Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US9410852B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9410852-B2 |
| Application number | US-201414260076-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 23, 2014 |
| Priority date | Apr 23, 2013 |
| Publication date | Aug 9, 2016 |
| Grant date | Aug 9, 2016 |
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Provided is a freeze indicator, and more particularly, to a freeze indicator capable of easily confirming whether products are exposed to a freezing temperature or less using a development medium member containing a development material having hydrophobic property and moisture, and using diffusion characteristics of the development material into a development medium only when the moisture is frozen at a freezing temperature or less of the moisture.
Opening claim text (preview).
What is claimed is: 1. A freeze indicator comprising: a lower substrate; a development material member disposed on the lower substrate; a development medium member spaced apart from the development material member, disposed on the lower substrate, and containing moisture; and an upper cover attached to the lower substrate, and configured to block the development material member and the development medium member from the outside, wherein, when the freeze indicator starts an operation thereof, a development material is disposed around the development medium member, and the development material is diffused into the development medium member when exposed to a freezing temperature or less; wherein the upper cover comprises a convex section that forms a first receiving section configured to accommodate the development material member, and wherein to operate the freeze indicator, a pressure is applied from the outside to rupture the development material member through the convex section; and wherein the upper cover further comprises first and second projections protruding along an outer circumferential surface of the development medium member, and wherein a concave section formed between the first and second projections is configured to expand to accommodate the development material after the freeze indicator is operated. 2. The freeze indicator according to claim 1 , wherein the development material has a hydrophobic property. 3. The freeze indicator according to claim 1 , wherein the development material member comprises a development material formed of paraffin, and comprises a fat soluble pigment that is at least one of formed in a spherical shape and filled in a gelatin capsule. 4. The freeze indicator according to claim 1 , wherein the development medium member is a paper containing at least one of moisture and a thin film sheet formed of silica, and wherein the development medium member comprises a material configured such that the development material is diffused into the development medium member when exposed to the freezing temperature or less. 5. The freeze indicator according to claim 1 , wherein the moisture comprises other additives, and thus, the freezing temperature of the moisture is adjusted. 6. The freeze indicator according to claim 1 , wherein the lower substrate and the upper cover are formed of a material configured to seal the moisture and the development material from the outside. 7. The freeze indicator according to claim 1 , wherein the first and second projections are formed of a transparent material configured such that the starting of the operation of the freeze indicator is seen from the outside. 8. The freeze indicator according to claim 1 , wherein the upper cover further comprises: one or more transparent display window formed at a position corresponding to the position of the development medium member. 9. A freeze indicator comprising: a lower substrate; a development material member disposed on the lower substrate; a development medium member spaced apart from the development material member, disposed on the lower substrate, and containing moisture; and an upper cover attached to the lower substrate and configured to block the development material member and the development medium member from the outside, wherein, when the freeze indicator starts an operation thereof, a development material is disposed around the development medium member, and the development material is diffused into the development medium member when exposed to a freezing temperature or less; wherein the upper cover comprises a convex section that forms a first receiving section configured to accommodate the development material member, and wherein to operate the freeze indicator, a pressure is applied from the outside to rupture the development material member through the convex section; and wherein the upper cover further comprises an expansion section formed of an expandable material along the outer circumferential surface of the development medium member, and wherein the expansion section is configured to expand to accommodate the development material after the freeze indicator is operated. 10. The freeze indicator according to claim 9 , wherein the upper cover further comprises: one or more transparent display window formed at a position corresponding to the position of the development medium member.
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