Device for controlling temperature of an optical element

Patent metadata

Field	Value
Publication number	US-9442397-B2
Application number	US-201514926471-A
Country	US
Kind code	B2
Filing date	Oct 29, 2015
Priority date	Oct 9, 2007
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.

First claim

What is claimed is:

1. A system, comprising:
an optical element configured to be a component of an EUV microlithography tool;
a cooling element disposed away from the optical element, the cooling element being configured to cool the optical element via radiation heat transfer;
a shielding configured to prevent the cooling element from absorbing heat from a component of the system other than the optical element; and
a controller configured to control a temperature of the cooling element,
wherein the system is configured to control a temperature of the optical element when the optical element is in a vacuum atmosphere.

2. The system of claim 1 , further comprising a light source configured so that light emitted from the light source impinges on the optical element during use of the system, wherein:
the controller is configured to control the light source; and
the controller is configured to stabilize the temperature of the optical element by controlling light from the light source that impinges on the optical element and by controlling cooling of the optical element via the cooling element.

3. The system of claim 1 , further comprising a heating device configured to heat the optical element.

4. The system of claim 3 , further comprising a light source configured so that light emitted from the light source impinges on the optical element during use of the system, wherein:
the controller is configured to control the light source; and
the controller is configured to stabilize the temperature of the optical element by controlling light from the light source that impinges on the optical element, by heating the optical element via the heating device, and by cooling the optical element via the cooling element.

5. The system of claim 1 , wherein the controller is configured to control heating of the optical element by the heating device.

6. The system of claim 1 , wherein the optical element comprises a mirror.

7. The system of claim 6 , further comprising a light source configured so that light emitted from the light source impinges on the mirror during use of the system, wherein:
the controller is configured to control the light source; and
the controller is configured to stabilize the temperature of the mirror by controlling light from the light source that impinges on the mirror and by controlling cooling of the mirror via the cooling element.

8. The system of claim 6 , further comprising a heating device configured to heat the mirror.

9. The system of claim 8 , further comprising a light source configured so that light emitted from the light source impinges on the mirror during use of the system, wherein:
the controller is configured to control the light source; and
the controller is configured to stabilize the temperature of the mirror by controlling light from the light source that impinges on the mirror, by heating the mirror via the heating device, and by cooling the mirror via the cooling element.

10. The system of claim 6 , wherein the controller is configured to control heating of the mirror by the heating device.

11. An EUV microlithography tool comprising the system of claim 6 .

12. An EUV microlithography tool comprising the system of claim 1 .

13. A system, comprising:
an optical element configured to be a component of an EUV microlithography tool;
a heating device configured to heat the optical element;
a shielding configured to prevent components of the system neighboring the optical element from absorbing heat from the heating device; and
a controller configured to control a temperature of the heating device and/or to control a temperature of the shielding,
wherein the system is configured to control a temperature of the optical element when the optical element is in a vacuum atmosphere.

14. The system of claim 13 , further comprising a cooling element disposed away from an optical element, wherein the cooling element is configured to cool the optical element via radiation heat transfer.

15. The system of claim 14 , further comprising a light source configured so that light emitted from the light source impinges on the optical element during use of the system, wherein:
the controller is configured to control the light source; and
the controller is configured to stabilize the temperature of the optical element by controlling light from the light source that impinges on the optical element, by heating the optical element via the heating device, and by cooling the optical element via the cooling element.

16. The system of claim 13 , wherein the optical element comprises a mirror.

17. The system of claim 16 , further comprising a cooling element disposed away from an mirror, wherein the cooling element is configured to cool the mirror via radiation heat transfer.

18. The system of claim 17 , further comprising a light source configured so that light emitted from the light source impinges on the mirror during use of the system, wherein:
the controller is configured to control the light source; and
the controller is configured to stabilize the temperature of the mirror by controlling light from the light source that impinges on the mirror, by heating the optical element via the heating device, and by cooling the mirror via the cooling element.

19. An EUV microlithography tool comprising the system of claim 16 .

20. An EUV microlithography tool comprising the system of claim 13 .

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Hauf Markus

Classifications

• G21K1/067

  using surface reflection, e.g. grazing incidence mirrors, gratings (multilayer mirrors G21K1/062) · CPC title

• G02B7/008

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title

• G02B5/0891

  Ultraviolet [UV] mirrors (apparatus for microlithography exposure G03F7/70; X-ray multilayer structures G21K1/06) · CPC title

• G03F7/70008

  Production of exposure light, i.e. light sources · CPC title

• G03B27/26

  Cooling · CPC title