Lithographic apparatus and a method of operating the apparatus
US-12072635-B2 · Aug 27, 2024 · US
US9400431B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9400431-B2 |
| Application number | US-201314138150-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 23, 2013 |
| Priority date | Dec 23, 2013 |
| Publication date | Jul 26, 2016 |
| Grant date | Jul 26, 2016 |
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A supporting assembly configured to support a plurality of tubes includes a first supporting rod, a second supporting rod opposite to the first supporting rod, a bridging member, and a rolling member. The first supporting rod includes several first parallel recesses. The bridging member is connected to one end of the first supporting rod or one end of the second supporting rod. The rolling member is received by the bridging member.
Opening claim text (preview).
What is claimed is: 1. A supporting assembly configured to support a plurality of tubes capable of transporting fluids, comprising: a first supporting rod comprising a plurality of first parallel recesses; a second supporting rod disposed opposite to the first supporting rod; wherein the second supporting rod comprises a plurality of second parallel recesses; a bridging member connected to one end of the first supporting rod or one end of the second supporting rod; and a rolling ball disposed directly below a longitudinal axis of the first and second supporting rods and received by the bridging member, the rolling ball capable of moving the supporting assembly. 2. The structure according to claim 1 , further comprising a fastening member fixed on the first or the second supporting rods. 3. The structure according to claim 2 , wherein the first supporting rod is fastened to the second supporting rod by the fastening member. 4. The structure according to claim 1 , wherein the first parallel recesses are configured to receive the tubes. 5. The structure according to claim 1 , wherein the first supporting rod is pivotally connected to the second supporting rod. 6. The structure according to claim 1 , wherein each of the first parallel recesses has an arc contour. 7. The structure according to claim 1 , wherein each of the second parallel recesses has an arc contour. 8. The structure according to claim 1 , wherein the second parallel recesses are configured to receive the tubes. 9. The structure according to claim 1 , wherein the first parallel recesses and the second parallel recesses constitute a plurality of parallel through holes. 10. The structure according to claim 9 , wherein each of the parallel through holes has a cylindrical contour. 11. A method for using the structure according to claim 1 , wherein the tubes are disposed above a platform and respectively connected to an apparatus, the method comprising: disposing the tubes in the first parallel recesses of the first supporting rod; and moving the rolling element on the platform. 12. The method according to claim 11 , further comprising a fastening member fixed on the first or the second supporting rods. 13. The method according to claim 12 , wherein the first supporting rod is fastened to the second supporting rod by the fastening member. 14. The method according to claim 11 , wherein the first supporting rod is pivotally connected to the second supporting rod. 15. The method according to claim 11 , wherein the first parallel recesses and the second parallel recesses constitute a plurality of parallel through holes. 16. The method according to claim 11 , further comprising moving the rolling ball on the platform in a reciprocating way. 17. A support mechanism, comprising: a flexible plate; and the supporting assembly of claim 1 attached to the flexible plate.
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characterised by the processes involved to create the masks · CPC title
characterised by their behaviours during the lithography processes, e.g. soluble masks or redeposited masks · CPC title
characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title
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