Thermo-mechanical actuator
US-12117739-B2 · Oct 15, 2024 · US
Device for controlling temperature of an optical element
US9195151B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9195151-B2 |
| Application number | US-201414523291-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 24, 2014 |
| Priority date | Oct 9, 2007 |
| Publication date | Nov 24, 2015 |
| Grant date | Nov 24, 2015 |
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Abstract
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A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.
First claim
Opening claim text (preview).
What is claimed is: 1. An optical system, comprising: a plurality of optical elements including a first optical element; a cooling element disposed away from the first optical element, the cooling element being configured to cool the first optical element by radiation heat transfer; a heating device configured to heat the first optical element; and a controller configured to control a) the cooling element according to a temperature of the first optical element; or b) the hea…
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Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9195151B2 cover?
- A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for…
- Who is the assignee on this patent?
- Zeiss Carl Smt Gmbh
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70891. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Nov 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).