Optical system of a microlithographic projection exposure apparatus

Patent metadata

Field	Value
Publication number	US-9405202-B2
Application number	US-201514737965-A
Country	US
Kind code	B2
Filing date	Jun 12, 2015
Priority date	Jan 24, 2013
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

The invention relates to an optical system of a microlithographic projection exposure apparatus, comprising at least one mirror arrangement having a plurality of mirror elements which are adjustable independently of one another for the purpose of changing an angular distribution of the light reflected by the mirror arrangement, and a polarization-influencing optical element, which generates, for impinging light having a constantly linear or a circular input polarization distribution, an output polarization distribution having a direction of polarization that varies continuously over the light beam cross section.

First claim

The invention claimed is:

1. An optical system, comprising:
a mirror arrangement comprising a plurality of mirror elements, the plurality of mirror elements being adjustable independently relative to each other to change an angular distribution of light reflected by the mirror arrangement; and
a polarization-influencing optical element configured so that, when light having a constantly linear polarization distribution or a circular input polarization distribution impinges on the polarization-influencing optical element, the polarization-influencing optical element generates a light beam having an output polarization distribution with a direction of polarization that varies continuously over a cross-section of the light beam,
wherein:
the polarization-influencing optical element has a geometry selected from the group consisting of a plane-parallel geometry and a wedge-section-shaped geometry; and
the optical system is a microlithographic optical system.

2. The optical system of claim 1 , wherein the polarization-influencing optical element has a plane-parallel geometry.

3. The optical system of claim 1 , wherein the polarization-influencing optical element has linear birefringence with a direction of a fast axis of birefringence that varies over an optically effective surface of the polarization-influencing optical element.

4. The optical system of claim 3 , wherein the optical system has an optical system axis, and the direction of the fast axis of birefringence of the polarization-influencing optical element varies in an azimuthal direction with respect to the optical system axis.

5. The optical system of claim 1 , wherein the polarization-influencing optical element has a retardation with a constant absolute value over an optically effective surface of the polarization-influencing optical element.

6. The optical system of claim 5 , wherein the retardation is lambda/2, and lambda is an operating wavelength of the optical system.

7. The optical system of claim 5 , wherein the retardation is lambda/4, and lambda is an operating wavelength of the optical system.

8. The optical system of claim 1 , wherein the polarization-influencing optical element has a wedge-section-shaped geometry.

9. The optical system of claim 8 , wherein the polarization-influencing optical element comprises an optically active material.

10. The optical system of claim 8 , further comprising a compensator element having a geometry which is complementary to the geometry of the polarization-influencing optical element to compensate for a ray deflection caused by the polarization-influencing optical element.

11. The optical system of claim 1 , wherein the polarization-influencing optical element comprises an optically active material.

12. The optical system of claim 8 , further comprising a compensator element having a geometry which is complementary to the geometry of the polarization-influencing optical element to compensate for a ray deflection caused by the polarization-influencing optical element.

13. The optical system of claim 1 , further comprising a compensator element having a geometry which is complementary to the geometry of the polarization-influencing optical element to compensate for a ray deflection caused by the polarization-influencing optical element.

14. The optical system of claim 1 , further comprising a polarization-influencing optical arrangement comprising a plurality of optical components that are adjustable relative to each other with a degree of overlap that is variable in a propagation direction of the light, wherein the optical system is configured so that, in conjunction with the mirror arrangement and the polarization-influencing optical element, different output polarization distributions are generated by adjusting of the degree of overlap of the optical components.

15. The optical system of claim 14 , wherein the optical system is configured so that the adjustment sets different polarization rotation angles of a preferred direction of polarization of light passing through the polarization-influencing optical arrangement.

16. The optical system of claim 15 , wherein polarization rotation angles correspond to an integral multiple of 22.5°.

17. The optical system of claim 15 , wherein polarization rotation angles correspond to an integral multiple of 45°.

18. The optical system of claim 1 , wherein the optical system is configured so that a polarization rotation angle produced by the polarization-influencing optical element over the light beam cross section is a maximum of 45°.

19. The optical system of claim 1 , wherein the optical system is configured so that the output polarization distribution in at least one configuration of the mirror arrangement and the polarization-influencing optical element is an at least approximately tangential polarization distribution or an at least approximately radial polarization distribution.

20. The optical system of claim 1 , wherein the optical system is configured so that an illumination setting generated in a pupil plane of the optical system is selected from the group consisting of an annular illumination setting, a dipole illumination setting and a quadrupole illumination setting.

21. An apparatus, comprising:
an illumination device comprising an optical system; and
a projection lens,
wherein:
a member comprises an optical system according to claim 19 ;
the member comprises a member selected from the group consisting of the illumination system and the projection objective; and
the apparatus is a microlithographic projection exposure apparatus.

22. A method of operating a microlithographic projection exposure apparatus which comprises an illumination device and a projection objective, the method comprising:
using the illumination device to illuminate structures of a mask;
using the projection objective to project at least a portion of the illuminated structures onto a light-sensitive material,
wherein:
a member comprises an optical system according to claim 19 ;
the member comprises a member selected from the group consisting of the illumination system and the projection objective.

23. The optical system of claim 1 , wherein:
the polarization-influencing optical element has a first surface and a second surface that are on the opposite side of the polarization-influencing optical element;
the polarization-influencing optical element is configured so that, during use of the optical system, the light having a constantly linear polarization distribution or a circular input polarization distribution impinges on the first surface of the polarization-influencing optical element; and
the polarization-influencing optical element is configured so that, during use of the optical system, the light beam having the output polarization distribution with the direction of polarization that varies continuously over the cross-section of the light beam emerges from the second surface of the polarization-influencing optical element.

24. The optical system of claim 1 , wherein the polarization-influencing optical element comprises quartz.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Saenger Ingo
• Hennerkes Christoph

Classifications

• G03F7/70116 Primary

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title

• G03F7/70566

  Polarisation control · CPC title

• G03F7/70191 Primary

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title