Method of making an extreme ultraviolet pellicle

Patent metadata

Field	Value
Publication number	US-9442368-B2
Application number	US-201514980469-A
Country	US
Kind code	B2
Filing date	Dec 28, 2015
Priority date	Apr 23, 2014
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

The present disclosure relates to a method of forming an extreme ultraviolet (EUV) pellicle having an pellicle film connected to a pellicle frame without a supportive mesh, and an associated apparatus. In some embodiments, the method is performed by forming a cleaving plane within a substrate. A pellicle frame is attached to an upper surface of the substrate, and the substrate is cleaved along the cleaving plane to form a pellicle film attached to the pellicle frame. The method forms the pellicle without using a support structure, which may block EUV radiation and cause substantial non-uniformities in the intensity of EUV radiation incident on an EUV reticle.

First claim

What is claimed is:

1. A method for forming a pellicle, comprising:
forming a cleaving plane within a substrate;
attaching a pellicle frame to an upper surface of the substrate; and
cleaving the substrate along the cleaving plane to form a pellicle film attached to the pellicle frame.

2. The method of claim 1 , further comprising:
operating upon the substrate, prior to cleaving the substrate, to reduce structural damage to the upper surface of the substrate during formation of the cleaving plane or during cleaving the substrate.

3. The method of claim 1 , further comprising:
performing a first implantation process to implant a collection species into the upper surface of the substrate; and
performing a second implantation process to implant a severing species into the upper surface of the substrate, wherein the collection species causes the severing species to achieve a peak concentration along the cleaving plane.

4. The method of claim 3 ,
wherein the first implantation process is configured to implant boron into the substrate at a first energy; and
wherein the second implantation process is configured to implant hydrogen into the substrate at a second energy different than the first energy.

5. The method of claim 3 , further comprising:
forming an encapsulating layer on the upper surface of the substrate prior to performing the first implantation process and the second implantation process; and
removing the encapsulating layer after performing the first implantation process and the second implantation process.

6. The method of claim 5 , wherein the encapsulating layer comprises an oxide.

7. The method of claim 5 , wherein the encapsulating layer comprises silicon carbide or a layer of silicon oxide and an overlying layer of amorphous silicon.

8. The method of claim 1 , further comprising:
attaching the pellicle frame to the upper surface of the substrate using a temporary adhesive material and a perdurable adhesive material different than the temporary adhesive material.

9. The method of claim 8 , wherein the temporary adhesive material comprises polymethyl methacrylate (PMMA).

10. The method of claim 1 , further comprising:
performing a first anneal process on the substrate to raise a temperature of the substrate to a first temperature prior to cleaving the substrate; and
performing a second anneal process on the substrate to raise the temperature of the substrate to a second temperature greater than the first temperature after cleaving the substrate.

11. The method of claim 1 , wherein the substrate comprises a layer of graphene, silicon carbide, or single walled carbon nanotubes disposed onto a base substrate.

12. The method of claim 1 , further comprising:
mounting the pellicle film to an extreme ultraviolet (EUV) reticle by way of the pellicle frame.

13. A method for forming a pellicle, comprising:
performing a first implantation process to implant a first dopant species into an upper surface of a substrate;
performing a second implantation process to implant a second dopant species into the upper surface of the substrate;
attaching a pellicle frame to the upper surface of the substrate after performing the second implantation process; and
cleaving the substrate to form a thinned substrate attached to the pellicle frame.

14. The method of claim 13 ,
wherein the first dopant species causes the second dopant species to achieve a peak concentration along a cleaving plane; and
wherein the substrate is cleaved along the cleaving plane.

15. The method of claim 13 , further comprising:
forming an encapsulating layer on the upper surface of the substrate prior to performing the first implantation process and the second implantation process; and
removing the encapsulating layer after performing the first implantation process and the second implantation process.

16. The method of claim 13 , further comprising:
attaching the pellicle frame to the upper surface of the substrate using a temporary adhesive material and a perdurable adhesive material different than the temporary adhesive material.

17. An extreme ultraviolet (EUV) pellicle, comprising:
a thinned substrate having a first surface comprising a first dopant species and a second dopant species that is different than the first dopant species; and
a pellicle frame connected to outer edges of a second surface of the thinned substrate and configured to mount the thinned substrate to an extreme ultraviolet (EUV) reticle, wherein the first surface and the second surface face opposite directions.

18. The EUV pellicle of claim 17 , further comprising:
an adhesive material disposed onto outer edges of the second surface of the thinned substrate and configured to connect the pellicle frame to the thinned substrate.

19. The EUV pellicle of claim 17 , wherein the first dopant species comprises hydrogen and the second dopant species comprises boron.

20. The EUV pellicle of claim 17 , wherein the substrate comprises silicon.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Shih Chih-Tsung
• Lee Tien-Hsi
• Chen Chia-Jen
• Chien Shang-Chieh
• Yu Shinn-Sheng
• Chen Jeng-Horng
• Yen Anthony

Classifications

• G03F1/62

  Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof · CPC title

• G03F1/64 Primary

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• G03F7/2002

  with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image · CPC title

• B29C2071/022

  Annealing · CPC title

• B29C71/02

  Thermal after-treatment {(B29C71/0063 and B29C71/0072 take precedence)} · CPC title