Array substrate, detecting method and detecting apparatus thereof

Patent metadata

Field	Value
Publication number	US-9389442-B2
Application number	US-201314395597-A
Country	US
Kind code	B2
Filing date	Apr 10, 2013
Priority date	Feb 5, 2013
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

The present disclosure provides an array substrate comprising a structure to be detected disposed on a base substrate. An additional layer for detecting the structure to be detected is broken is disposed below the structure to be detected. The additional layer has a color different from that of the structure to be detected and a same pattern shape as that of the structure to be detected. The present disclosure also provides a detecting method and detecting apparatus of the array substrate described above. According to the array substrate, the detecting method and the detecting apparatus of the present disclosure, an early detection of the breakage defect occurred during the fabrication process of the array substrate can be achieved so as to discover and eliminate those defects as early as possible, which improves throughput and yield.

First claim

The invention claimed is:

1. An array substrate, comprising: a structure to be detected disposed on a base substrate, wherein an additional layer for detecting whether the structure to be detected is broken is disposed below the structure to be detected, wherein the additional layer has a color different from that of the structure to be detected and a same pattern shape as that of the structure to be detected, the structure to be detected is at least one of following structures: a gate, a gate scanning line, a data signal line, an active layer, a source, and a drain.

2. The array substrate according to claim 1 , wherein a transparent protective layer is disposed above the additional layer.

3. The array substrate according to claim 1 , wherein the additional layer is one of a copper layer, an oxide layer of silicon, a nitride layer of silicon, and polyimide layer with addition of a colorant.

4. The array substrate according to claim 1 , wherein the additional layer has a thickness of no more than 5000 Å.

5. The array substrate according to claim 1 , wherein a transparent protective layer is disposed above the additional layer.

6. The array substrate according to claim 1 , wherein the additional layer is one of a copper layer, an oxide layer of silicon, a nitride layer of silicon, and polyimide layer with addition of a colorant.

7. The array substrate according to claim 2 , wherein the additional layer is one of a copper layer, an oxide layer of silicon, a nitride layer of silicon, and polyimide layer with addition of a colorant.

8. The array substrate according to claim 1 , wherein the additional layer has a thickness of no more than 5000 Å.

9. The array substrate according to claim 2 , wherein the additional layer has a thickness of no more than 5000 Å.

10. The array substrate according to claim 3 , wherein the additional layer has a thickness of no more than 5000 Å.

11. The array substrate according to claim 2 , wherein the transparent protective layer has a thickness of no more than 5000 Å.

12. The array substrate according to claim 7 , wherein the transparent protective layer has a thickness of no more than 5000 Å.

13. A detecting method of an array substrate comprising a structure to be detected disposed on a base substrate, wherein an additional layer for detecting whether the structure to be detected is broken is disposed below the structure to be detected, wherein the additional layer has a color different from that of the structure to be detected and a same pattern shape as that of the structure to be detected, the method comprising:
irradiating white lights on the array substrate formed with the additional layer; and
determining a color of reflection lights reflected by the array substrate, if the color of the reflection lights having the color of the additional layer, then determining the structure to be detected corresponding to the color of the additional layer having a breakage defect; if the color of the reflection lights having no color of the additional layer, then determining the structure to be detected having no breakage defect, the structure to be detected being at least one of following structures: a gate, a gate scanning line, a data signal line, an active layer, a source, and a drain.

14. The method according to claim 13 , wherein at the step of determining the color of the reflection lights, a light filter unit with the same color the additional layer having is disposed in a light path of the reflection lights, and the color of the reflection lights reflected by the array substrate is determined by the lights passing through the light filter unit.

15. A detecting apparatus of an array substrate, the array substrate comprising:
a structure to be detected disposed on a base substrate, wherein an additional layer for detecting whether the structure to be detected is broken is disposed below the structure to be detected, wherein the additional layer has a color different from that of the structure to be detected and a same pattern shape as that of the structure to be detected, the structure to be detected being at least one of following structures: a gate, a gate scanning line, a data signal line, an active layer, a source, and a drain,
the detecting apparatus comprising:
a detecting stage for placing the array substrate to be detected thereon;
a light source of white color for irradiating white lights on the array substrate formed with the additional layer; and
a light filter unit for filtering the lights with colors different from the color of the additional layer.

16. The detecting apparatus according to claim 15 , wherein the light filter unit is a light filter with the same color as that of the additional layer.

17. The detecting apparatus according to claim 15 , further comprising a light detecting unit for identifying the same color as that of the additional layer.

18. The detecting apparatus according to claim 17 , further comprising a housing, wherein the light source and the light filter unit are disposed above the detecting stage on opposing sides of the detecting stage respectively, and the light detecting unit is disposed above the light filter unit, and the housing is disposed outside so as to accommodate the detecting stage, the light source, the light filter unit and the light detecting unit.

Assignees

• Boe Technology Group Co Ltd
• Beijing Boe Optoelectronics

Inventors

• Ji Xinyou
• Guo Jian

Classifications

• H10W90/284

  characterised by structural arrangements for measuring or testing · CPC title

• G09G3/006

  Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays (testing individual LED's G01R31/2635; testing lamps G01R31/44; testing of optical features of LCD displays G02F1/1309) · CPC title

• G01N2201/062

  LED's · CPC title

• G01N2021/9513

  Liquid crystal panels · CPC title

• G01N21/958

  Inspecting transparent materials {or objects, e.g. windscreens (for conveyed flat sheet or rod G01N21/896)} · CPC title