Via-hole drilling in a printed circuit board using a carbon monoxide laser

Patent metadata

Field	Value
Publication number	US-9414498-B2
Application number	US-201314033246-A
Country	US
Kind code	B2
Filing date	Sep 20, 2013
Priority date	Sep 20, 2013
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

Apparatus for drilling a via-hole in a printed circuit board (PCB) includes a carbon monoxide laser deliver laser radiation pulses. The pulses have a relatively broad wavelength-range, and slow rising and falling edges. The rising and falling edges of the pulses are clipped using and acousto-optic modulator. A dispersion-compensator compensates for dispersion in the clipped pulses introduced by the AOM. Achromatic focusing optics focus the dispersion-compensated, clipped pulses on the PCB for the via-hole drilling.

First claim

What is claimed is:

1. Apparatus for laser-drilling a work-piece, comprising:
a first acousto-optic modulator (AOM);
a carbon monoxide (CO) laser emitting laser-radiation pulses with radiation in the pulses having a plurality of wavelengths in a wavelength range between about 4.5 micrometers and about 6.0 micrometers, the radiation pulses having a temporal rising edge and a temporal falling edge and the laser radiation pulses being incident on the AOM in an incidence direction;
the AOM being arranged to receive the radiation pulses, disperse a central temporal portion of the pulses, excluding a portion of the rising edge and a portion of the falling edge, in a first range of wavelength-dependent dispersed directions at an angle to the incidence direction, and transmit residual portions of the pulses along the incidence direction;
a dispersion-compensator arranged to receive the central temporal portion of the pulses and reduce the range of dispersed directions to a second range less than the first range; and
at least one optical element arranged to achromatically focus the temporal pulse portions from the dispersion-compensator onto the work-piece.

2. The apparatus of claim 1 , wherein the dispersion compensator includes at least one prism.

3. The apparatus of claim 2 , wherein the dispersion compensator includes two prisms.

4. The apparatus of claim 2 , wherein the prism is a zinc sulfide prism.

5. The apparatus of claim 1 , wherein the dispersion compensator is a second AOM.

6. The apparatus of claim 1 , wherein the a central temporal portion of the pulses are dispersed by a first portion of the first AOM, the dispersion compensator is a second portion of the first AOM, and the apparatus further includes at least one reflective optical element arranged to steer the dispersed temporal central portion of the pulses around an optical path into the second portion of the first AOM.

7. The apparatus of claim 6 , wherein the at least one reflective optical element is a plane reflective optical element.

8. The apparatus of claim 6 , wherein the length of the optical path between the first and second portions of the first AOM is sufficient that the dispersed central portion of a pulse arrives at the second portion of the first AOM after the entire pulse has traversed the first portion of the first AOM.

9. The apparatus of claim 6 , wherein the apparatus includes two plane reflective optical elements arranged to steer the dispersed temporal central portion of the pulses around the optical path into the second portion of the first AOM.

10. The apparatus of claim 6 , wherein the apparatus includes a plane reflective optical element and first and second concave reflective optical elements arranged to steer the dispersed temporal central portion of the pulses around the optical path into the second portion of the first AOM.

11. The apparatus of claim 10 , wherein the first and second concave reflective optical elements have the same focal length are arranged face to face and spaced apart by twice the focal length.

12. The apparatus of claim 11 , wherein the dispersed central portion of the pulses is reflected from the first concave reflective optical element to the second concave reflective optical element, from the second concave reflective optical element to the plane reflective optical element, and from the plane reflective optical element to the second portion of the first AOM.

13. The apparatus of claim 1 , wherein the at least one focusing optical element is a concave mirror.

14. The apparatus of claim 1 , wherein the second range of directions is about parallel.

15. Apparatus for laser-drilling a work-piece, comprising:
a first acousto-optic modulator (AOM) sequentially operated by at least first and second RF signals having the same frequency but different magnitude;
a carbon monoxide (CO) laser emitting laser-radiation pulses with radiation in the pulses having a plurality of wavelengths in a wavelength range between about 4.5 micrometers and about 6.0 micrometers, the radiation pulses having a temporal rising edge and a temporal falling edge and the laser radiation pulses being incident on the AOM in an incidence direction;
the AOM being arranged to receive the radiation pulses, disperse first and second central temporal portions of the pulses excluding a portion of the rising edge and a portion of the falling edge through application to the AOM of the first and second FR signals, with the first and second temporal portions being dispersed in a first range of wavelength-dependent dispersed directions at an angle to the incidence direction, the first and second magnitudes of the RF signals being selected such that the peak power of the first and second temporally adjacent central temporal portions is about equal;
a dispersion-compensator arranged to receive the central temporal portions of the pulses and reduce the range of dispersed directions to a second range less than the first range; and
at least one optical element arranged to achromatically focus the temporal pulse portions from the dispersion-compensator onto the work-piece.

16. The apparatus of claim 15 , wherein the first and second RF signals are provided by a RF amplifier seeded by respectively first and second RF generators.

Assignees

• Coherent Inc

Inventors

• Hua Gongxue
• Mueller Eric R

Classifications

• B23K2101/42

  Printed circuits · CPC title

• B23K2103/50

  Inorganic materials other than metals or composite materials · CPC title

• H05K3/0026 Primary

  by laser ablation · CPC title

• B23K26/0643

  comprising mirrors · CPC title

• B23K26/40

  taking account of the properties of the material involved · CPC title