System and method for providing electromagnetic imaging through electroquasistatic sensing

Patent metadata

Field	Value
Publication number	US-9395317-B2
Application number	US-201414181103-A
Country	US
Kind code	B2
Filing date	Feb 14, 2014
Priority date	Jan 28, 2009
Publication date	Jul 19, 2016
Grant date	Jul 19, 2016

Abstract

A system and method for providing electromagnetic imaging through electroquasistatic sensing contains an electromagnetic sensor for imaging a sample. The electromagnetic sensor contains drive/sense electronics and a pixelated sensor array having an array of capacitive sensor electrodes that source electric fields that interact with the sample, and wherein the electrodes are individually drivable by the drive/sense electronics in a coordinated manner to establish a desired temporal and spatial pattern in which electrical properties of the electrodes are used to generate an image. Other components of the system include a precision motion controller, sensor head and associated electronics, and a computer for performing data acquisition and signal inversion.

First claim

We claim:

1. An electromagnetic sensor for imaging a sample, comprising:
drive/sense electronics;
a pixelated sensor array having an array of capacitive sensor electrodes that source and/or sense electric fields that interact with the sample, and wherein, the electrodes are individually drivable by the drive/sense electronics to establish a desired temporal and spatial pattern in which electrical properties of interaction between the electrodes and the sample are used to generate an image; and
a sensor head and associated electronics for interfacing with the pixilated sensor array and drive/sense electronics, and for transmitting the electrical properties of the electrodes to a computer for generation of the image,
where in an active mode, at least a portion of the electrodes within the array of electrodes are individually drivable by independent voltage or current sources to excite the individual electrodes.

2. The sensor of claim 1 , wherein the computer further contains a first module for providing data acquisition from the sensor head and electronics, and a second module for signal inversion of data received from the pixelated sensor array.

3. The sensor of claim 1 , wherein the electrodes are microfabricated on the same substrate as the drive/sense electronics.

4. The sensor of claim 1 , wherein penetration depths are controlled by drive pattern.

5. The sensor of claim 1 , wherein the array of electrodes is arranged as a linear array having sense and guard components, forming an electronic brush.

6. The sensor of claim 1 , wherein the array of electrodes is arranged as a grid array having sense and guard components, forming an electronic brush.

7. The sensor of claim 1 , where in a passive mode, at least a portion of the electrodes within the array of electrodes sense electric or magnetic fields from the sample by monitoring a spatial current or voltage profile induced along the sensor array when the sensor array is in close proximity to a signal provided by the sample.

8. The sensor of claim 1 , wherein at least one electrode within the array of electrodes does not have the same dimension as other electrodes within the array of electrodes, resulting in pixels having different shapes and/or sizes.

9. The sensor of claim 1 , wherein the capacitive sensor electrodes are separated by a symmetry plane, where electrodes to a first side of the symmetry plane are driven by a first voltage and where electrodes to a second side of the symmetry plane are driven by a second voltage.

10. The sensor of claim 1 , wherein the capacitive sensor electrodes are separated by a symmetry plane, where a first electrode located on a first side of the symmetry plane, is paired with a second electrode located on a second side of the symmetry plane, resulting in a first electrode pair, wherein electroquasistatic fields that emanate from the first electrode pair are capable of penetrating the sample at a first depth based on the spacing between the first electrode and the second electrode.

11. The sensor of claim 10 , wherein the array of capacitive sensor electrodes further comprises additional electrode pairs, wherein each pair of electrodes is capable of penetrating the sample at various depths based on its spacing and electroquasistatic fields that emanate from each pair.

12. The sensor of claim 11 , wherein the electrode array is driven with a short spatial wavelength to limit a range of evanescent fields of the electrodes so as to allow the electromagnetic sensor to detect particles located on a surface of the sample.

13. The sensor of claim 1 , wherein the array of capacitive sensor electrodes is arranged to provide a sensor array layout selected from the group consisting of a line array, a grid array, a guarded array, a coaxial/concentric array, a non-uniformly spaced array, and an array designed for locating specific features of the sample.

14. The sensor of claim 1 , wherein more than one sensor head is stacked in the z-axis to add a two-dimensional character to the sensor head, allowing one mechanical pass of the sensor head to separately sense different parallel strips of the sample.

15. The sensor of claim 1 , wherein a high-permeability, high-conductivity guard material is located above the pixelated sensor array, preventing magnetic fields from penetrating the guard material, but instead bend and flow tangentially along the surface of the guard material.

16. The sensor of claim 1 , wherein the pixelated sensor array is maintained at a desired distance from the sample via the computer providing feedback control on sensor variables.

17. The sensor of claim 16 , wherein the variables are selected from the group consisting of electrode impedance and coil inductance, taken at single or multiple pixels, or averaged over some function of pixels, or via separate conventional sensing mechanisms.

18. The sensor of claim 1 , wherein the pixelated sensor array is maintained a distance from the surface of the sample by implementing feedback position control via sensing capacitance from the sample.

19. The sensor of claim 1 , wherein the pixelated sensor array is maintained a distance from the surface of the sample by maintaining an average impedance over the sensor array constant in order to maintain the distance.

20. The sensor of claim 1 , wherein the pixelated sensor array is used in the mass production of integrated circuits to detect defects that might arise during fabrication of the integrated circuits.

21. The sensor of claim 1 , wherein the pixelated sensor array size is smaller than the wavelength of light at a chosen frequency of interest.

Assignees

• Massachusetts Inst Technology

Inventors

• Cannon Benjamin Louis
• Trumper David L
• Lang Jeffrey H
• Zahn Markus

Classifications

• G01Q60/02

  Multiple-type SPM, i.e. involving more than one SPM techniques · CPC title

• G01N27/72

  by investigating magnetic variables · CPC title

• B82Y35/00 Primary

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01R29/0892

  Details related to signal analysis or treatment; presenting results, e.g. displays; measuring specific signal features other than field strength, e.g. polarisation, field modes, phase, envelope, maximum value · CPC title

• G01N27/24 Primary

  Investigating the presence of flaws · CPC title