Image sensor and manufacturing process thereof
US-2024347559-A1 · Oct 17, 2024 · US
US9397129B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9397129-B2 |
| Application number | US-201414221602-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 21, 2014 |
| Priority date | Mar 15, 2013 |
| Publication date | Jul 19, 2016 |
| Grant date | Jul 19, 2016 |
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Among other things, one or more image sensors and techniques for forming such image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises a calibration region configured to detect a color level for image reproduction, such as a black calibration region configured to detect a black level for an image detected by the photodiode array. The image sensor comprises a dielectric film that is formed over the photodiode array and the calibration region. The dielectric film is configured to balance stress between the photodiode and the calibration region in order to improve accuracy of the calibration region.
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What is claimed is: 1. An image sensor, comprising: a photodiode array comprising one or more photodiodes configured to detect light; a calibration region configured to define a color level for image reproduction, the calibration region formed laterally spaced apart from the photodiode array; a dielectric layer formed over and in direct contact with the photodiode array; and a dielectric film formed over the photodiode array and the calibration region and in contact with the…
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