Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US9440781B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9440781-B2 |
| Application number | US-201214232186-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 10, 2012 |
| Priority date | Jul 11, 2011 |
| Publication date | Sep 13, 2016 |
| Grant date | Sep 13, 2016 |
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An example of droplet discharge device includes a discharge path ( 12 ) having an end that constitutes a discharge opening ( 11 ), a plunger ( 30 ), a liquid chamber ( 50 ) into which the plunger ( 30 ) is inserted, a plunger driving mechanism that moves the plunger ( 30 ) forward and backward, and a plunger position determining mechanism that specifies a position of a tip portion of the plunger ( 30 ). The liquid material is discharged in a droplet state by applying inertial force to the liquid material with forward movement of the plunger ( 30 ) in a state where the tip portion of the plunger ( 30 ) and an inner wall of the liquid chamber ( 50 ) are not contacted with each other. A minute droplet is formed by moving the plunger ( 30 ) forward to push the liquid material out of the discharge opening ( 11 ) in an amount necessary to form a droplet of a desired size.
Opening claim text (preview).
The invention claimed is: 1. A droplet discharge device comprising a discharge path having an end that constitutes a discharge opening, a liquid chamber to which a liquid material is suppled, the liquid chamber being formed by an inner wall of an enclosure and communicating with the discharge path, a plunger which is inserted into the liquid chamber, a plunger driver that moves the plunger forward and backward, and a plunger stopper that specifies a position of a tip portion of the plunger, wherein the liquid material is discharged in a droplet state by applying inertial force to the liquid material with forward movement of the plunger in a state where the tip portion of the plunger contacts neither the inner wall of the liquid chamber nor a valve seat, and wherein a minute droplet is formed by moving the plunger forward to push the liquid material out of the discharge opening in an amount necessary to form a droplet of a desired size, and then by moving the plunger backward to divide the liquid material having been pushed out of the discharge opening. 2. The droplet discharge device according to claim 1 , wherein the discharge path includes a first flow path having an end that constitutes the discharge opening, and a second flow path, which is communicated with the first flow path and the liquid chamber, and which has a larger diameter than the first flow path. 3. The droplet discharge device according to claim 2 , wherein, after moving the plunger backward and dividing the liquid material having been pushed out of the discharge opening, the plunger is further moved backward to form an air-liquid interface in the first flow path or the second flow path, and the movement of the plunger is then stopped. 4. The droplet discharge device according to claim 3 , wherein the minute droplet is successively formed by moving the plunger forward from a plunger position, which is given after forming the air-liquid interface in the discharge path and stopping the movement of the plunger, to push the liquid material out of the discharge opening in an amount necessary to form a droplet of a desired size, and then by moving the plunger backward to divide the liquid material having been pushed out of the discharge opening. 5. The droplet discharge device according to claim 3 , wherein an inner diameter of the discharge opening is several tens μm or less. 6. The droplet discharge device according to claim 2 , wherein an inner diameter of the discharge opening is several tens μm or less. 7. The droplet discharge device according to claim 2 , wherein the second flow path has a larger diameter than the plunger, and wherein the plunger is moved forward to the inside of the second path, to push the liquid material out of the discharge opening in an amount necessary to form a droplet of a desired size. 8. The droplet discharge device according to claim 1 , wherein, after moving the plunger backward and dividing the liquid material having been pushed out of the discharge opening, the plunger is further moved backward to form an air-liquid interface in the discharge path, and the movement of the plunger is then stopped. 9. The droplet discharge device according to claim 8 , wherein the minute droplet is successively formed by moving the plunger forward from a plunger position, which is given after forming the air-liquid interface in the discharge path and stopping the movement of the plunger, to push the liquid material out of the discharge opening in an amount necessary to form a droplet of a desired size, and then by moving the plunger backward to divide the liquid material having been pushed out of the discharge opening. 10. The droplet discharge device according to claim 1 , wherein an inner diameter of the discharge opening is several tens μm or less. 11. A droplet discharge method for discharging a liquid material in a droplet state comprising: providing a droplet discharge device comprising a discharge path having an end that constitutes a discharge opening, a liquid chamber to which a liquid material is supplied, the liquid chamber being formed by an inner wall of an enclosure and communicating with the discharge path, the plunger which is inserted into the liquid chamber, a plunger driver that moves the plunger forward and backward, and a plunger stopper that specifies a position of the tip portion of the plunger, moving the plunger forward to push the liquid material out of the discharge opening in an amount necessary to form a droplet of a desired size so as to apply inertial force to the liquid material with forward movement of the plunger in a state where a tip portion of the plunger contacts neither the inner wall of the liquid chamber nor a valve seat; and a dividing step of moving the plunger backward to divide the liquid material having been pushed out of the discharge opening, to thereby form the minute droplet. 12. The droplet discharge method according to claim 11 , wherein the droplet discharge method further includes a sucking step of, after the dividing step, further moving the plunger backward to form an air-liquid interface in the discharge path, and then stopping the movement of the plunger. 13. The droplet discharge method according to claim 12 , wherein the liquid material is a liquid material containing a solid substance, and a distance between the tip portion of the plunger and the inner wall of the liquid chamber in the pushing step is set larger than the solid substance. 14. The droplet discharge method according to claim 12 , wherein an inner diameter of the discharge opening is several tens μm or less. 15. The droplet discharge method according to claim 12 , wherein the liquid material has viscosity of 10000 mPa·s or more. 16. The droplet discharge method according to claim 12 , wherein a forward movement distance of the plunger in the pushing step is larger than a distance between the tip portion of the plunger and the inner wall of the liquid chamber immediately after the pushing step. 17. The droplet discharge method according to claim 11 , wherein the liquid material is a liquid material containing a solid substance, and a distance between the tip portion of the plunger and the inner wall of the liquid chamber in the pushing step is set larger than the solid substance. 18. The droplet discharge method according to claim 11 , wherein an inner diameter of the discharge opening is several tens μm or less. 19. The droplet discharge method according to claim 11 , wherein the liquid material has viscosity of 10000 mPa·s or more. 20. The droplet discharge method according to claim 11 , wherein a forward movement distance of the plunger in the pushing step is larger than a distance between the tip portion of the plunger and the inner wall of the liquid chamber immediately after the pushing step. 21. The droplet discharge method according to claim 11 , wherein the discharge path includes a first flow path having an end that constitutes the discharge opening, and a second flow path, which is communicated with the first flow path and the liquid chamber, and which has a larger diameter than the first flow path. 22. The droplet discharge method according to claim 21 , wherein the second flow path has a larger diameter than the plunger, and wherein the plunger is moved forward to the inside of the second path, to push the liquid material out of the discharge opening in an amount necessary to form a droplet of a desired size.
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