Indexed inline substrate processing tool

Patent metadata

Field	Value
Publication number	US-9406538-B2
Application number	US-201314034921-A
Country	US
Kind code	B2
Filing date	Sep 24, 2013
Priority date	Oct 9, 2012
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

In some embodiments, an indexed inline substrate processing tool may include a substrate carrier having a base and pair of opposing substrate supports having respective substrate support surfaces that extend upwardly and outwardly from the base; and a plurality of modules coupled to one another in a linear arrangement, wherein each module of the plurality of modules comprises an enclosure having a first end, a second end, and a lower surface to support the substrate carrier and to provide a path for the substrate carrier to move linearly through the plurality of modules, and wherein at least one module of the plurality of modules comprises: a window disposed in a side of the enclosure; a heating lamp coupled to the side of the enclosure; a gas inlet disposed proximate a top of the enclosure; and an exhaust disposed opposite the gas inlet.

First claim

The invention claimed is:

1. An indexed inline substrate processing tool, comprising:
a substrate carrier having:
a base disposed horizontally along a bottom portion of the indexed inline substrate processing tool;
a pair of opposing substrate supports having respective substrate support surfaces that extend upwardly and outwardly arranged in a “v” shape from a top surface of the base, wherein each of the pair of opposing substrate supports is only supported along a bottom portion of the substrate support, and wherein the pair of substrate supports are configured to support at least one substrate such that a top surface of each substrate disposed on a first substrate support of the pair of substrate supports faces a top surface of another substrate disposed on a second substrate support of the pair of substrate supports; and
a plurality of slots formed in the top surface of the base, wherein each of the plurality of substrate supports are partially disposed within a respective each of the plurality of slots; and

a plurality of modules coupled to one another in a linear arrangement, wherein each module of the plurality of modules comprises an enclosure having a first end, a second end, and a lower surface to support the substrate carrier and to provide a path for the substrate carrier to move linearly through the plurality of modules from a first module of the plurality of modules, through any intervening modules, to a last module of the plurality of modules, and wherein at least one module of the plurality of modules comprises:
a window disposed in a side of the enclosure to allow radiant heat to be provided into the enclosure;
a heating lamp coupled to the side of the enclosure to provide radiant heat into the enclosure through the window;
a gas inlet disposed proximate a top of the enclosure to provide a process gas into the enclosure; and
an exhaust disposed opposite the gas inlet to remove the process gas from the enclosure.

2. The indexed inline substrate processing tool of claim 1 , wherein the base is fabricated from graphite.

3. The indexed inline substrate processing tool of claim 1 , further comprising a barrier disposed between each module and an adjacent module of the plurality of modules to isolate each module from the adjacent module.

4. The indexed inline substrate processing tool of claim 3 , wherein the barrier is one of a movable gate or a gas purge curtain.

5. The indexed inline substrate processing tool of claim 1 , wherein each module of the plurality of modules are configured to perform one of a gas purge, substrate temperature ramp, substrate bake, material deposition, post material deposition treatment or substrate cool down.

6. The indexed inline substrate processing tool of claim 1 , wherein the module further comprises a plurality of rollers on an inner surface of the plurality of modules to allow the substrate carrier to move through the plurality of modules.

7. The indexed inline substrate processing tool of claim 1 , wherein the substrate carrier slides on a track through the plurality of modules.

8. The indexed inline substrate processing tool of claim 7 , wherein the plurality of modules further comprise a lubricant disposed on an inner surface of at least one module of the plurality of modules.

9. The indexed inline substrate processing tool of claim 1 , wherein the plurality of modules further comprise a quartz liner disposed on an inner surface of at least one module of the plurality of modules.

10. The indexed inline substrate processing tool of claim 1 , further comprising:
a load module disposed at a first end of the indexed inline substrate processing tool to provide the substrate carrier to the indexed inline substrate processing tool; and
an unload module disposed at a second end, opposite the first end, of the indexed inline substrate processing tool to remove the substrate carrier from the indexed inline substrate processing tool.

11. The indexed inline substrate processing tool of claim 1 , further comprising:
a cleaning module disposed between after the last module of the plurality of modules and before the first module of the plurality of modules to clean the substrate carrier.

12. The indexed inline substrate processing tool of claim 1 , wherein the gas inlet comprises:
a first set of gas orifices configured to provide a jet flow of process gases; into the enclosure; and
a second set of gas orifices configured to provide a laminar flow of process gases into the enclosure.

13. An indexed inline substrate processing tool comprising:
a substrate carrier having:
a base disposed horizontally along a bottom portion of the indexed inline substrate processing tool, wherein the base includes:
a channel formed in a bottom surface of the base;
a hole formed in a top surface of the base and fluidly coupled to the channel to form a path for one or more gases to flow through the base; and
a conduit formed within the base circumscribing the channel to provide a cleaning gas to the channel; and

a pair of opposing substrate supports having respective substrate support surfaces that extend upwardly and outwardly arranged in a “v” shape from a top surface of the base, wherein each of the pair of opposing substrate supports is only supported along a bottom portion of the substrate support; and

a plurality of modules coupled to one another in a linear arrangement, wherein each module of the plurality of modules comprises an enclosure having a first end, a second end, and a lower surface to support the substrate carrier and to provide a path for the substrate carrier to move linearly through the plurality of modules from a first module of the plurality of modules, through any intervening modules, to a last module of the plurality of modules, and wherein at least one module of the plurality of modules comprises:
a window disposed in a side of the enclosure to allow radiant heat to be provided into the enclosure;
a heating lamp coupled to the side of the enclosure to provide radiant heat into the enclosure through the window;
a gas inlet disposed proximate a top of the enclosure to provide a process gas into the enclosure; and
an exhaust disposed opposite the gas inlet to remove the process gas from the enclosure.

Assignees

• Applied Materials Inc

Inventors

• Carlson David K

Classifications

• H10P72/0456

  in-line arrangement · CPC title

• H10P72/3206

  the substrate being handled substantially vertically · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P72/3314 Primary

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• C23C16/481

  by radiant heating of the substrate · CPC title