ) positioned above said contact portion ( 28 ) and, having an outer diameter smaller than the inner diameter of the aforementioned cylindrical rotor ( 21 ), capable of being placed inside the cylindrical rotor ( 21 ) away from the inner peripheral face of the cylinder rotor ( 21 ).
Opening claim text (preview).
What is claimed is: 1. A vacuum pump comprising: a cylindrical rotor that constitutes at least a thread groove pump section or a Goethe pump section, etc.; and a second rotor that connects said cylindrical rotor and a rotating shaft to each other, the vacuum pump being configured by joining a part of a side surface of said cylindrical rotor to a joint portion that is provided at a flange-like annular portion formed in said second rotor, wherein an upper end surface of said…
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
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