Photoresist composition

Patent metadata

Field	Value
Publication number	US-9417526-B2
Application number	US-201414573624-A
Country	US
Kind code	B2
Filing date	Dec 17, 2014
Priority date	Jan 20, 2014
Publication date	Aug 16, 2016
Grant date	Aug 16, 2016

Abstract

A photoresist composition includes an acid-labile polymer that is decomposable by reaction with an acid, a photoacid generator, an organic base having a pK a value of 9 or less and a solvent. Based on 100 parts by weight of the acid-labile polymer, the photoacid generator is about 1 to about 30 parts by weight, and the organic base is about 0.1 to about 5 parts by weight. The solvent is about 50 to about 90 wt % based on the total weight of the composition.

First claim

What is claimed is:

1. A photoresist composition, comprising:
an acid-labile polymer that is decomposable by reaction with an acid, wherein the acid-labile polymer includes a copolymer represented by Chemical Formula 6 below:

wherein 0.1≦x/(x+y+x)≦0.9, 0≦y/(x+y+x)≦0.3, 0.1≦z/(x+y+x)≦0.9, and R 5 is at least one of an acetal group, a ketal group and a t-butyl group, and a molecular weight of the copolymer is about 1,000 to about 500,000;
a photoacid generator;
an organic base having a pK a value of 9 or less; and
a solvent,
wherein, based on 100 parts by weight of the acid-labile polymer, the photoacid generator is about 1 to about 30 parts by weight, and the organic base is about 0.1 to about 5 parts by weight, and
the solvent is about 50 to about 90 wt % based on the total weight of the composition.

2. The photoresist composition as claimed in claim 1 , wherein the organic base includes at least one selected from the group of aniline, triethanolamine, p-toluidine, and diethanolamine.

3. The photoresist composition as claimed in claim 1 , wherein the acid-labile polymer further includes at least one of repeating units represented by Chemical Formulas 2 and 3 below:

wherein R1 is at least one selected from the group of an acetal group, a linear or branched alkyl group, an alkyl silicon group, a silicon alkoxy group, a 2-tetrahydropyranyl group, a vinyl ether group, a 2-tetrahydrofuranyl group, a 2,3-propylenecarbonate group, a methoxy ethoxy ethyl group, and an acetoxy ethoxy ethyl group, and
R2 is at least one selected from the group of a linear or branched alkyl group, an alkyl silicon group, a silicon alkoxy group, a 2-tetrahydropyranyl group, a vinyl ether group, a 2-tetrahydrofuranyl group, a 2,3-propylenecarbonate group, a methoxy ethoxy ethyl group, and an acetoxy ethoxy ethyl group.

4. The photoresist composition as claimed in claim 1 , wherein the acid-labile polymer further includes a copolymer portion represented by any one of Chemical Formulas 4a to 4c below:

wherein m and n are an integer of 0 to about 100, and the case where both m and n are 0 is excluded, and
R1 is selected from the group of hydrogen (H), a linear or branched alkyl group, an acetal group, a 2-tetrahydropyranyl group, a vinyl ether group, a 2-tetrahydrofuranyl group, a 2,3-propylenecarbonate group, a methoxy ethoxy ethyl group, and an acetoxy ethoxy ethyl group, and
R2 is selected from the group of hydrogen (H), a linear or branched alkyl group, a 2-tetrahydropyranyl group, a vinyl ether group, a 2-tetrahydrofuranyl group, a 2,3-propylenecarbonate group, a methoxy ethoxy ethyl group, and an acetoxy ethoxy ethyl group.

5. The photoresist composition as claimed in claim 1 , wherein the photoacid generator includes one or more selected from the group of a sulfonium salt-based compound, an iodonium salt-based compound, a sulfonyldiazomethane-based compound, an N-sulfonyloxyimide-based compound, and a sulfonate-based compound.

6. The photoresist composition as claimed in claim 1 , further comprising at least one of a melamine-based crosslinking agent and a silane coupling agent.

7. The photoresist composition as claimed in claim 1 , wherein R 5 is t-butyl.

8. A method of forming a device pattern for a display, the method comprising:
forming an etching target material layer on a substrate;
coating the photoresist composition as claimed in claim 1 on the etching target material layer to form a photoresist layer; and
subjecting the photoresist layer to exposure and development.

9. The method as claimed in claim 8 , wherein the display is any one of an organic light-emitting display, a liquid crystal display and an electrophoretic display.

10. The method as claimed in claim 8 , wherein the device pattern is a wiring pattern or an electrode pattern.

Assignees

• Samsung Display Co Ltd

Inventors

• Chun Jun
• Park Jeong-Min
• Park Sung-Kyun
• Kim Ji-Hyun
• Ju Jin-Ho
• Youn Hyoc-Min
• Kim Dong-Myung
• Kim Jin-Sun
• Yeo Tai-Hoon
• Kim Byung-Uk

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• H10P50/287

  by chemical means · CPC title

• G09B1/38

  the elements being connectible magnetically · CPC title

• C08F220/16

  of phenols or of alcohols containing two or more carbon atoms · CPC title

• A63H33/046 Primary

  comprising magnetic interaction means, e.g. holding together by magnetic attraction · CPC title