Compact high energy ion implantation system
US-2019371562-A1 · Dec 5, 2019 · US
US9398681B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9398681-B2 |
| Application number | US-201414207376-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 12, 2014 |
| Priority date | Jul 20, 2012 |
| Publication date | Jul 19, 2016 |
| Grant date | Jul 19, 2016 |
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A microwave circuit for a linear accelerator includes multiple monolithic metallic cell plates stacked upon each other so that the beam axis passes vertically through a central acceleration cavity of each plate. Each plate has a directional coupler with coupling arms. A first coupling slot couples the directional coupler to an adjacent directional coupler of an adjacent cell plate, and a second coupling slot couples the directional coupler to the central acceleration cavity. Each directional coupler also has an iris protrusion spaced from corners joining the arms, a convex rounded corner at a first corner joining the arms, and a corner protrusion at a second corner joining the arms.
Opening claim text (preview).
The invention claimed is: 1. A microwave circuit for a linear accelerator, the microwave circuit comprising multiple monolithic metallic cell plates, a distribution waveguide, and a sequence of feed arms; wherein the cell plates are stacked upon each other and grouped to form a sequence of cell sections; wherein each of the feed arms has two slots coupled symmetrically on opposite sides of the distribution waveguide, wherein the two slots are coupled to adjacent cell sections. 2. The microwave circuit of claim 1 wherein each of the feed arms is designed to provide equal power and appropriately correlated phases to the adjacent cell sections. 3. The microwave circuit of claim 1 wherein each of the feed arms has a short circuit length equal to a quarter of a waveguide wavelength. 4. The microwave circuit of claim 1 wherein each of the cell sections has four cells. 5. A microwave circuit for a linear accelerator, the microwave circuit comprising multiple monolithic metallic cell plates, a distribution waveguide, and a sequence of feed arms; wherein the cell plates are stacked upon each other and grouped to form a sequence of cell sections; wherein each of the feed arms has a short circuit length equal to a quarter of a waveguide wavelength; wherein each of the feed arms has two slots coupled symmetrically on opposite sides of the distribution waveguide, wherein the two slots are coupled to adjacent cell sections.
Standing-wave linear accelerators · CPC title
Cavities; Resonators {(travelling-wave tubes H01J23/18; hyperfrequency cavities in general H01P7/04, H01P7/06)} · CPC title
Coupling cavity LINACS, e.g. side coupled · CPC title
Circuits or systems for supplying or feeding radio-frequency energy · CPC title
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