Method of manufacturing mask

Patent metadata

Field	Value
Publication number	US-9457426-B2
Application number	US-201314021700-A
Country	US
Kind code	B2
Filing date	Sep 9, 2013
Priority date	Mar 29, 2013
Publication date	Oct 4, 2016
Grant date	Oct 4, 2016

Abstract

A mask substrate that includes a first area and a second area surrounding the first area is provided. Then, a laser beam is irradiated on the mask substrate to at least partly remove a material of the second area. After that, a physical force is applied to the mask substrate to separate the first area from the mask substrate thereby forming an opening through the mask substrate.

First claim

What is claimed is:

1. A method of manufacturing a mask, comprising:
providing a mask substrate including a first area and a second area surrounding the first area when viewed in a thickness direction of the mask substrate;
irradiating a laser beam on the mask substrate to at least partly remove a material of the second area, wherein a recess is formed in the second area by irradiating the laser beam onto the second area and the recess comprises a surface inclined with respect to the thickness direction of the mask substrate when viewed in a cross section; and
applying a physical force to the mask substrate unprocessed portion to separate the first area from the mask substrate, thereby forming an opening through the mask substrate,
wherein the second area is extended in a first direction and a second direction crossing the first direction, and each of the first and second areas is provided in a plural number in the mask substrate,
wherein the irradiating the laser beam comprises a pre-processing process on the mask substrate,
wherein the laser beam is continuously irradiated onto a third area encompassing a portion of each of two immediately neighboring second areas when the pre-processing process is performed, and the third area is extended in the second direction, and wherein the laser beam is irradiated onto an area of the second area when the laser beam is irradiated on to the second area, and the area of the second area is substantially in parallel to the first direction.

2. The method of claim 1 , wherein the physical force is applied to the mask substrate by applying an ultrasonic wave to the mask substrate.

3. The method of claim 2 , wherein the mask substrate comprises a metal material and the ultrasonic wave is applied while the mask substrate is dipped into a solution containing an acid.

4. The method of claim 1 , wherein the physical force is applied to the mask substrate by supplying a gas to the mask substrate.

5. The method of claim 1 , wherein the laser beam is irradiated several times onto the second area to remove the material from a surface thereof along the thickness direction of the mask substrate.

6. The method of claim 5 , wherein irradiating the laser beam comprises moving the laser beam along at least two different directions.

7. The method of claim 5 , wherein a volume of the recess formed in the second area is smaller than a volume of the first area.

8. The method of claim 7 , wherein the recess is tapered in when viewed in a cross section.

9. The method of claim 1 , wherein after the laser beam is irradiated onto the third area, the laser beam is irradiated onto the second area.

10. The method of claim 1 , wherein the mask is configured to be used to pattern an organic light emitting layer of an organic electroluminescent display device.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Doh-Hyoung
• Jo Jun Ho

Classifications

• B23K2103/50

  Inorganic materials other than metals or composite materials · CPC title

• B23K26/127

  in an enclosure · CPC title

• B23K26/40

  taking account of the properties of the material involved · CPC title

• C23C14/042

  using masks · CPC title

• C23C16/042

  using masks · CPC title