Target for X-ray generator, method of manufacturing the same and X-ray generator

Patent metadata

Field	Value
Publication number	US-9020101-B2
Application number	US-201313759686-A
Country	US
Kind code	B2
Filing date	Feb 5, 2013
Priority date	Mar 27, 2012
Publication date	Apr 28, 2015
Grant date	Apr 28, 2015

Abstract

There is provided a target for an X-ray generator, including: a holder part made of an electrically conductive material and having an opening part; a diamond plate air-tightly joined to the holder part so as to close the opening part; a thin film target provided on a surface of the diamond plate, with its outer peripheral part extending to the holder part to be electrically connected to the holder part, wherein the holder part is configured to be electrically connected to a power supply of the X-ray generator, and the diamond plate is incorporated into the X-ray generator with one side disposed in a vacuum atmosphere where the thin film target is formed, and an opposite side thereto disposed at a side where the diamond plate is brought into thermal contact with a refrigerant and cooled.

First claim

What is claimed is:

1. A target for an X-ray generator which is placed inside the X-ray generator and is irradiated with accelerated electrons to generate an X-ray, comprising:
a holder part made of an electrically conductive material and having an opening part and a cylindrical shape;
a diamond plate coupled to the holder part in an air-tight manner so as to close an upper portion of the opening part; and
a thin film target provided on a surface of the diamond plate, with its…

Assignees

• Rigaku Denki Co Ltd

Inventors

• Omote Kazuhiko
• Shimizu Kazuaki
• Osaka Naohisa

Classifications

• H01J2235/081

  Electricity · mapped topic

• H01J2235/083

  Electricity · mapped topic

• H05G1/025

  Electricity · mapped topic

• H01J35/32

  Electricity · mapped topic

• A61B6/4488

  Human Necessities · mapped topic