Presumably defective portion decision apparatus, presumably defective portion decision method, fabrication method for semiconductor device and program

Patent metadata

Field	Value
Publication number	US-9435643-B2
Application number	US-201313754635-A
Country	US
Kind code	B2
Filing date	Jan 30, 2013
Priority date	Jan 30, 2012
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

Disclosed herein is a presumably defective portion decision apparatus, including: an arithmetic operation section configured to divide a level difference included in level difference data which indicate a level difference distribution on the surface of a semiconductor device into two or more unit level differences in the depthwise direction of the level difference and determine, for each of the unit level differences obtained by the division, a relationship between the height of a contour line at a level difference position of an upper face and an area of an opening surrounded by the contour line to decide presence or absence of a presumably defective portion.

First claim

What is claimed is:

1. A defective portion decision apparatus, comprising:
one or more processors operable to:
divide a level difference, which indicates a level difference distribution on a surface of a semiconductor device, into two or more unit level differences in a depthwise direction of the level difference;
generate a contour line diagram of the level difference for each of the two or more unit level differences based on position coordinates acquired for each of the two…

Assignees

• Sony Corp

Inventors

• Izuha Kyoko
• Hirata Tatsushiro
• Shibuki Shunichi

Classifications

• H10P74/203

  Electricity · mapped topic

• H10P74/20

  Electricity · mapped topic

• G01B21/02 Primary

  Physics · mapped topic

• H01L22/10

  Electricity · mapped topic

• H01L2924/0002

  Electricity · mapped topic