Multi-actuator design and control for a high-speed/large-range nanopositioning system

Patent metadata

Field	Value
Publication number	US-9397587-B2
Application number	US-201414547480-A
Country	US
Kind code	B2
Filing date	Nov 19, 2014
Priority date	Nov 20, 2013
Publication date	Jul 19, 2016
Grant date	Jul 19, 2016

Abstract

Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.

First claim

What is claimed is:

1. Multi-actuator system for nanopositioning control comprising:
at least two nanopositioners having different ranges and bandwidths located in cascaded series form to contact and move an object; and
a control system to combine the at least two nanopositioners so as to apportion actuation responsibilities among the at least two nanopositioners and to compensate for their coupled dynamics while moving the object, the system including a separate controller for controlling separately each of the at least two nanopositioners and wherein parameters of the separate controllers are determined by minimizing output error.

2. The system of claim 1 wherein the controller system employs a data-based control design scheme.

3. The system of claim 1 wherein the at least two nano positioners each contain a piezoelectric stack.

4. The system of claim 1 wherein the at least two nano positioners position the object in an atomic force microscope scanner.

5. The system of claim 1 wherein the control system comprises a PID unit cascaded by a single-input multi-output auxiliary control system including several subcomponents G n v/l (n=1, . . . , N).

6. The system of claim 1 wherein a) apportioning of the actuation responsibility and b) compensation of the dynamic coupling for every single actuator component are implemented either through a single auxiliary control unit or multiple cascaded units.

7. The system of claim 1 wherein part or all of the components of the control system are designed to cooperatively achieve a flat passband for a multi-actuator positioner.

8. The system of claim 7 wherein all or part of the subcomponent control units G n v/l (n=1, . . . , N) are obtained through a model fitting and model inversion in order to effectuate a compensation for the dynamics.

9. The system of claim 7 wherein each of the subcomponent control units G n v/l (n=1, . . . , N) are obtained by combining/cascading, several subunits including frequency assignment filters and dynamic-compensation filters.

10. The system of claim 1 wherein all or some of the subcomponent control units implement a) a frequency division of positioning responsibility and/or b) compensate for the inherent structural dynamics or those dynamics due to a coupling between cascaded actuators.

11. The system of claim 10 wherein the subcomponent control units G n v/l (n=1, . . . , N) implement fully or partially an inverse dynamics of the multi-actuator nano positioner.

12. The system of claim 1 wherein the multi-actuator nano-positioner positions an object in the lateral (horizontal) direction a) to scan a sample in an atomic force microscope to directly obtain large-view AFM images or to enable combining several smaller captured images in order to form larger views, or h) to change the imaging site from one sample site to another across larger ranges.

13. The system of claim 1 wherein the multi-actuator nano-positioner positions an object in the vertical (out-of-plane) direction to follow the sample surface topography in an atomic force microscope across larger ranges.

Assignees

• Massachusetts Inst Technology

Inventors

• Youcef-Toumi Kamal
• Bozchalooi Iman Soltani
• Houck Andrew Careaga

Classifications

• G01Q10/06

  Circuits or algorithms therefor · CPC title

• H02N2/04

  Constructional details · CPC title

• G01Q10/04 Primary

  Fine scanning or positioning · CPC title

• G01Q30/04

  Display or data processing devices · CPC title

• H02N2/06 Primary

  Drive circuits; Control arrangements {or methods} · CPC title