Process for electrochemically making at least one porous area of a micro and/or nanoelectronic structure
US-2015329986-A1 · Nov 19, 2015 · US
US9442375B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9442375-B2 |
| Application number | US-201314408427-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 18, 2013 |
| Priority date | Jun 18, 2012 |
| Publication date | Sep 13, 2016 |
| Grant date | Sep 13, 2016 |
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Disclosed herein is a substrate having a surface modified to impart multi-scale roughness, thereby providing superhydrophobic and/or superoleophobic properties. The surface comprises a pattern of microscale pillars topped by a plurality of nanoparticles having a re-entrant convex shape. The area fraction of the surface is also selected to provide the desired superoleophobic properties. Also disclosed herein is a process for creating the modified surface comprising photolithography, optionally followed by vapor deposition. The substrates may be formed into useful articles or applied to pre-formed articles.
Opening claim text (preview).
The invention claimed is: 1. An article comprising a substrate, the substrate having a surface comprising a pattern of microscale pillars topped with a plurality of nanoparticles, wherein: the plurality of nanoparticles together create a re-entrant convex morphology atop each pillar, and the surface has a contact angle for water of greater than 150°. 2. The article of claim 1 , wherein the pattern comprises an array. 3. The article of claim 2 , wherein the surface also has a contact angle for hexadecane of greater than 150°. 4. The article of claim 3 , wherein the nanoparticles comprise a negative photoresist. 5. The article of claim 4 , wherein the surface has a multi-scale morphology. 6. The article of claim 1 , wherein area fraction, f, of the surface is from 0.01 to 0.10. 7. The article of claim 6 , wherein the surface comprises a fluorinated hydrocarbon. 8. The article of claim 7 , wherein the surface comprises a fluorosilane material. 9. The article of claim 8 , wherein the microscale pillars comprise a negative photoresist. 10. The article of claim 9 , wherein both the pillars and the nanoparticles comprise the negative photoresist. 11. The article of claim 10 , where the substrate comprises silicon, glass, metal or a polymer. 12. The article of claim 11 , wherein the substrate is applied to the article. 13. The article of claim 11 , wherein the polymer comprises an elastomer. 14. The article of claim 13 , wherein the elastomer comprises butyl rubber.
Polymer or resin [e.g., natural or synthetic rubber, etc.] · CPC title
Tips, pillars · CPC title
Photosensitive materials (G03F7/12, G03F7/14 take precedence) · CPC title
Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties · CPC title
Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title
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