Semiconductor device and method of forming a vertical interconnect structure for 3-D FO-WLCSP

US9401331B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9401331-B2
Application numberUS-201414267800-A
CountryUS
Kind codeB2
Filing dateMay 1, 2014
Priority dateDec 12, 2008
Publication dateJul 26, 2016
Grant dateJul 26, 2016

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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Abstract

Official abstract text for this publication.

A semiconductor device is made by forming a first conductive layer over a carrier. The first conductive layer has a first area electrically isolated from a second area of the first conductive layer. A conductive pillar is formed over the first area of the first conductive layer. A semiconductor die or component is mounted to the second area of the first conductive layer. A first encapsulant is deposited over the semiconductor die and around the conductive pillar. A first interconnect structure is formed over the first encapsulant. The first interconnect structure is electrically connected to the conductive pillar. The carrier is removed. A portion of the first conductive layer is removed. The remaining portion of the first conductive layer includes an interconnect line and UBM pad. A second interconnect structure is formed over a remaining portion of the first conductive layer is removed.

First claim

Opening claim text (preview).

What is claimed: 1. A method of making a semiconductor device, comprising: providing a first conductive layer; forming a conductive pillar over a first surface of a first portion of the first conductive layer; disposing a semiconductor die over the first surface of a second portion of the first conductive layer; and forming a bump over a second surface of the first conductive layer opposite the first surface of the conductive layer to contact the first portion of the first c…

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What does patent US9401331B2 cover?
A semiconductor device is made by forming a first conductive layer over a carrier. The first conductive layer has a first area electrically isolated from a second area of the first conductive layer. A conductive pillar is formed over the first area of the first conductive layer. A semiconductor die or component is mounted to the second area of the first conductive layer. A first encapsulant is …
Who is the assignee on this patent?
Stats Chippac Ltd, Stats Chippac Pte Ltd
What technology area does this patent fall under?
Primary CPC classification H10P72/74. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jul 26 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).