Transformer module and power module
US-2024363282-A1 · Oct 31, 2024 · US
US9406432B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9406432-B2 |
| Application number | US-201514706164-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 7, 2015 |
| Priority date | May 22, 2014 |
| Publication date | Aug 2, 2016 |
| Grant date | Aug 2, 2016 |
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An inductor includes a stacked body having a first through hole, and an insulation film covering the stacked body. The stacked body includes a first wiring, a first insulation layer stacked on the first wiring and including a second through hole exposing the first wiring, a first adhesive layer stacked on the first insulation layer and including a third through hole communicating with the second through hole, a second wiring stacked on the first adhesive layer and including a fourth through hole communicating with the third through hole, a second insulation layer stacked on the second wiring and including a fifth through hole communicating with the fourth through hole, and a first through electrode with which the second to fifth through holes are filled. The first and second wirings are connected to form a helical coil. The fifth through hole has a larger planar shape than the fourth through hole.
Opening claim text (preview).
The invnetion claimed is: 1. An inductor comprising: a stacked body; a first through hole that extends through the stacked body in a thickness direction; and an insulation film that covers a surface of the stacked body, wherein the stacked body includes: a first wiring; a first insulation layer stacked on an upper surface of the first wiring, wherein the first insulation layer includes a second through hole exposing a portion of the upper surface of the first wiring; a first adhesive layer stacked on an upper surface of the first insulation layer, wherein the first adhesive layer includes a third through hole communicating with the second through hole; a second wiring stacked on an upper surface of the first adhesive layer, wherein the second wiring includes a fourth through hole communicating with the third through hole; a second insulation layer stacked on an upper surface of the second wiring, wherein the second insulation layer includes a fifth through hole, which communicates with the fourth through hole, and a sixth through hole, which exposes a portion of the upper surface of the second wiring; and a first through electrode, wherein the second through hole, the third through hole, the fourth through hole, and the fifth through hole are filled with the first through electrode; wherein: the first wiring and the second wiring are connected in series to form a helical coil; and the fifth through hole has a larger planar shape than the fourth through hole. 2. The inductor according to claim 1 , wherein: the second through hole has a larger planar shape than the third through hole; the first adhesive layer covers a portion of a side surface of the second wiring and covers an inner side surface of the second through hole; and the third through hole is partially formed in the second through hole. 3. The inductor according to claim 1 , wherein: the first insulation layer further includes a seventh through hole; the first wiring includes an eighth through hole; and the stacked body further includes a second adhesive layer stacked on a lower surface of the first wiring, wherein the second adhesive layer includes a ninth through hole communicating with the seventh through hole and the eighth through hole, and a second through electrode, wherein the seventh through hole, the eighth through hole, and the ninth through hole are filled with the second through electrode; wherein the second through electrode includes a lower end face exposed from a lower surface of the second adhesive layer. 4. The inductor according to claim 1 , wherein the stacked body further includes: a second adhesive layer stacked on a lower surface of the first wiring; a substrate stacked on a lower surface of the second adhesive layer; a third insulation layer stacked on a lower surface of the substrate; and a third wiring stacked on a lower surface of the third insulation layer and located in a lowermost layer of the stacked body; wherein: the third wiring, the first wiring, and the second wiring are connected in series to form the helical coil; and the substrate is thicker than each of the first insulation layer, the second insulation layer, and the third insulation layer. 5. The inductor according to claim 1 , wherein the stacked body further includes: a third adhesive layer stacked on an upper surface of the second insulation layer, wherein the third adhesive layer includes a tenth through hole communicating with the sixth through hole; a fourth wiring stacked on an upper surface of the third adhesive layer, wherein the fourth wiring includes an eleventh through hole communicating with the tenth through hole; a fourth insulation layer that includes a twelfth through hole communicating with the eleventh through hole; and a third through electrode, wherein the sixth through hole, the tenth through hole, the eleventh through hole, and the twelfth through hole are filled with the third through electrode; wherein: the twelfth through hole has a larger planar shape than the eleventh through hole; the sixth through hole has a larger planar shape than the tenth through hole; the third adhesive layer covers a portion of a side surface of the fourth wiring and covers an inner side surface of the sixth through hole; and the tenth through hole is partially formed in the sixth through hole. 6. The inductor according to claim 1 , wherein: the helical coil includes two connecting portions respectively arranged on two ends of the helical coil; the insulation film covers a side surface of the first wiring and a side surface of the second wiring, which are exposed from an inner wall surface of the first through hole; the connecting portions are exposed from the insulation film; and the inductor further comprises: an encapsulation resin that covers the stacked body and the insulation film excluding the connecting portions, wherein the first through hole is filled with the encapsulation resin; and two electrodes that cover the encapsulation resin, wherein the two electrodes are electrically connected to the two connecting portions, respectively; wherein the encapsulation resin contains a magnetic body. 7. A coil substrate comprising: a block including a plurality of unit coil substrates formed in a plurality of regions, wherein each of the unit coil substrates includes: a stacked body; a first through hole that extends through the stacked body in a thickness direction; and an insulation film that covers a surface of the stacked body, wherein the stacked body includes: a first wiring; a first insulation layer stacked on an upper surface of the first wiring, wherein the first insulation layer includes a second through hole exposing a portion of the upper surface of the first wiring; a first adhesive layer stacked on an upper surface of the first insulation layer, wherein the first adhesive layer includes a third through hole communicating with the second through hole; a second wiring stacked on an upper surface of the first adhesive layer, wherein the second wiring includes a fourth through hole communicating with the third through hole; a second insulation layer stacked on an upper surface of the second wiring, wherein the second insulation layer includes a fifth through hole, which communicates with the fourth through hole, and a sixth through hole, which exposes a portion of the upper surface of the second wiring; and a first through electrode, wherein the second through hole, the third through hole, the fourth through hole, and the fifth through hole are filled with the first through electrode; wherein: the first wiring and the second wiring are connected in series to form a helical coil; and the fifth through hole has a larger planar shape than the fourth through hole. 8. The coil substrate according to claim 7 , wherein the stacked body further includes; a second adhesive layer stacked on a lower surface of the first wiring; a substrate stacked on a lower surface of the second adhesive layer; a third insulation layer stacked on a lower surface of the substrate; and a third wiring stacked on a lower surface of the third insulation layer and located in a lowermost layer of the stacked body; wherein: the coil substrate further comprises an outer frame formed by the substrate and extending toward an outer side from the block; and the outer frame includes a through hole used for conveying or positioning the coil substrate.
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