FZ seed holder and pre-heater

Patent metadata

Field	Value
Publication number	US-9410263-B2
Application number	US-201313837047-A
Country	US
Kind code	B2
Filing date	Mar 15, 2013
Priority date	Mar 15, 2013
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

The device of according to the present invention is a device for holding a single crystal silicon seed. The device or holder contains a plurality of strips to clamp a seed crystal in the seed crystal holder; and a base supporting the plurality of strips. The plurality of strips each has a free end which contacts a single crystal silicon seed and an end opposite the free end which joins the base and becomes integral therewith. The plurality of strips are bent or folded in such that they exert pressure on a seed crystal when the seed crystal is inserted among the plurality of strips.

First claim

What is claimed is:

1. A seed crystal holder comprising:
a plurality of strips to clamp a seed crystal in the seed crystal holder; and
a base supporting the plurality of strips.

2. The seed crystal holder of claim 1 , wherein the plurality of strips and the base are of unitary construction.

3. The seed crystal holder of claim 1 , wherein the plurality of strips are resilient to accommodate and clamp different sized seed crystals therein.

4. The seed crystal holder of claim 1 , wherein one end of each of the plurality of strips terminates in the base supporting the plurality of strips becoming integral with the base.

5. The seed crystal holder of claim 1 , wherein the base is in a cylinder shape.

6. The seed crystal holder of claim 1 , wherein the plurality of strips is four strips and a portion of a free end of each of the strips is bent perpendicular to the longitudinal direction of the seed crystal holder to form a flattened part.

7. The seed crystal holder of claim 1 , wherein the seed crystal holder is made of tantalum.

8. The seed crystal holder of claim 1 , wherein each of the plurality of strips has at least two folds, one fold being at a portion of a free end at each of the strips and another fold being between the first fold and the other end of the strip which joins the base of the seed crystal holder.

9. A float zone apparatus comprising:
a crystal growth chamber;
a seed crystal holder further comprising:
a plurality of strips to clamp a seed crystal in the seed crystal holder; and
a base supporting the plurality of strips;

a polycrystal holder that holds a polycrystalline silicon rod;
an induction heating coil; and
a rotating device for rotating the seed crystal holder and the polycrystal holder.

Assignees

• Mitsubishi Polycrystalline Silicon America Corp (Mipsa)
• Mitsubishi Materials Corp

Inventors

• Smith Brian P
• Cook Christopher

Classifications

• C30B13/285 Primary

  Crystal holders, e.g. chucks · CPC title

• Y10S117/911

  Seed or rod holders · CPC title

• Y10T117/1076

  having means for producing a moving solid-liquid-solid zone · CPC title