Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-9449861-B2
Application number	US-201314426783-A
Country	US
Kind code	B2
Filing date	Jun 18, 2013
Priority date	Sep 26, 2012
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

An object of the present invention is to provide a technique capable of reducing a volume occupied exclusively by a substrate processing apparatus. In order to achieve this object, a substrate processing apparatus includes: multiple processing parts that process a substrate W; a transport robot that makes rectilinear motion along one rectilinear axis or each of more rectilinear axes and rotative motion about a vertical axis to transport a substrate to each of the processing parts; a transport chamber defined as operating space for the transport robot; and a transport controller that controls operation of the transport robot. A first partial area defined in the transport chamber has a width (specifically, a width extending along a horizontal axis perpendicular to the one rectilinear axis or the more rectilinear axes) is smaller than a rotative diameter of the transport robot. The transport controller prohibits the rotative motion of the transport robot in the first partial area.

First claim

The invention claimed is:

1. A substrate processing apparatus that processes a substrate, comprising:
multiple processing parts that process a substrate;
a transport device with a movable table and a hand that makes rectilinear motion along one rectilinear axis or each of more rectilinear axes and rotative motion about a vertical axis to transport a substrate to each of said processing parts;
a transport chamber defined as operating space for said transport device; and
a transport controller that controls operation of said transport device, wherein
a first partial area defined in said transport chamber has a width smaller than a rotative diameter of said transport device, said width extending along a horizontal axis perpendicular to said one rectilinear axis or said more rectilinear axes, and
said transport controller prohibits said rotative motion of said transport device in said first partial area;
wherein each of said processing parts includes:
a housing; and
an opening for entry of the hand of said transport device into said housing, said opening being formed in said housing,
multiple second partial areas are defined in said transport chamber, said second partial areas being spaced at an interval along said one rectilinear axis or any of said more rectilinear axes, said second partial areas being connected via said first partial area,
said processing parts are arranged such that said openings of said processing parts surround said second partial areas, and
said transport controller permits said rotative motion of said transport device in said second partial areas,
wherein said movable table travels between said second partial areas.

2. The substrate processing apparatus according to claim 1 , wherein said one rectilinear axis or said more rectilinear axes include a vertical axis.

3. The substrate processing apparatus according to claim 1 , wherein said one rectilinear axis or said more rectilinear axes include an axis extending along and within a horizontal plane.

Assignees

• Screen Holdings Co Ltd

Inventors

• Hatano Akito
• Hayashi Toyohide
• Hashimoto Koji

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/3306

  Horizontal transfer of a single workpiece · CPC title

• H10P72/3304

  characterised by movements or sequence of movements of transfer devices · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/0464

  characterised by the construction of the transfer chamber · CPC title