Self-assembled structures, method of manufacture thereof and articles comprising the same

Patent metadata

Field	Value
Publication number	US-9405189-B2
Application number	US-201314020371-A
Country	US
Kind code	B2
Filing date	Sep 6, 2013
Priority date	Sep 6, 2013
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

Disclosed herein is a photoresist composition comprising a graft block copolymer; a solvent and a photoacid generator; where the graft block copolymer comprises a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety that comprises a halocarbon moiety or a silicon containing moiety; and a second block polymer; the second block polymer being covalently bonded to the first block; wherein the second block comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to undergo deprotection and alter the solubility of the graft block copolymer; where the graft block copolymer has a bottle brush topology.

First claim

What is claimed is:

1. A photoresist composition comprising:
a graft block copolymer; a solvent and a photoacid generator;
where the graft block copolymer comprises a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety that comprises a halocarbon moiety or a silicon containing moiety; and a second block polymer; the second block polymer being covalently bonded to the first block polymer; wherein the second block polymer comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to undergo deprotection and alter the solubility of the graft block copolymer; where the graft block copolymer has a bottle brush topology.

2. The photoresist composition of claim 1 , where the backbone polymer is a polynorbornene, where the first graft polymer is a polymer derived from the polymerization of a fluorinated (meth)acrylate or a fluorinated (meth)acrylic and where the second graft polymer comprises a poly(1-tri(alkyl)methyl methacrylate).

3. The photoresist composition of claim 1 , where the first graft polymer comprises poly(5,5,5-trifluoro-4-hydroxy-2-methyl-4-(trifluoromethyl)pentyl methacrylate) and where the second graft polymer comprises poly(1-ethylcyclopentyl methacrylate).

4. The photoresist composition of claim 1 , where the second graft polymer comprises a first block copolymer and a second block copolymer; where the first block copolymer comprises poly(1-ethylcyclopentyl methacrylate) and poly(triphenylsulfonium 1,1-difluoro-2-(methacryloxy)ethanesulfonate) and where the second block copolymer comprises poly(1-ethylcyclopentyl methacrylate) and poly(γ-butyrolactone-2-yl methacrylate).

5. The photoresist composition of claim 1 , where the first graft polymer and/or the second graft polymer comprise a functional group that undergoes acid-catalyzed deprotection causing a change of solubility of the graft block copolymer in a developer solvent and where the graft block copolymer further comprises the photoacid generator.

6. The photoresist composition of claim 1 , where the photoacid generator is covalently bonded to the graft block copolymer and where the photoresist composition further comprises an amine or amide additive in a stoichiometric amount lower than the number of moles of photoacid generator.

7. The photoresist composition of claim 1 , where the functional group is an acid-catalyzed deprotectable moiety that is selected from the group consisting of esters, acetals, acyls, orthoesters, silyl esters, thioesters, carbonates, peroxides, benzoyls, silyl ethers, tetrahydrapyranyl, tetrahydrofuranyl, trityl, alkoxyalkyl ethers, carbamates, tosyl amines, tosyl amides, sulfonamides, oxazolines, phosphate esters, propargyls, or a combination comprising at least one of the foregoing acid-catalyzed deprotectable moieties.

8. A method of manufacturing a photoresist composition comprising:
disposing a graft block copolymer, a solvent and a photoacid generator on a substrate; where the graft block copolymer comprises a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety that comprises a halocarbon moiety or a silicon containing moiety; and a second block polymer; the second block polymer being covalently bonded to the first block polymer; wherein the second block polymer comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to undergo deprotection and alter the solubility of the graft block copolymer; where the graft block copolymer has a bottle brush topology;
baking the graft block copolymer;
exposing the graft block copolymer to radiation; and
contacting the graft block copolymer with an aqueous alkaline developer solution to yield a positive tone patterned image; or
contacting the graft block copolymer with a solvent developer solution to yield a negative tone patterned image.

9. The method of claim 8 , where the disposing of the graft block copolymer, the solvent and the photoacid generator on the substrate results in the graft block copolymer forming a self assembled film on the substrate.

10. The method of claim 8 , where the baking of the graft block copolymer takes place at a temperature of 273 to 323 degrees Kelvin.

Assignees

• Texas A & M Univ Sys
• Rohm & Haas Elect Mat

Inventors

• Cho Sangho
• Sun Guorong
• Wooley Karen L
• Thackeray James W
• Trefonas Iii Peter

Classifications

• G03F7/0045

  with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G03F7/325

  Non-aqueous compositions · CPC title

• G03F7/322

  Aqueous alkaline compositions · CPC title

• C08K5/20

  Carboxylic acid amides · CPC title