Compact high energy ion implantation system
US-2019371562-A1 · Dec 5, 2019 · US
US9426877B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9426877-B2 |
| Application number | US-201314137262-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 20, 2013 |
| Priority date | Dec 28, 2012 |
| Publication date | Aug 23, 2016 |
| Grant date | Aug 23, 2016 |
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A standing wave electron linear accelerating apparatus and a method thereof are disclosed. The apparatus comprises an electron gun configured to generate electron beams; a pulse power source configured to provide a primary pulse power signal; a power divider coupled downstream from the pulse power source and configured to divide the primary pulse power signal outputted from the pulse power source into a first pulse power signal and a second pulse power signal; a first accelerating tube configured to accelerating the electron beams with the first pulse power signal; a second accelerating tube configured to accelerate the electron beams with the second pulse power signal; a phase shifter configured to continuously adjust a phase difference between the first pulse power signal and the second pulse power signal so as to generate accelerated electron beams with continuously adjustable energy at output of the second accelerating tube.
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What is claimed is: 1. A standing wave electron linear accelerating apparatus comprising: an electron gun configured to generate electron beams; a pulse power source configured to provide a primary pulse power signal; a power divider coupled downstream from the pulse power source and configured to divide the primary pulse power signal outputted from the pulse power source into a first pulse power signal and a second pulse power signal; a first accelerating tube arranged downstream from the electron gun, coupled to the power divider and configured to accelerate the electron beams with the first pulse power signal; a second accelerating tube arranged downstream from the first accelerating tube, and configured to receive the second pulse power signal from the power divider and accelerate the electron beams with the second pulse power signal; a phase shifter coupled to an output of the power divider and configured to continuously adjust a phase difference between the first pulse power signal and the second pulse power signal so as to generate accelerated electron beams with continuously adjustable energy at an output of the second accelerating tube; and a target arranged downstream from the second accelerating tube and configured to be hit by the accelerated electron beams to generate X-rays; wherein the target is mounted on a rotatable base so that an angle of an incident direction of the accelerated electron beams with respect to a surface of the target varies with the energy of the electron beams; wherein the target is mounted in a vacuum box that is fixed on the rotatable base, wherein the side of the vacuum box includes an X-ray window and the second accelerating tube is coupled to the vacuum box via a corrugated pipe. 2. The standing wave electron linear accelerating apparatus according to claim 1 further comprising: an attenuator coupled to the phase shifter and configured to attenuate the first pulse power signal and/or the second pulse power signal. 3. The standing wave electron linear accelerating apparatus according to claim 1 , wherein the phase shifter is configured to adjust the phase difference so that accelerating cavities of the first accelerating tube and the second accelerating tube each operate in an accelerating phase mode. 4. The standing wave electron linear accelerating apparatus according to claim 1 , wherein the phase shifter is configured to adjust the phase difference so that an accelerating cavity of the first accelerating tube operates in an accelerating phase mode while an accelerating cavity of the second accelerating tube operates in a decelerating phase mode. 5. The standing wave electron linear accelerating apparatus according to claim 1 , wherein the first accelerating tube and the second accelerating tube both operate in a π mode. 6. The standing wave electron linear accelerating apparatus according to claim 1 , further comprising: a power coupler arranged between the first accelerating tube and the second accelerating tube and configured to supply power to the first accelerating tube and the second accelerating tube. 7. The standing wave electron linear accelerating apparatus according to claim 1 , wherein the electron gun injects electrons into the first accelerating tube with a negative angle. 8. The standing wave electron linear accelerating apparatus according to claim 1 , wherein the accelerated electron beams have energy within a range from 0.5 MeV to 2.00 MeV. 9. A standing wave electron linear accelerating apparatus comprising: an electron gun configured to generate electron beams; a first pulse power source configured to provide a first pulse power signal; a second pulse power source configured to provide a second pulse power signal; a first accelerating tube arranged downstream from the electron gun, coupled to the first pulse power source and configured to accelerate the electron beams with the first pulse power signal; a second accelerating tube arranged downstream from the first accelerating tube, and configured to receive the second pulse power signal from the second pulse power source and accelerate the electron beams with the second pulse power signal; a phase shifter coupled to an output of the first pulse power source and/or output of the second pulse power source and configured to continuously adjust a phase difference between the first pulse power signal and the second pulse power signal so as to generate accelerated electron beams with continuously adjustable energy at an output of the second accelerating tube; and a target arranged downstream from the second accelerating tube and configured to be hit by the accelerated electron beams to generate X-rays; wherein the target is mounted on a rotatable base so that an angle of an incident direction of the accelerated electron beams with respect to a surface of the target varies with the energy of the electron beams; wherein the target is mounted in a vacuum box that is fixed on the rotatable base, wherein the side of the vacuum box includes an X-ray window and the second accelerating tube is coupled to the vacuum box via a corrugated pipe. 10. The standing wave electron linear accelerating apparatus according to claim 9 , further comprising: an attenuator coupled to the phase shifter and configured to attenuate the first pulse power signal and/or the second pulse power signal. 11. The standing wave electron linear accelerating apparatus according to claim 9 , wherein the phase shifter is configured to adjust the phase difference so that accelerating cavities of the first accelerating tube and the second accelerating tube each operate in an accelerating phase mode. 12. The standing wave electron linear accelerating apparatus according to claim 9 , wherein the phase shifter is configured to adjust the phase difference so that an accelerating cavity of the first accelerating tube operates in an accelerating phase mode while an accelerating cavity of the second accelerating tube operates in a decelerating phase mode. 13. The standing wave electron linear accelerating apparatus according to claim 9 , wherein the first accelerating tube and the second accelerating tube both operate in a π mode. 14. The standing wave electron linear accelerating apparatus according to claim 9 , further comprising: a power coupler arranged between the first accelerating tube and the second accelerating tube and configured to supply power to the first accelerating tube and the second accelerating tube. 15. The standing wave electron linear accelerating apparatus according to claim 9 , wherein the electron gun injects electrons into the first accelerating tube with a negative angle. 16. The standing wave electron linear accelerating apparatus according to claim 9 , wherein the accelerated electron beams have energy within a range from 0.5 MeV to 2.00 MeV. 17. A method for use in a standing wave electron linear accelerating apparatus comprising steps of: generating electron beams; accelerating the electron beams with a first pulse power signal in a first accelerating tube; accelerating the electron beams with a second pulse power signal in a second accelerating tube which is arranged downstream from the first accelerating tube; continuously adjusting a phase difference between the first pulse power signal and the second pulse power signal so as to generate accelerated electron beams with continuously adjustable energy at an output of the second accelerating tube; and hitting a target arranged downstream from the second accelerating tube with the accelerated electron beams to
Details of linear accelerators, e.g. drift tubes (H05H7/02 - H05H7/20 take precedence) · CPC title
Lepton LINACS · CPC title
Standing-wave linear accelerators · CPC title
Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma (X-ray lasers H01S4/00) · CPC title
Arrangements for varying final energy of beam · CPC title
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