Schottky barrier diode

US9412882B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9412882-B2
Application numberUS-201514918129-A
CountryUS
Kind codeB2
Filing dateOct 20, 2015
Priority dateNov 9, 2011
Publication dateAug 9, 2016
Grant dateAug 9, 2016

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A Schottky barrier diode includes an n-type semiconductor layer including a Ga 2 O 3 -based compound semiconductor with n-type conductivity, and an electrode layer that is in Schottky-contact with the n-type semiconductor layer. A first semiconductor layer in Schottky-contact with the electrode layer and a second semiconductor layer having an electron carrier concentration higher than the first semiconductor layer are formed in the n-type semiconductor layer. The second semiconductor layer includes a β-Ga 2 O 3 substrate including a main plane rotated by an angle not less than 50° and not more than 90° with respect to a (100) plane thereof.

First claim

Opening claim text (preview).

What is claimed is: 1. A Schottky barrier diode, comprising: an n-type semiconductor layer comprising a Ga 2 O 3 -based compound semiconductor with n-type conductivity; and an electrode layer that is in Schottky-contact with the n-type semiconductor layer, wherein a first semiconductor layer in Schottky-contact with the electrode layer and a second semiconductor layer having an electron carrier concentration higher than the first semiconductor layer are formed in the n-type semiconductor layer, and wherein the second semiconductor layer comprises a β-Ga 2 O 3 substrate comprising a main plane rotated by an angle not less than 50° and not more than 90° with respect to a (100) plane thereof. 2. The Schottky barrier diode according to claim 1 , wherein a thickness of the first semiconductor layer is greater than a thickness of a depletion layer corresponding to a reverse withstand voltage. 3. The Schottky barrier diode according to claim 1 , wherein an electron carrier concentration in the first semiconductor layer is less than 1×10 17 /cm −3 . 4. The Schottky barrier diode according to claim 1 , wherein the electron carrier concentration in the second semiconductor layer is greater than 1×10 18 /cm −3 . 5. The Schottky barrier diode according to claim 3 , wherein the electron carrier concentration in the second semiconductor layer is greater than 1×10 18 /cm −3 . 6. The Schottky barrier diode according to claim 2 , wherein an electron carrier concentration in the first semiconductor layer is less than 1×10 17 /cm −3 . 7. The Schottky barrier diode according to claim 2 , wherein the electron carrier concentration in the second semiconductor layer is greater than 1×10 18 /cm −3 . 8. The Schottky barrier diode according to claim 6 , wherein the electron carrier concentration in the second semiconductor layer is greater than 1×10 18 /cm −3 .

Assignees

Inventors

Classifications

  • N-type · CPC title

  • being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

  • Crystal orientations · CPC title

  • being semiconductor metal oxides (Group IIB-VIA materials H10P14/2913) · CPC title

  • using physical deposition, e.g. vacuum deposition or sputtering · CPC title

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Frequently asked questions

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What does patent US9412882B2 cover?
A Schottky barrier diode includes an n-type semiconductor layer including a Ga 2 O 3 -based compound semiconductor with n-type conductivity, and an electrode layer that is in Schottky-contact with the n-type semiconductor layer. A first semiconductor layer in Schottky-contact with the electrode layer and a second semiconductor layer having an electron carrier concentration higher than the first…
Who is the assignee on this patent?
Tamura Seisakusho Kk
What technology area does this patent fall under?
Primary CPC classification H10P14/2918. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 09 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).